Projects per year
Personal profile
Academic background
Qihao Yu received B.Sc. degree in Electrical Engineering and Automation from Zhejiang University, Hangzhou, China in 2017 and M.Sc. degree in Electrical Engineering with Cum Laude from Eindhoven University of Technology (TU/e), Eindhoven, the Netherlands in 2018.
Currently, he is working towards the Ph.D. degree in the Electromechanics and Power Electronics (EPE) Group, Electrical Engineering Department in TU/e. Since 2017, he has been a part-time engineer in Prodrive Technologies B.V., Son, the Netherlands. His research interests focus on high-performance power electronics for high-tech industrial applications, such as plasma etching/deposition in semiconductor manufacturing.
Quote
Endeavor to reach for high-hanging fruits.
Research profile
Qihao Yu is a doctoral candidate in Power Electronics Lab (PEL/e), Electromechanics and Power Electronics Group (EPE) at Eindhoven University of Technology (TU/e). He is mainly working on power electronics systems for plasma processing in semiconductor manufacturing.
Expertise related to UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This person’s work contributes towards the following SDG(s):
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Projects
- 1 Finished
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Prodrive: Research on a radio frequency bias voltage generator for remote plasma application
Wijnands, C. G. E., Yu, Q., van Veen, R., van der Hagen, D. & Torri, P.
1/11/18 → 30/04/23
Project: Research direct
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Accurate Ion Energy Control in Plasma Processing by Switched-Mode Power Converter
Yu, Q., Lemmen, E., Wijnands, K. & Vermulst, B., 1 Jul 2022, 2022 International Power Electronics Conference, IPEC-Himeji 2022-ECCE Asia. Institute of Electrical and Electronics Engineers, p. 498-505 8 p. 9806909Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open AccessFile45 Downloads (Pure) -
Equivalent electric circuit model of accurate ion energy control with tailored waveform biasing
Yu, Q., Lemmen, E., Vermulst, B., Mackus, A. J. M., Kessels, W. M. M. & Wijnands, K., Mar 2022, In: Plasma Sources Science and Technology. 31, 3, 14 p., 035012.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile2 Citations (Scopus)58 Downloads (Pure) -
Voltage waveform generator for ion energy control in plasma processing
Yu, Q., Lemmen, E. & Vermulst, B. J. D., 2022, (Submitted)Research output: Patent › Patent publication
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Auto-Tuning Control of a Switched-Mode Power Converter for Tailored Pulse-Shape Biased Plasma Etching Applications
Yu, Q., Lemmen, E., Wijnands, K. & Vermulst, B., 16 Nov 2021, 2021 IEEE Energy Conversion Congress and Exposition, ECCE 2021 - Proceedings. Institute of Electrical and Electronics Engineers, p. 5949-5954 6 p. 9595672Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open AccessFile120 Downloads (Pure) -
Determining an optimal ion energy for plasma processing of a dielectric substrate
Yu, Q., Lemmen, E. & Vermulst, B. J. D., 8 Apr 2021, IPC No. C23C14/34, G05F3/20, H01J37/32, Patent No. WO2021064110, 1 Oct 2020, Priority date 2 Oct 2019, Priority No. NL2023935AResearch output: Patent › Patent publication
Open AccessFile36 Downloads (Pure)
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A Switched-Mode Power Amplifier for Ion Energy Control In Plasma Etching
Qihao Yu (Speaker)
10 Sept 2020Activity: Talk or presentation types › Contributed talk › Scientific
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Exploring the Boundaries and Effects of the Discontinuous Conduction Mode in H-Bridge Inverter with Dead-time
Qihao Yu (Speaker)
8 Sept 2020Activity: Talk or presentation types › Contributed talk › Scientific
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A Numerical Method for Calculating the Output Spectrum of an H-Bridge Inverter with Dead-time Based on Switching Mode Analysis
Qihao Yu (Speaker)
1 Oct 2019Activity: Talk or presentation types › Contributed talk › Scientific
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A 1 MHz wide bandgap power amplifier for high-precision applications
Qihao Yu (Speaker)
5 Sept 2019Activity: Talk or presentation types › Contributed talk › Scientific
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European Center of Power Electronics (ECPE) GaN & SiC Forum
Qihao Yu (Participant)
26 Mar 2019 → 27 Mar 2019Activity: Participating in or organising an event types › Workshop, seminar, course or exhibition › Scientific
Thesis
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A 1 MHz wide bandgap power amplifier for high-precision applications
Author: Yu, Q., 30 Aug 2018Supervisor: Lemmen, E. (Supervisor 1), Verberne, J. (External person) (External coach) & Wijnands, K. (Supervisor 1)
Student thesis: Master