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Research Output 1999 2020

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2011

Scandium aluminum nitride nanowires

Bohnen, T., van Dreumel, G. W. G., Hageman, P. R., Yazdi, G. R., Yakimova, R., Vlieg, E., Algra, R. E., Verheijen, M. A. & Edgar, J. H., 1 Dec 2011, Scandium: compounds, productions and applications. Greene, V. A. (ed.). Nova Science, p. 135-152 18 p.

Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

Scandium
Aluminum nitride
Nitrides
Nanowires
Energy gap
2010
2 Downloads (Pure)

3-Dimensional passive and heterogeneous integration technology options for system-in-package

Roozeboom, F., Klootwijk, J. H., Dekkers, W., Jinesh, K. B., Lamy, Y., Grunsven, van, E. C. E., Burghoorn, M., Sanders, F. H. M., Verheijen, M. A., Weemaes, R. G. R., Kaiser, M., Sakai, T., Kim, H-D., Blin, D., Heil, S. B. S., Sanden, van de, M. C. M. & Kessels, W. M. M., 2010, Smart system integration and reliability : a special edition on the occasion of Herbert Reichl’s 65th birthday. Michel, B. & Lang, K. D. (eds.). Dresden: Goldenbogen Verlag, p. 120-131 12 p.

Research output: Chapter in Book/Report/Conference proceedingChapterAcademic

Etching
Drilling
Silicon
Atomic layer deposition
Reactive ion etching