• 9 Citations
20172019

Research output per year

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Research Output

  • 9 Citations
  • 3 Article

Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al2O3

Mione, M., Engeln, R., Vandalon, V., Kessels, E. & Roozeboom, F., 19 Aug 2019, In : Applied Physics Letters. 115, 8, 5 p., 083101.

Research output: Contribution to journalArticleAcademicpeer-review

  • Atmospheric pressure plasma enhanced spatial ALD of ZrO2 for low-temperature, large-area applications

    Mione, M. A., Katsouras, I., Creyghton, Y., Van Boekel, W., Maas, J., Gelinck, G., Roozeboom, F. & Illiberi, A., Dec 2017, In : ECS Journal of Solid State Science and Technology. 6, 12, p. N243-N249 7 p.

    Research output: Contribution to journalArticleAcademicpeer-review

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  • 9 Citations (Scopus)
    98 Downloads (Pure)