Projects per year
Personal profile
Quote
"In theory, there is no difference between theory and practice. But, in practice, there is." - Manfred Eigen
Research profile
Ron de Bruijn is a Doctoral Candidate in the Control Systems Technology (CST) - Mechatronic Systems Design (MSD) research group at the Mechanical Engineering department of the Eindhoven University of Technology (TU/e). His research focuses on accurate and high performance mechanics, mechatronic systems and design principles for precision engineering. The project de Bruijn is involved in is the “Advanced piezo-electric wafer stage for lithography and metrology”, a collaboration between the TU/e High Tech Systems Center (HTSC) and ASML. The main goal is to demonstrate the feasibility of an ultra-short stroke wafer stage using lightweight and compact piezo-electric actuators. de Bruijn is focusing on the mechatronic system architecture and design of the piezo-electric wafer stage.
Academic background
Ron de Bruijn received both, his BSc (Magna Cum Laude) and MSc (Summa Cum Laude) in electromechanical engineering technology from the KU Leuven University, Geel campus in Belgium. During his master graduation project “Cost Effective Design of the Pellicle Hardware” in collaboration with ASML, de Bruijn developed new, more cost effective hardware to connect the pellicle on the reticle. This novel design resulted in a patent publication and his thesis has been rewarded as best MSc thesis in Electromechanical Engineering Technology.
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Collaborations and top research areas from the last five years
Projects
- 1 Active
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TKI mini impuls "Advanced piezo-electric wafer stage for next generation lithography and metrology application"
Steinbuch, M. (Project Manager) & de Bruijn, R. (Project member)
1/01/18 → 30/11/25
Project: Third tier
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Beyond Inertial Match: Optimal transmission ratio values for a payload subject to additional forces
de Bruijn, R., 28 Apr 2023, In: Mikroniek. 63, 2, p. 5-10 6 p.Research output: Contribution to journal › Article › Professional
Open AccessFile154 Downloads (Pure) -
Experimental validation of a piezoelectric wafer stage concept combined with highly variable viscoelastic stiffness
de Bruijn, R. G. C., van de Wijdeven, J. J. M. & Vermeulen, J. P. M. B., 4 Nov 2024, 39th Annual Meeting of the American Society of Precision Engineering. American Society of Precision Engineering (ASPE), p. 21-25 (2024 ASPE Annual Meeting; vol. 83).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open AccessFile141 Downloads (Pure) -
Enabling piezoelectric wafer stages with highly variable stiffness device for next-generation semicon equipment
de Bruijn, R. G. C., van de Wijdeven, J. J. M. & Vermeulen, J. P. M. B., 26 Sept 2023, 2023 DSPE Conference on Precision Mechatronics. p. 49-53 5 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
Open AccessFile297 Downloads (Pure) -
Lithographic apparatus stage coupling
de Goeij, J. (Inventor), de Bruijn, R. (Inventor), Vermeulen, J. P. M. B. (Inventor), Leenaars, R. (Inventor) & Jansen, B. (Inventor), 11 May 2023, Patent No. WO2023078788, Priority date 11 May 2023Research output: Patent › Patent publication
Open AccessFile197 Downloads (Pure) -
Piezoelectric Wafer Stage Based on Highly Variable Viscoelastic Stiffness
de Bruijn, R. G. C., Vermeulen, J. P. M. B. & van de Wijdeven, J. J. M., 15 Nov 2023, ASPE 2023 Annual Meeting: 38th Annual Meeting of the American Society for Precision Engineering, ASPE 2023, Boston, 12- 17 November 2023. American Society of Precision Engineering (ASPE), p. 1-6 6 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
File2 Citations (Scopus)274 Downloads (Pure)
Prizes
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Best MSc thesis award of Electromechanical Engineering Technology at KU Leuven, Geel Campus, Belgium.
de Bruijn, R. (Recipient), 2020
Prize: Other › Career, activity or publication related prizes (lifetime, best paper, poster etc.) › Scientific
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Best Presentation Award at the 2023 DSPE Conference on Precision Mechatronics
de Bruijn, R. (Recipient), 27 Sept 2023
Prize: Other › Career, activity or publication related prizes (lifetime, best paper, poster etc.) › Scientific