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Personal profile

Quote

“The high-precision motion industry in general and the wafer scanning industry in particular are largely driven by linear control design. These designs inherently impose limitations in terms of control system performance, i.e. achievable bandwidths, overshoot, and settling times. Nonlinear control designs offer extra design freedom that can be used to break free from linear design limitations. This could enable future control system performances needed to support the technology roadmap in high-precision mechatronics.”

Research profile

Marcel Heertjes his primary affiliation is with ASML in the role of principle engineer and control competence leader. His main research interests are with industrial control for high-precision mechatronic systems with special focus on nonlinear control, feedforward and learning control, and data-driven optimization and self-tuning. His nonlinear control contributions and developments focus on full support of frequency-domain design, synthesis, loopshaping, and qualification tools that attempt at breaking free from linear control design limitations. His primary ambition is to provide a clear view on (a) robust nonlinear control design and stability analysis, and (b) the associated data-driven controller synthesis and tuning.

Academic background

Marcel Heertjes received both his MSc and PhD in mechanical engineering from Eindhoven University of Technology in 1995 and 1999, respectively. In 2000, he joined the Philips Centre for Industrial Technology in Eindhoven. In 2007 he joined ASML, Department of Mechatronic Systems Development, in Veldhoven, The Netherlands. He served as guest editor of International Journal of Robust and Nonlinear Control (2011)  and IFAC Mechatronics (2014) and currently is associate editor of IFAC Mechatronics (since 2016).  

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Research Output 1997 2019

Hybrid integral reset control with application to a lens motion system

Gruntjens, K. G. J., Heertjes, M. F., van Loon, S. J. L. M., van de Wouw, N. & Heemels, W. P. M. H., 1 Jul 2019, 2019 American Control Conference, ACC 2019. Piscataway: Institute of Electrical and Electronics Engineers, p. 2408-2413 6 p. 8815268

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Lenses
Controllers
Disturbance rejection
Three term control systems
Frequency response
1 Citation (Scopus)

Mixed feedback and feedforward control design for multi-axis vibration isolation systems

Beijen, M. A., Heertjes, M. F., Butler, H. & Steinbuch, M., 1 Aug 2019, In : Mechatronics. 61, p. 106-116 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Feedforward control
Feedback control
Feedback
Amplification
Sensors
1 Citation (Scopus)

Robust control and data-driven tuning of a hybrid integrator-gain system with applications to wafer scanners

Heertjes, M. F., Irigoyen Perdiguero, N. & Deenen, D. A., Feb 2019, In : International Journal of Adaptive Control and Signal Processing. 33, 2, p. 371-387

Research output: Contribution to journalArticleAcademicpeer-review

Robust control
Frequency response
Tuning
Controllers
Disturbance rejection

Robust stability and nonlinear loop-shaping design for hybrid integrator-gain-based control systems

van den Eijnden, S. J. A. M., Heertjes, M. F. & Nijmeijer, H., 1 Jul 2019, 2019 American Control Conference, ACC 2019. Piscataway: Institute of Electrical and Electronics Engineers, p. 3063-3068 6 p. 8814888

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Control systems
Describing functions
Motion control
Lyapunov functions
Linear matrix inequalities
1 Citation (Scopus)

A hybrid integrator-gain based low-pass filter for nonlinear motion control

van den Eijnden, S. J. A. M., Knops, Y. & Heertjes, M. F., 26 Oct 2018, 2018 IEEE Conference on Control Technology and Applications, CCTA 2018. Piscataway: Institute of Electrical and Electronics Engineers, p. 1108-1113 6 p. 8511092

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Low-pass Filter
Motion Control
Low pass filters
Nonlinear Control
Motion control

Courses

Student theses

Active vibration isolation with sliding mode control

Author: van Gils, D., 30 Jun 2014

Supervisor: Heertjes, M. (Supervisor 1) & Nijmeijer, H. (Supervisor 2)

Student thesis: Master

An analysis towards shock robustness in an optical disc drive

Author: Coolen, R., 30 Sep 2003

Supervisor: Steinbuch, M. (Supervisor 1), Homburg, F. (Supervisor 2), Nuij, P. (Supervisor 2), Leenknegt, G. (Supervisor 2), Heertjes, M. (Supervisor 2) & Cremers, F. (External person) (Supervisor 2)

Student thesis: Master

A scheduled control design for motion stages with varying sensor configurations

Author: van der Weijst, R., 31 Dec 2014

Supervisor: Heertjes, M. (Supervisor 1), van Loon, S. (Supervisor 2) & Heemels, W. (Supervisor 2)

Student thesis: Master

A variable gain controller with reset properties

Author: Gruntjens, K., 31 Aug 2015

Supervisor: Steinbuch, M. (Supervisor 1) & Heertjes, M. (Supervisor 2)

Student thesis: Master

A zero dynamics based approach to actuator positioning: controlling a beam with one-sided spring

Author: Sanders, L., 30 Apr 1997

Supervisor: Kok, J. (Supervisor 1), Heertjes, M. (Supervisor 2) & van de Molengraft, M. (Supervisor 2)

Student thesis: Master

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