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Research Output 1999 2020

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2018

Atomic-layer deposited passivation schemes for c-Si solar cells

van de Loo, B. W. H., Macco, B., Melskens, J., Verheijen, M. A. & Kessels, W. M. M. E., 25 May 2018, 2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017. Piscataway: Institute of Electrical and Electronics Engineers, p. 1-6 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Atomic layer deposition
Passivation
Solar cells
Oxides
Film thickness
8 Downloads (Pure)

Light emission from direct bandgap hexagonal SiGe

Haverkort, J. E. M., Ren, Y., Dijkstra, A., Fadaly, E., Verheijen, M. A., Reithmaier, G., Busse, D., Botti, S., Finley, J. & Bakkers, E. P. A. M., 1 Jan 2018, Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2018. Optical Society of America (OSA), 2 p. ITu4I.5

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Light emission
Energy gap
Spontaneous emission
Semiconductor materials
Crystals
2017
2 Citations (Scopus)
1 Downloads (Pure)

Area-selective atomic layer deposition: Role of surface chemistry

Mameli, A., Karasulu, B., Verheijen, M. A., Mackus, A. J. M., Kessels, W. M. M. & Roozeboom, F., 1 Jan 2017, ECS Transactions. 3 ed. Electrochemical Society, Inc., Vol. 80. p. 39-48 10 p. (ECS Transactions).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2016
1 Citation (Scopus)
2 Downloads (Pure)

Atomic-layer deposited passivation schemes for c-Si solar cells

van de Loo, B. W. H., Macco, B., Melskens, J., Verheijen, M. A. & Kessels, W. M. M. E., 18 Nov 2016, 2016 IEEE 43rd Photovoltaic Specialists Conference, PVSC 2016. Institute of Electrical and Electronics Engineers, Vol. 2016-November. p. 3655-3660 6 p. 7750356

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Atomic layer deposition
Passivation
Solar cells
Film thickness
Tunnels
2 Downloads (Pure)

Crossed InSb nanowire junctions for Majorana operations

Car, D., Gazibegovic, S., Balk, S. C., Boj, S. C., Fadaly, E., Zhang, H., op het Veld, R., Verheijen, M. A., Kouwenhoven, L. P. & Bakkers, E. P. A. M., 1 Aug 2016, 2016 Compound Semiconductor Week, CSW 2016 - Includes 28th International Conference on Indium Phosphide and Related Materials, IPRM and 43rd International Symposium on Compound Semiconductors, ISCS 2016. Piscatway: Institute of Electrical and Electronics Engineers, 2 p. 7528546

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Nanowires
Wire
Crystalline materials
Wet etching
Lithography
5 Downloads (Pure)

New opportunities with nanowires

Bakkers, E. P. A. M., Hauge, H. I. T., Li, A., Assali, S., Dijkstra, A., Tucker, R. T., Ren, Y., Conesa Boj, S. & Verheijen, M. A., 2016, IEEE Photonics Society Summer Topical Meeting Series (SUM), Newport Beach, CA, 11-13 July 2016. Piscataway: Institute of Electrical and Electronics Engineers, p. 124-125 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

nanowires
crystal structure
light emission
routes
optical properties
3 Citations (Scopus)
1 Downloads (Pure)

On the growth, percolation and wetting of silver thin films grown by atmospheric-plasma enhanced spatial atomic layer deposition

Mameli, A., Van Den Bruele, F. J., Ande, C. K., Verheijen, M. A., Kessels, W. M. M. & Roozeboom, F., 6 Oct 2016, Atomic Layer Deposition Applications 12. Electrochemical Society, Inc., p. 129-142 14 p. (ECS Transactions; vol. 75, no. 6).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Atomic layer deposition
Wetting
Silver
Plasmas
Thin films
2015

P-type nc-SiOx:H emitter layer for silicon heterojunction solar cells grown by RF-PECVD

Gatz, H. A., Kuang, Y., Verheijen, M. A., Rath, J. K., Kessels, W. M. M. & Schropp, R. E. I., 2015, Material Research Society (MRS) Proceedings. Hekmatshoar, B. & Collins, R. (eds.). Materials Research Society, (Materials Research Society Symposium Proceedings; vol. 1770).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

heterojunctions
emitters
solar cells
silicon
amorphous silicon
2014
2 Citations (Scopus)
3 Downloads (Pure)

Compositional and structural analysis of Al-doped ZnO multilayers by LEAP

Giddings, A. D., Wu, Y., Verheijen, M. A., Prosa, T. J., Roozeboom, F., Larson, D. J. & Kessels, W. M. M., 2014, The 2014 Microscopy & Microanalysis meeting in Hartford, CT, USA, August 3-7, 2014. p. 526-527 (Microscopy and Microanalysis; vol. 20, no. suppl. 3).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

