M.C.M. (Richard) van de Sanden

prof.dr.ir.

  • 15158 Citations
1989 …2019
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Personal profile

Research profile

RICHARD van de SANDEN is the director of the Dutch Instute for Fundamental Energy Research (DIFFER since 2011) and a Professor at the Department of Applied Physics of the Eindhoven University of Technology in the Netherlands. He received his Ph.D. in 1991 from the Eindhoven University on the topic of the fundamental investigation of an expanding plasma jet. In 1990, he was appointed an Assistant Professor, his main interest being the fundamentals of plasma enhanced deposition and etching. During 1992-1997, he was a Research Fellow of the Royal Netherlands Academy of Arts and Sciences. In 1993, he was on sabbatical leave at AT&T Bell Labs in the group of R. Gottscho and worked on aspect ratio dependent etching. Since then he has worked on fast plasma deposition technology, focusing on the fundamentals of both plasma, as well as on the surface processes occurring in plasma processing of materials. He specializes in applying new advanced diagnostics for gas phase species detection as well as in situ analysis and control of the physical and chemical properties of the materials processed. In 2000, he was appointed a Full Professor at the Eindhoven University of Technology. He has authored and co-authored over 400 papers in peer-reviewed journals and is the co-inventor of > 20 patents. He is a Fellow of AVS, IUPAC and IOP and serves on numerous scientific committees of international conferences. He has consulted for several companies (General Electric, Fujifilm, Novellus, BOC Edwards, Linde Gas Group, Tetrapak) on plasma and thin film deposition technologies. He is a member of AVS, SVC, IOP, AAAS and MRS and has served two times as a Program Chair for the AVS Thin Film Division in 2000 and 2002, as a Chair of the AVS Thin Film Division in 2004 and a (program) chair for the Plasma Science and Technology Division in 2012. In 2006 he became a Program Leader for Micro- and Nano-engineering of Functional Materials at the Materials Innovations Institute (M2i). Since 2005, he was the European Regional Editor of Plasma Sources: Science and Technology until 2014. Since 2015 he is a senior member of the Editorial board of Plasma Sources: Science and Technology and is a member of the editorial board of Plasma Processes and Polymers. In 2000, he was a Visiting Professor at the University of California (Santa Barbara) and in 2006, he was a Distinguished Lecturer in the Department of Mechanical Engineering of the University of Minnesota and a Visiting Professor at Rensselaer Polytechnic Institute in Troy, NY. He has lectured at Summer Schools on Plasma Physics and Chemistry and was one of the organizers of the Summer School on Low Temperature Plasma Physics in Bad Honnef which is held each year (until 2011). In 2008 he has won the European William Crookes Plasma Prize. In 2009 he was awarded the Valorisation Prize for his achievements in transferring scientific knowledge to industry. Since 2013 he is a member of the Netherlands Academy of Arts and Sciences and in 2014 he won the Plasma Prize of the AVS Plasma Science and Technology Division  

External positions

Director, DIFFER Dutch Institute for Fundamental Energy Research

2011 → …

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Research Output 1989 2019

Atmospheric-pressure silica-like thin film deposition using 200 kHz/13.56 MHz dual frequency excitation

Liu, Y., Elam, F. M., Zoethout, E., Starostin, S. A., van de Sanden, M. C. M. & de Vries, H. W., 2 Jul 2019, In : Journal of Physics D: Applied Physics. 52, 35, 11 p., 355201

Research output: Contribution to journalArticleAcademicpeer-review

Silicon Dioxide
Atmospheric pressure
atmospheric pressure
Silica
silicon dioxide
2 Citations (Scopus)

Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction

Di Palma, V., Zafeiropoulos, G., Goldsweer, T., Kessels, W. M. M., van de Sanden, M. C. M., Creatore, M. & Tsampas, M. N., 1 Jan 2019, In : Electrochemistry Communications. 98, p. 73-77 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Atomic layer deposition
Cobalt
Phosphates
Electrocatalysts
Oxygen

Effects of transition metal dopants on the calcination of CaCO 3 under Ar, H 2 O and H 2

Belete, T. T., van de Sanden, M. C. M. & Gleeson, M. A., 1 May 2019, In : Journal of CO2 Utilization. 31, p. 152-166 15 p.

Research output: Contribution to journalArticleAcademicpeer-review

transition element
Carbon Monoxide
Calcination
Transition metals
Doping (additives)

Electrochemistry of sputtered hematite photoanodes: a comparison of metallic DC versus reactive RF sputtering

Sinha, R., Lavrijsen, R., Verheijen, M. A., Zoethout, E., Genuit, H., van de Sanden, M. C. M. & Bieberle-Hütter, A., 28 May 2019, In : ACS Omega. 4, 5, p. 9262-9270 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Hematite
Electrochemistry
Sputtering
Magnetron sputtering
Thin films

Evaluation of (plasma-assisted) decomposition of transition metals doped CaCO3 for CO2 capture and conversion

Belete, T. T., 5 Sep 2019, (Accepted/In press) Eindhoven: Technische Universiteit Eindhoven. 169 p.

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)Academic

Open Access
File

Activities 2004 2010

  • 60 Contributed talk
  • 4 Invited talk

FOM Rijnhuizen, Utrecht, the Netherlands

M.C.M. van de Sanden (Invited speaker)
29 Sep 2010

Activity: Talk or presentation typesInvited talkScientific

Department of Chemical Engineering, Eindhoven, the Netherlands

M.C.M. van de Sanden (Invited speaker)
25 Jun 2010

Activity: Talk or presentation typesInvited talkScientific

NL Ambassadeur, Parijs, France

M.C.M. van de Sanden (Invited speaker)
3 Jun 2010

Activity: Talk or presentation typesInvited talkScientific

RisØ National Laboratory for Sustainable Energy, Roskilde, Denmark

M.C.M. van de Sanden (Invited speaker)
12 May 2010

Activity: Talk or presentation typesInvited talkScientific

M2i conference, Noordwijkerhout, the Netherlands

M.C.M. van de Sanden (Speaker)
7 Dec 2009

Activity: Talk or presentation typesContributed talkScientific

Student theses

A numerical and experimental characterization of a hydrogen plasma

Author: Wevers, J., 31 Aug 1993

Supervisor: van de Sanden, M. (Supervisor 1) & de Graaf, M. (Supervisor 2)

Student thesis: Master

File

Atmospheric pressure PECVD of thin hydrophobic organosilicon films on polymers

Author: Grauls, P., 28 Feb 2009

Supervisor: Graaf, de, A. (External person) (Supervisor 1), Creatore, M. (Supervisor 2) & van de Sanden, M. (Supervisor 2)

Student thesis: Master

File
File

Cavity ring down spectroscopy on expanding plasmas

Author: Smets, A., 31 Dec 1997

Supervisor: Letourneur, K. (Supervisor 1), Boogaarts, M. G. (External person) (Supervisor 2), van de Sanden, M. (Supervisor 2) & Schram, D. (Supervisor 2)

Student thesis: Master

File

Cavity-ringdown spectroscopy on methyl and silyl radicals : examining expanding plasmas

Author: Böcker, P., 1999

Supervisor: Boogaarts, M. G. (External person) (Supervisor 1), van de Sanden, M. (Supervisor 2) & Schram, D. (Supervisor 2)

Student thesis: Master

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