Research output per year
Research output per year
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Dive into the research topics where Paul P.M. Blom is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Research output
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Charge neutralisation of microparticles by pulsing a low-pressure shielded spatial plasma afterglow
van Minderhout, B., van Huijstee, J. C. A., Peijnenburg, A. T. A., Blom, P., Kroesen, G. M. W. & Beckers, J., Apr 2021, In: Plasma Sources Science and Technology. 30, 4, 10 p., 045016.Research output: Contribution to journal › Article › Academic › peer-review
Open Access4 Citations (Scopus) -
Plasma assisted particle contamination control: Plasma charging dependence on particle morphology
van Huijstee, J. C. A., van Minderhout, B., Rompelberg, R. M. H., Blom, P., Peijnenburg, T. & Beckers, J., 2021, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV. Adan, O. & Robinson, J. C. (eds.). SPIE, 6 p. 116113A. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 11611).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
1 Citation (Scopus) -
Charge control of micro-particles in a shielded plasma afterglow
van Minderhout, B., van Huijstee, J. C. A., Platier, B., Peijnenburg, T., Blom, P. P. M., Kroesen, G. M. W. & Beckers, J., 9 Jun 2020, In: Plasma Sources Science and Technology. 29, 6, 11 p., 065005.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile10 Citations (Scopus)20 Downloads (Pure) -
Particle contamination control by application of plasma
Beckers, J., van Minderhout, B., Blom, P. P. M., Kroesen, G. M. W. & Peijnenburg, T., 23 Mar 2020, Extreme Ultraviolet (EUV) Lithography XI. Felix, N. M. & Lio, A. (eds.). SPIE, 6 p. 113232L. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 11323).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open AccessFile6 Citations (Scopus)123 Downloads (Pure) -
The charge of micro-particles in a low pressure spatial plasma afterglow
van Minderhout, B., Peijnenburg, A. T. A. T., Blom, P. P. M., Vogels, J. M., Kroesen, G. & Beckers, J., 10 Jun 2019, In: Journal of Physics D: Applied Physics. 52, 32, 6 p., 32LT03.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile16 Citations (Scopus)29 Downloads (Pure)
Thesis
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Reconsideration of an infrared spectroscopic phase modulation ellipsometer
Author: Blom, P., 31 Oct 1991Supervisor: de Hoog, F. (Supervisor 1) & Kroesen, G. (Supervisor 2)
Student thesis: Master
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