1 Citation (Scopus)
1 Downloads (Pure)

Direct band gap wurtzite GaP nanowires for LEDs and quantum devices

Assali, S., Kriegner, D., Zardo, I., Plissard, S., Verheijen, M. A., Stangl, J., Haverkort, J. E. M. & Bakkers, E. P. A. M., 2014, Nanoepitaxy: Materials and Devices VI. SPIE, p. 1-8 8 p. 917405. (Proceedings of SPIE; vol. 9174).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Gallium phosphide
gallium phosphides
Nanowires
Band Gap
Diode
2013
2 Citations (Scopus)
2 Downloads (Pure)

ALD of SrTiO3 and Pt for Pt/SrTiO3/Pt MIM structures : growth and crystallization study

Longo, V., Roozeboom, F., Kessels, W. M. M. & Verheijen, M. A., 2013, Atomic Layer Deposition Applications 9. Roozeboom, F. & Delabie, A. (eds.). Pennington, NJ, USA: The Electrochemical Society, p. 153-162 (ECS Transactions; vol. 58).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

insulators
crystallization
metals
electron diffraction
transmission electron microscopy
3 Downloads (Pure)

InP nanowire array solar cell with cleaned sidewalls

Cui, Y., Plissard, S., Wang, J., Vu, T. T. T., Smalbrugge, E., Geluk, E. J., de Vries, T., Bolk, J., Trainor, M. J., Verheijen, M. A., Haverkort, J. E. M. & Bakkers, E. P. A. M., 2013, 2013 IEEE 39th Photovoltaic Specialists Conference (PVSC), 16-21 June 2013, Tampa, Florida. Piscataway: Institute of Electrical and Electronics Engineers, p. 3389-3392 4 p. 6745176

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Solar cell arrays
Nanowires
Nanoimprint lithography
Extrusion
Cleaning
3 Citations (Scopus)

Room Temperature Sensing of O2 and CO by Atomic Layer Deposition Prepared ZnO Films Coated with Pt Nanoparticles

Erkens, I. J. M., Blauw, M. A., Verheijen, M. A., Roozeboom, F. & Kessels, W. M. M., 2013, Proceedings of the 224th ECS Meeting, October 27 – November 1, 2013, San Francisco, California. Roozeboom, F. & Delabie, A. (eds.). ECS, p. 203- (ECS Transactions; vol. 58).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Atomic layer deposition
Carbon Monoxide
Nanoparticles
Temperature
Gases

Wurtzite gallium phosphide has a direct-band gap

Assali, S., Zardo, I., Plissard, S., Verheijen, M. A., Haverkort, J. E. M. & Bakkers, E. P. A. M., 2013, Conference Proceedings - International Conference on Indium Phosphide and Related Materials, IPRM 2013, 19-23 may 2013, Kobe, Japan. Piscataway: Institute of Electrical and Electronics Engineers, p. 1-2 MoC3-3

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Gallium phosphide
Energy gap
Crystal structure
Nanowires
Wavelength
2012
2 Citations (Scopus)

Crystallization study by transmission electron microscopy of SrTiO3 thin films prepared by plasma-assisted ALD

Longo, V., Roozeboom, F., Kessels, W. M. M. & Verheijen, M. A., 2012, Pacific RIM meeting on electrochemical and solid-state science, (PRIME), October 7-12 2012, Honolulu Hawaii. p. 69-77 (ECS Transactions; vol. 50).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

crystallization
transmission electron microscopy
thin films
2010

Correlated twins in nanowires

Verheijen, M. A., Algra, R. E., Enckevort, van, W. J. P., Vlieg, E., Feiner, L. F., Immink, W. G. G., Theissmann, R. & Bakkers, E. P. A. M., 2010, Proceedings of the 16th Microscopy & Microanalysis Conference, 1-5 August 2010, Portland, OR, USA. p. 1808-1809 (Microscopy and Microanalysis; vol. 16, no. Supplement 2).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

nanowires
defects
crystal structure
electronics
crystals

Periodic nanowire structures

Bakkers, E. P. A. M., Algra, R., Hocevar, M., Borgstrom, M. T., Immink, G., Ketelaars, B., Feiner, L. F., van Enckevort, W. J. P., Vlieg, E. & Verheijen, M. A., 1 Dec 2010, 2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 Proceedings. Piscataway: Institute of Electrical and Electronics Engineers, p. 33-34 2 p. 5699764

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Nanowires
Zinc
Superlattices
Crystal structure
Doping (additives)
2008
5 Citations (Scopus)
3 Downloads (Pure)

