M.C.M. (Richard) van de Sanden

prof.dr.ir.

  • 16276 Citations
1987 …2020

Research output per year

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Personal profile

Research profile

RICHARD van de SANDEN is the director of the Dutch Instute for Fundamental Energy Research (DIFFER since 2011) and a Professor at the Department of Applied Physics of the Eindhoven University of Technology in the Netherlands. He received his Ph.D. in 1991 from the Eindhoven University on the topic of the fundamental investigation of an expanding plasma jet. In 1990, he was appointed an Assistant Professor, his main interest being the fundamentals of plasma enhanced deposition and etching. During 1992-1997, he was a Research Fellow of the Royal Netherlands Academy of Arts and Sciences. In 1993, he was on sabbatical leave at AT&T Bell Labs in the group of R. Gottscho and worked on aspect ratio dependent etching. Since then he has worked on fast plasma deposition technology, focusing on the fundamentals of both plasma, as well as on the surface processes occurring in plasma processing of materials. He specializes in applying new advanced diagnostics for gas phase species detection as well as in situ analysis and control of the physical and chemical properties of the materials processed. In 2000, he was appointed a Full Professor at the Eindhoven University of Technology. He has authored and co-authored over 400 papers in peer-reviewed journals and is the co-inventor of > 20 patents. He is a Fellow of AVS, IUPAC and IOP and serves on numerous scientific committees of international conferences. He has consulted for several companies (General Electric, Fujifilm, Novellus, BOC Edwards, Linde Gas Group, Tetrapak) on plasma and thin film deposition technologies. He is a member of AVS, SVC, IOP, AAAS and MRS and has served two times as a Program Chair for the AVS Thin Film Division in 2000 and 2002, as a Chair of the AVS Thin Film Division in 2004 and a (program) chair for the Plasma Science and Technology Division in 2012. In 2006 he became a Program Leader for Micro- and Nano-engineering of Functional Materials at the Materials Innovations Institute (M2i). Since 2005, he was the European Regional Editor of Plasma Sources: Science and Technology until 2014. Since 2015 he is a senior member of the Editorial board of Plasma Sources: Science and Technology and is a member of the editorial board of Plasma Processes and Polymers. In 2000, he was a Visiting Professor at the University of California (Santa Barbara) and in 2006, he was a Distinguished Lecturer in the Department of Mechanical Engineering of the University of Minnesota and a Visiting Professor at Rensselaer Polytechnic Institute in Troy, NY. He has lectured at Summer Schools on Plasma Physics and Chemistry and was one of the organizers of the Summer School on Low Temperature Plasma Physics in Bad Honnef which is held each year (until 2011). In 2008 he has won the European William Crookes Plasma Prize. In 2009 he was awarded the Valorisation Prize for his achievements in transferring scientific knowledge to industry. Since 2013 he is a member of the Netherlands Academy of Arts and Sciences and in 2014 he won the Plasma Prize of the AVS Plasma Science and Technology Division  

External positions

Director, DIFFER Dutch Institute for Fundamental Energy Research

2011 → …

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Research Output

Emission spectroscopy of He lines in high-density plasmas in Magnum-PSI

Kajita, S., Akkermans, G., Fujii, K., Van Der Meiden, H. & Van De Sanden, M. C. M., 1 Feb 2020, In : AIP Advances. 10, 2, 025225.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
  • Mode resolved heating dynamics in pulsed microwave CO2 plasma from laser Raman scattering

    van den Bekerom, D. C. M., van de Steeg, A., van de Sanden, M. C. M. & van Rooij, G. J., 30 Jan 2020, In : Journal of Physics D: Applied Physics. 53, 5, 11 p., 054002.

    Research output: Contribution to journalArticleAcademicpeer-review

  • An electrochemical study on the cathode of the intermediate temperature tubular sodium-sulfur (NAS) battery

    Nikiforidis, G., Jongerden, G. J., Jongerden, E. F., van de Sanden, M. C. M. & Tsampas, M. N., 12 Jan 2019, In : Journal of the Electrochemical Society. 166, 2, p. A135-A142 8 p.

    Research output: Contribution to journalArticleAcademicpeer-review

  • 3 Citations (Scopus)

    Atmospheric-pressure silica-like thin film deposition using 200 kHz/13.56 MHz dual frequency excitation

    Liu, Y., Elam, F. M., Zoethout, E., Starostin, S. A., van de Sanden, M. C. M. & de Vries, H. W., 2 Jul 2019, In : Journal of Physics D: Applied Physics. 52, 35, 11 p., 355201.

    Research output: Contribution to journalArticleAcademicpeer-review

  • Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction

    Di Palma, V., Zafeiropoulos, G., Goldsweer, T., Kessels, W. M. M., van de Sanden, M. C. M., Creatore, M. & Tsampas, M. N., 1 Jan 2019, In : Electrochemistry Communications. 98, p. 73-77 5 p.

    Research output: Contribution to journalArticleAcademicpeer-review

    Open Access
    File
  • 5 Citations (Scopus)
    76 Downloads (Pure)

    Activities

    • 60 Contributed talk
    • 4 Invited talk

    FOM Rijnhuizen, Utrecht, the Netherlands

    M.C.M. van de Sanden (Invited speaker)
    29 Sep 2010

    Activity: Talk or presentation typesInvited talkScientific

    Department of Chemical Engineering, Eindhoven, the Netherlands

    M.C.M. van de Sanden (Invited speaker)
    25 Jun 2010

    Activity: Talk or presentation typesInvited talkScientific

    NL Ambassadeur, Parijs, France

    M.C.M. van de Sanden (Invited speaker)
    3 Jun 2010

    Activity: Talk or presentation typesInvited talkScientific

    RisØ National Laboratory for Sustainable Energy, Roskilde, Denmark

    M.C.M. van de Sanden (Invited speaker)
    12 May 2010

    Activity: Talk or presentation typesInvited talkScientific

    M2i conference, Noordwijkerhout, the Netherlands

    M.C.M. van de Sanden (Speaker)
    7 Dec 2009

    Activity: Talk or presentation typesContributed talkScientific

    Student theses

    A numerical and experimental characterization of a hydrogen plasma

    Author: Wevers, J., 31 Aug 1993

    Supervisor: van de Sanden, M. (Supervisor 1) & de Graaf, M. (Supervisor 2)

    Student thesis: Master

    File

    Atmospheric pressure PECVD of thin hydrophobic organosilicon films on polymers

    Author: Grauls, P., 28 Feb 2009

    Supervisor: de Graaf, A. (External person) (Supervisor 1), Creatore, M. (Supervisor 2) & van de Sanden, M. (Supervisor 2)

    Student thesis: Master

    File
    File

    Cavity ring down spectroscopy on expanding plasmas

    Author: Smets, A., 31 Dec 1997

    Supervisor: Letourneur, K. (Supervisor 1), Boogaarts, M. G. (External person) (Supervisor 2), van de Sanden, M. (Supervisor 2) & Schram, D. (Supervisor 2)

    Student thesis: Master

    File

    Cavity-ringdown spectroscopy on methyl and silyl radicals : examining expanding plasmas

    Author: Böcker, P., 1999

    Supervisor: Boogaarts, M. G. (External person) (Supervisor 1), van de Sanden, M. (Supervisor 2) & Schram, D. (Supervisor 2)

    Student thesis: Master

    File