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Personal profile
Expertise related to UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This person’s work contributes towards the following SDG(s):
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Dive into the research topics where Mark A. van de Kerkhof is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Collaborations and top research areas from the last five years
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Research output
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A global plasma and surface model of hydrogen/methane inductively coupled discharge to analyze hydrocarbon plasma-surface interactions in extreme-ultraviolet lithography machines
Kemaneci, E. (Corresponding author-nrf), von Keudell, A., Heijmans, L., Yakunin, A. M. & de Kerkhof, M. V., 28 Jul 2024, In: Journal of Applied Physics. 136, 4, 25 p., 043301.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile26 Downloads (Pure) -
Charging and Mobilization of Dust Particles on a Surface in Plasma
Pagán Muñoz, J. H. (Corresponding author), Wang, X., Horányi, M., Kvon, V., Heijmans, L., Chaudhuri, M., Van De Kerkhof, M., Yakunin, A. M., Krainov, P. & Astakhov, D., 13 Sept 2024, In: Physical Review Letters. 133, 11, 6 p., 115301.Research output: Contribution to journal › Article › Academic › peer-review
3 Citations (Scopus) -
Particle mobilization by EUV-induced plasma and fast electrons
van de Kerkhof, M., Shefer, D., Nikipelov, A., Sbrizzai, F., Kvon, V., Bouwmans, S., Beckers, J. & Banine, V., 10 Apr 2024, Optical and EUV Nanolithography XXXVII. Burkhardt, M. & van Lare, C. (eds.). SPIE, 10 p. 129530E. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12953).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open AccessFile115 Downloads (Pure) -
Laser light scattering (LLS) to observe plasma impact on the adhesion of micrometer-sized particles to a surface
Shefer, D. (Corresponding author), Nikipelov, A., van de Kerkhof, M., Banine, V. & Beckers, J., 9 Nov 2023, In: Journal of Physics D: Applied Physics. 56, 45, 10 p., 455201.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile4 Citations (Scopus)37 Downloads (Pure) -
Particle charging during pulsed EUV exposures with afterglow effect
Chaudhuri, M. (Corresponding author), Heijmans, L. C. J., van de Kerkhof, M., Krainov, P., Astakhov, D. & Yakunin, A. M., Sept 2023, In: Plasma Sources Science and Technology. 32, 9, 7 p., 095005.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile3 Citations (Scopus)7 Downloads (Pure)
Thesis
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Fabry-Perot interferometry : a proposal for a high-density plasma diagnostic
van de Kerkhof, M. A. (Author), Vender, D. (Supervisor 1) & Kroesen, G. M. W. (Supervisor 2), 30 Apr 1995Student thesis: Master
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