Epitaxial growth of III-V nanowires on group IV substrates

Bakkers, E. P. A. M., Borgström, M. T. & Verheijen, M. A., 2008, Advances in GaN, GaAs, SiC and related alloys on silicon substrates : symposium held March 24 - 28, 2008, San Francisco, California, U.S.A.. Dadgar, A., Li, T., Mastro, M., Piner, E. L. & rEDWING, J. (eds.). wARRENDALE: Materials Research Society, p. 223-234 (Materials Research Society Symposium Proceedings; vol. 1068).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

nanowires
silicon
antiphase boundaries
accommodation
optoelectronic devices

F+ implants in crystalline Si: The Si interstitial contribution

Lopez, P., Pelaz, L., Duffy, R., Meunier-Beillard, P., Roozeboom, F., Van Der Tak, K., Breimer, P., Van Berkum, J. G. M., Verheijen, M. A. & Kaiser, M., 1 Dec 2008, Doping Engineering for Front-End Processing. Warrendale: Materials Research Society, p. 279-284 6 p. (Materials Research Society symposium proceedings; vol. 1070).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

interstitials
Crystalline materials
Defects
defects
transferred electron devices

Ultrahigh-density trench decoupling capacitors comprising multiple MIM layer stacks grown by atomic layer deposition

Roozeboom, F., Dekkers, W., Jinesh, K. B., Klootwijk, J. H., Verheijen, M. A., Kim, H-D. & Blin, D., 2008, Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). Kessels, W. M. M. & Delabie, A. (eds.). S.n.: s.n., p. MonA1-1-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2007

3D passive and heterogeneous integration technology options for system-in-package

Roozeboom, F., Klootwijk, J. H., Dekkers, W., Jinesh, K. B., Lamy, Y., Grunsven, van, E. C. E., Burghoorn, M., Sanders, F., Verheijen, M. A., Weemaes, R. G. R., Kaiser, M., Sakai, T., Kim, H-D., Blin, D., Heil, S. B. S., Sanden, van de, M. C. M. & Kessels, W. M. M., 2007, Proceedings 2nd IEEE Workshop on 3D System Integration, Munich, Germany. München, Germany, p. 38-46

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Etching
Drilling
Silicon
Atomic layer deposition
Reactive ion etching
88 Citations (Scopus)
3 Downloads (Pure)

Epitaxial growth of III–V nanowires on group IV substrates

Bakkers, E. P. A. M., Borgström, M. T. & Verheijen, M. A., 2007, Functional Nanowires : From Fundamental Science to Emerging Applications. Pittsburgh, Pa: Materials Research Society, p. 117-122 (MRS Bulletin; vol. 32).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

nanowires
silicon
antiphase boundaries
accommodation
optoelectronic devices
56 Citations (Scopus)

Evidence of the thermo-electric Thomson effect and influence on the program conditions and cell optimization in phase-change memory cells

Castro, D. T., Goux, L., Hurkx, G. A. M., Attenborough, K., Delhougne, R., Lisoni, J., Jedema, F. J., In't Zandt, M. A. A., Wolters, R. A. M., Gravesteijn, D. J., Verheijen, M. A., Kaiser, M., Weemaes, R. G. R. & Wouters, D. J., 1 Dec 2007, 2007 IEEE International Electron Devices Meeting. Piscataway: Institute of Electrical and Electronics Engineers, p. 315-318 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Thermoelectricity
thermoelectricity
Phase change memory
phase change materials
Phase change materials

Towards vertical III-V nanowire devices

Borgström, M. T., Immink, W. G. G., Ketelaars, B., Verheijen, M. A., Algra, R. E. & Bakkers, E. P. A. M., 2007, Proceedings of the 14th International Workshop on the Physics of Semiconductor Devices (IWPSD), Mumbai, India, 16-20 December 2007. p. 343-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

nanowires
wire
electronics
1 Citation (Scopus)

Towards vertical III-V nanowire devices on silicon

Bakkers, E. P. A. M., Borgström, M. T., Einden, Van Den, W., Weert, van, M. H. M., Minot, E. D., Kelkensberg, F., Kouwen, Van, M. P., Dam, Van, J. A., Kouwenhoven, L. P., Zwiller, V., Helman, A., Wunnicke, O. & Verheijen, M. A., 2007, Proceedings of the 65th DRC Device Research Conference, South Bend , Indiana, 2007. Institute of Electrical and Electronics Engineers, p. 163-164

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

nanowires
silicon
vapor phase epitaxy
light emitting diodes
vapors
2006

III-V semiconductor nanowires grown on silicon for vertical devices

Helman, A., Borgström, M. T., Wunnicke, O., Einden, Van Den, W., Verheijen, M. A., Roest, A. L. & Bakkers, E. P. A. M., 2006, 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings. Vol. 3. p. 133-136

