• 2330 Citations
1989 …2019
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Research Output 1989 2019

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Patent publication
2011
1 Downloads (Pure)

Lithographic apparatus and device manufacturing method

Baggen, M. C. J., Biggelaar, van den, C. M., Tso, T., Heertjes, M. F., Kamidi, R., Houben, D. A. P. H., Baggen, C. P. M. J. & Molengraft, van de, M. J. G., 7 Sep 2011, Patent No. US 8,014,881 B2

Research output: PatentPatent publication

Control systems
Transfer functions
2007

Learning based feedforward control using FIR filtering

Baggen, M. C. J., Heertjes, M. F. & Molengraft, van de, M. J. G., 2007, Patent No. P-2710.000-US

Research output: PatentPatent publication

2006
28 Downloads (Pure)
Open Access
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Electric fields
Fibers