• 871 Citations

Research output per year

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Personal profile


“The high-precision motion industry in general and the wafer scanning industry in particular are largely driven by linear control design. These designs inherently impose limitations in terms of control system performance, i.e. achievable bandwidths, overshoot, and settling times. Nonlinear control designs offer extra design freedom that can be used to break free from linear design limitations. This could enable future control system performances needed to support the technology roadmap in high-precision mechatronics.”

Research profile

Marcel Heertjes his primary affiliation is with ASML in the role of principle engineer and control competence leader. His main research interests are with industrial control for high-precision mechatronic systems with special focus on nonlinear control, feedforward and learning control, and data-driven optimization and self-tuning. His nonlinear control contributions and developments focus on full support of frequency-domain design, synthesis, loopshaping, and qualification tools that attempt at breaking free from linear control design limitations. His primary ambition is to provide a clear view on (a) robust nonlinear control design and stability analysis, and (b) the associated data-driven controller synthesis and tuning.

Academic background

Marcel Heertjes received both his MSc and PhD in mechanical engineering from Eindhoven University of Technology in 1995 and 1999, respectively. In 2000, he joined the Philips Centre for Industrial Technology in Eindhoven. In 2007 he joined ASML, Department of Mechatronic Systems Development, in Veldhoven, The Netherlands. He served as guest editor of International Journal of Robust and Nonlinear Control (2011)  and IFAC Mechatronics (2014) and currently is associate editor of IFAC Mechatronics (since 2016).  

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Research Output

Conformal slip-free wafer chucking using an actuated wafer table

Hermanussen, S. J., Habets, M. B. I., Heertjes, M. F. & Vermeulen, J. P. M. B., 10 Feb 2020, 2019 7th International Conference on Control, Mechatronics and Automation (ICCMA). Piscataway: Institute of Electrical and Electronics Engineers, p. 278-282 5 p. 8988610

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

  • 2 Downloads (Pure)

    Everything is under control

    Heertjes, M. F., 6 Mar 2020, Eindhoven: Technische Universiteit Eindhoven. 24 p.

    Research output: Book/ReportInaugural speechAcademic

    Open Access
    58 Downloads (Pure)

    Hybrid integral reset control with application to a lens motion system

    Gruntjens, K. G. J., Heertjes, M. F., van Loon, S. J. L. M., van de Wouw, N. & Heemels, W. P. M. H., 1 Jul 2019, 2019 American Control Conference, ACC 2019. Piscataway: Institute of Electrical and Electronics Engineers, p. 2408-2413 6 p. 8815268

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

  • 1 Downloads (Pure)

    Hybrid integrator-gain system for active vibration isolation with improved transient response

    Heertjes, M., van den Eijnden, S., Sharif, B., Heemels, M. & Nijmeijer, H., Sep 2019, In : IFAC-PapersOnLine. 52, 15, p. 454-459 6 p.

    Research output: Contribution to journalConference articleAcademicpeer-review

    Open Access
    19 Downloads (Pure)

    Mixed feedback and feedforward control design for multi-axis vibration isolation systems

    Beijen, M. A., Heertjes, M. F., Butler, H. & Steinbuch, M., 1 Aug 2019, In : Mechatronics. 61, p. 106-116 11 p.

    Research output: Contribution to journalArticleAcademicpeer-review

  • 1 Citation (Scopus)
    9 Downloads (Pure)


    Press / Media

    Student theses

    Active vibration isolation with sliding mode control

    Author: van Gils, D., 30 Jun 2014

    Supervisor: Heertjes, M. (Supervisor 1) & Nijmeijer, H. (Supervisor 2)

    Student thesis: Master

    An analysis towards shock robustness in an optical disc drive

    Author: Coolen, R., 30 Sep 2003

    Supervisor: Steinbuch, M. (Supervisor 1), Homburg, F. (Supervisor 2), Nuij, P. (Supervisor 2), Leenknegt, G. (Supervisor 2), Heertjes, M. (Supervisor 2) & Cremers, F. (External person) (Supervisor 2)

    Student thesis: Master

    A scheduled control design for motion stages with varying sensor configurations

    Author: van der Weijst, R., 31 Dec 2014

    Supervisor: Heertjes, M. (Supervisor 1), van Loon, S. (Supervisor 2) & Heemels, W. (Supervisor 2)

    Student thesis: Master

    A variable gain controller with reset properties

    Author: Gruntjens, K., 31 Aug 2015

    Supervisor: Steinbuch, M. (Supervisor 1) & Heertjes, M. (Supervisor 2)

    Student thesis: Master

    A zero dynamics based approach to actuator positioning: controlling a beam with one-sided spring

    Author: Sanders, L., 30 Apr 1997

    Supervisor: Kok, J. (Supervisor 1), Heertjes, M. (Supervisor 2) & van de Molengraft, M. (Supervisor 2)

    Student thesis: Master