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Dive into the research topics where Nicholas Chittock is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Collaborations and top research areas from the last five years
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Research output
- 5 Article
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Isotropic atomic layer etching of GaN using SF6 plasma and Al(CH3)3
Chittock, N. J., Shu, Y., Elliott, S. D., Knoops, H. C. M., Kessels, W. M. M. & Mackus, A. J. M., 21 Aug 2023, In: Journal of Applied Physics. 134, 7, 13 p., 075302.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile -
Surface Smoothing by Atomic Layer Deposition and Etching for the Fabrication of Nanodevices
Gerritsen, S. H., Chittock, N. J., Vandalon, V., Verheijen, M. A., Knoops, H. C. M., Kessels, W. M. M. & Mackus, A. J. M., 23 Dec 2022, In: ACS Applied Nano Materials. 5, 12, p. 18116-18126 11 p.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile3 Citations (Scopus)41 Downloads (Pure) -
Etching with atomic-level precision: The emerging field of atomic layer etching
Mackus, A. J. M., Faraz, T. & Chittock, N., 2 Jun 2020, In: Nevac Blad. 58, 2, p. 40-42Research output: Contribution to journal › Article › Popular
Open AccessFile95 Downloads (Pure) -
Isotropic plasma atomic layer etching of Al2O3 using a fluorine containing plasma and Al(CH3)3
Chittock, N., Vos, M. F. J., Faraz, T., Kessels, W. M. M., Knoops, H. C. M. & Mackus, A. J. M., 20 Oct 2020, In: Applied Physics Letters. 117, 16, p. 162107 5 p., 162107.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile12 Citations (Scopus)448 Downloads (Pure) -
Precise ion energy control with tailored waveform biasing for atomic scale processing
Faraz, T., Verstappen, Y. G. P., Verheijen, M. A., Chittock, N., Escandon Lopez, J., Heijdra, E., van Gennip, W. J. H., Kessels, W. M. M. & Mackus, A. J. M., 7 Dec 2020, In: Journal of Applied Physics. 128, 21, 9 p., 213301.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile24 Citations (Scopus)375 Downloads (Pure)
Datasets
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Isotropic plasma atomic layer etching of Al2O3
Chittock, N. (Creator), 4TU.Centre for Research Data, 21 Oct 2020
DOI: 10.4121/13011239, https://data.4tu.nl/articles/_/13011239
Dataset
Prizes
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ALE Best Student Paper Award
Chittock, Nicholas (Recipient), 30 Jun 2020
Prize: Other › Career, activity or publication related prizes (lifetime, best paper, poster etc.) › Scientific