• 2433 Citations
1989 …2019

Research output per year

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Research Output

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Patent publication
2011

Lithographic apparatus and device manufacturing method

Baggen, M. C. J., Biggelaar, van den, C. M., Tso, T., Heertjes, M. F., Kamidi, R., Houben, D. A. P. H., Baggen, C. P. M. J. & Molengraft, van de, M. J. G., 7 Sep 2011, Patent No. US 8,014,881 B2

Research output: PatentPatent publication

1 Downloads (Pure)
2007

Learning based feedforward control using FIR filtering

Baggen, M. C. J., Heertjes, M. F. & Molengraft, van de, M. J. G., 2007, Patent No. P-2710.000-US

Research output: PatentPatent publication

2006
Open Access
File
30 Downloads (Pure)