• 2433 Citations
1989 …2019

Research output per year

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Research Output

Patent publication

Lithographic apparatus and device manufacturing method

Baggen, M. C. J., Biggelaar, van den, C. M., Tso, T., Heertjes, M. F., Kamidi, R., Houben, D. A. P. H., Baggen, C. P. M. J. & Molengraft, van de, M. J. G., 7 Sep 2011, Patent No. US 8,014,881 B2

Research output: PatentPatent publication

1 Downloads (Pure)

Learning based feedforward control using FIR filtering

Baggen, M. C. J., Heertjes, M. F. & Molengraft, van de, M. J. G., 2007, Patent No. P-2710.000-US

Research output: PatentPatent publication

Open Access
30 Downloads (Pure)