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

nanowires
silicon
electronics
vapor phase epitaxy
laser ablation

Low VT Mo(O,N) metal gate electrodes on HfSiON for sub-45nm pMOSFET devices

Singanamalla, R., Ravit, C., Vellianitis, G., Petry, J., Paraschiv, V., Van Zijl, J. P., Brus, S., Verheijen, M., Weemaes, R. G. R., Kaiser, M., Van Berkum, J. G. M., Bancken, P. H. L., Vos, R., Yu, H., De Meyer, K., Kubicek, S., Biesemans, S. & Hooker, J. C., 1 Dec 2006, 2006 International Electron Devices Meeting Technical Digest, IEDM. Piscataway: Institute of Electrical and Electronics Engineers, 4 p. 4154283

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Gate dielectrics
Field effect transistors
Threshold voltage
Polysilicon
Metals
2005

Characterization of laminated CEO2-HFO2 high-K gate dielectrics deposited by pulsed laser deposition

Karakaya, K., Zinine, A., Van Berkum, J. G. M., Graat, P., Verheijen, M. A., Rittersma, Z. M., Rijnders, G. & Blank, D. H. A., 1 Dec 2005, Advanced gate stack, source/drain and channel engineering for Si-based CMOS :$bnew materials, processes, and equipment : proceedings of the international symposium . Pennington: Electrochemical Society, Inc., p. 331-338 8 p. (Proceedings Electrochemical Society; vol. 2005-05).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Gate dielectrics
Pulsed laser deposition
Oxides
Leakage currents
Laminates
2003

Monocrystalline InP nanotubes

Bakkers, E. P. A. M., Feiner, L. F., Verheijen, M. A., Van Dam, J. A., De Franceschi, S. & Kouwenhoven, L., 1 Dec 2003, Quantum Dots, Nanoparticles and Nanowires. Materials Research Society, p. 305-310 6 p. (Materials Research Society Symposium - Proceedings; vol. 789).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Indium phosphide
indium phosphides
Nanotubes
nanotubes
wire
2 Citations (Scopus)

TEM study of InSbTe crystal morphology as a function of crystallization conditions

Verheijen, M. A., Mijiritskii, A. & Kooi, B. J., 1 Dec 2003, Advanced data Storage Materials and Characterization Techniques. Warrendale: Materials Research Society, p. 161-166 6 p. (Materials Research Society Symposium - Proceedings; vol. 803).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Crystallization
Transmission electron microscopy
Crystals
Textures
Crystalline materials
2001

A manufacturable sub-50nm PMOSFET technology

Loo, J. J. G. P., Ponomarev, Y. V., Kaiser, M., Verheijen, M. A., Cubaynes, F. N. & Dachs, C. J. J., 1 Jan 2001, European Solid-State Device Research Conference. Piscataway: Institute of Electrical and Electronics Engineers, p. 147-150 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Plasma enhanced chemical vapor deposition
Processing
Boron
Engineers
Hot Temperature
2000
1 Citation (Scopus)

2D dopant profiling of advanced CMOS technologies by preferential etching, comparison with 2D process simulations

Dachs, C. J. J., Verheijen, M. A., Kaiser, M., Stolk, P. A. & Ponomarev, Y. V., 1 Jan 2000, ESSDERC 2000 - Proceedings of the 30th European Solid-State Device Research Conference. Piscataway: Institute of Electrical and Electronics Engineers, p. 360-363 4 p. 1503719

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Secondary ion mass spectrometry
Etching
Doping (additives)
Transmission electron microscopy
1 Citation (Scopus)

In situ electrical resistance measurements of Al-Ge films in the TEM using a modified heating holder

Verheijen, M. A., Donkers, J. J. T. M., Thomassen, J. F. P., Van den Broek, J. J., van der Rijt, R. A. F., Dona, M. J. J. & Smit, C. M., 1 Dec 2000, Polycrystalline metal and magnetic thin films -2000 : symposium held April 25-27, 2000, San Francisco, California, USA. Clemens, B. M., Gignac, L. & Maclaren, J. M. (eds.). Warrendale: Materials Research Society, (Materials Research Society Symposium - Proceedings; vol. 615).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Acoustic impedance
holders
electrical resistance
Transmission electron microscopy
Heating
1999
7 Citations (Scopus)

Low-energy implantations of decaborane (B10H14) ion clusters in silicon wafers

Dirks, A. G., Bancken, P. H. L., Politiek, J., Cowern, N. E. B., Snijders, J. H. M., van Berkum, J. G. M. & Verheijen, M. A., 1 Dec 1999, Proceedings of the International Conference on Ion Implantation Technology. Piscataway: Institute of Electrical and Electronics Engineers, Vol. 2. p. 1167-1170 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Silicon wafers
Ion implantation
Atoms
Ions
Rapid thermal annealing