• 2373 Citations
19942019

Research output per year

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Research Output

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Patent publication
2008

Photon source

Schram, D. C., Engeln, R. A. H., Zijlmans, R. A. B., Sande, van de, M. J. F. & Husken, A. B. M., 26 Jun 2008, Patent No. WO2008075950

Research output: PatentPatent publication

Open Access
File
18 Downloads (Pure)
2004

Optical inspection system and radiation source for use therein

Haverlag, M., Schram, D. C., Engeln, R. A. H., Brandt, van den, A. H. J. & Philips, 2004

Research output: PatentPatent publication

Open Access
File
21 Downloads (Pure)

Optical inspection system and radiation source for use therein

Haverlag, M., Schram, D. C., Engeln, R. A. H. & Brandt, van den, A. H. J., 10 Jun 2004, Patent No. WO2004048950

Research output: PatentPatent publication