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Research Output 1999 2020

2004
58 Citations (Scopus)

Assessing the performance of two-dimensional dopant profiling techniques

Duhayon, N., Eyben, P., Fouchier, M., Clarysse, T., Vandervorst, W., Álvarez, D., Schoemann, S., Ciappa, M., Stangoni, M., Fichtner, W., Formanek, P., Kittler, M., Raineri, V., Giannazzo, F., Goghero, D., Rosenwaks, Y., Shikler, R., Saraf, S., Sadewasser, S., Barreau, N. & 7 others, Glatzel, T., Verheijen, M., Mentink, S. A. M., von Sprekelsen, M., Maltezopoulos, T., Wiesendanger, R. & Hellemans, L., 1 Jan 2004, In : Journal of Vacuum Science and Technology, B. 22, 1, p. 385-393 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Doping (additives)
Calibration
11 Citations (Scopus)

Characterization of thermal and electrical stability of MOCVD HfO 2-HfSiO4 dielectric layers with polysilicon electrodes for advanced CMOS technologies

Rittersma, Z. M., Loo, J. J. G. P., Ponomarev, Y. V., Verheijen, M. A., Kaiser, M., Roozeboom, F., van Elshocht, S. & Caymax, M., 1 Dec 2004, In : Journal of the Electrochemical Society. 151, 12, p. G870-G877

Research output: Contribution to journalReview articleAcademicpeer-review

Metallorganic chemical vapor deposition
Polysilicon
CMOS
thermal stability
Metals
109 Citations (Scopus)

Critical review of the current status of thickness measurements for ultrathin SiO 2 on Si Part V: results of a CCQM pilot study

Seah, M. P., Spencer, S. J., Bensebaa, F., Vickridge, I., Danzebrink, H., Krumrey, M., Gross, T., Oesterle, W., Wendler, E., Rheinländer, B., Azuma, Y., Kojima, I., Suzuki, N., Suzuki, M., Tanuma, S., Moon, D. W., Lee, H. J., Cho, H. M., Chen, H. Y., Wee, A. T. S. & 17 others, Osipowicz, T., Pan, J. S., Jordaan, W. A., Hauert, R., Klotz, U., Van Der Marel, C., Verheijen, M., Tamminga, Y., Jeynes, C., Bailey, P., Biswas, S., Falke, U., Nguyen, N. V., Chandler-Horowitz, D., Ehrstein, J. R., Muller, D. & Dura, J. A., 1 Sep 2004, In : Surface and Interface Analysis. 36, 9, p. 1269-1303 35 p.

Research output: Contribution to journalArticleAcademicpeer-review

Thickness measurement
ion scattering
nuclear reactions
Spectrometry
ellipsometry
18 Citations (Scopus)

Effects of crystalline regrowth on dopant profiles in preamorphized silicon

Hopstaken, M. J. P., Tamminga, Y., Verheijen, M. A., Duffy, R., Venezia, V. C. & Heringa, A., 15 Jun 2004, In : Applied Surface Science. 231-232, p. 688-692 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Silicon
solid phases
Doping (additives)
Crystalline materials
silicon
162 Citations (Scopus)

Epitaxial growth of InP nanowires on germanium

Bakkers, E. P. A. M., Dam, Van, J. A., Franceschi, De, S., Kouwenhoven, L. P., Kaiser, M. A., Verheijen, M. A., Wondergem, H. J. & Sluis, van der, P., 2004, In : Nature Materials. 3, 11, p. 769-773 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Germanium
Epitaxial growth
Nanowires
germanium
nanowires
30 Citations (Scopus)

HfSiO4 dielectric layers deposited by ALD using HfCl4 and NH2(CH2)3Si(OC2H 5)3 precursors

Rittersma, Z. M., Roozeboom, F., Verheijen, M. A., Van Berkum, J. G. M., Dao, T., Snijders, J. H. M., Vainonen-Ahlgren, E., Tois, E., Tuominen, M. & Haukka, S., 1 Dec 2004, In : Journal of the Electrochemical Society. 151, 11, p. C716-C722 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition
atomic layer epitaxy
Leakage currents
Metals
Annealing
19 Citations (Scopus)

In situ transmission electron microscopy analysis of electron beam induced crystallization of amorphous marks in phase-change materials

Kaiser, M., van Pieterson, L. & Verheijen, M. A., 15 Sep 2004, In : Journal of Applied Physics. 96, 6, p. 3193-3198 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

phase change materials
electron beams
crystallization
transmission electron microscopy
electron irradiation
107 Citations (Scopus)

Island growth in the atomic layer deposition of zirconium oxide and aluminum oxide on hydrogen-terminated silicon: Growth mode modeling and transmission electron microscopy

Puurunen, R. L., Vandervorst, W., Besling, W. F. A., Richard, O., Bender, H., Conard, T., Zhao, C., Delabie, A., Caymax, M., de Gendt, S., Heyns, M., Viitanen, M. M., de Ridder, M., Brongersma, H. H., Tamminga, Y., Dao, T., de Win, T., Verheijen, M., Kaiser, M. & Tuominen, M., 1 Nov 2004, In : Journal of Applied Physics. 96, 9, p. 4878-4889 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

atomic layer epitaxy
zirconium oxides
aluminum oxides
transmission electron microscopy
oxides
8 Citations (Scopus)

Thickness and composition of ultrathin SiO2 layers on Si

van der Marel, C., Verheijen, M. A., Tamminga, Y., Pijnenburg, R. H. W., Tombros, N. & Cubaynes, F., 1 Jul 2004, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 22, 4, p. 1572-1578 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Photoelectron spectroscopy
Rutherford backscattering spectroscopy
x ray spectroscopy
X rays
photoelectron spectroscopy
4 Citations (Scopus)
8 Downloads (Pure)

Transmission electron microscopy specimen holder for simultaneous in situ heating and electrical resistance measurements

Verheijen, M. A., Donkers, J. J. T. M., Thomassen, J. F. P., van den Broek, J. J., Van der Rijt, R. A. F., Dona, M. J. J. & Smit, C. M., 1 Feb 2004, In : Review of Scientific Instruments. 75, 2, p. 426-429 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
resistance heating
Acoustic impedance
holders
electrical resistance
Transmission electron microscopy
2003

Monocrystalline InP nanotubes

Bakkers, E. P. A. M., Feiner, L. F., Verheijen, M. A., Van Dam, J. A., De Franceschi, S. & Kouwenhoven, L., 1 Dec 2003, Quantum Dots, Nanoparticles and Nanowires. Materials Research Society, p. 305-310 6 p. (Materials Research Society Symposium - Proceedings; vol. 789).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Indium phosphide
indium phosphides
Nanotubes
nanotubes
wire
103 Citations (Scopus)

Structural characterization of mesoporous organosilica films for ultralow-k dielectrics

de Theije, F. K., Verheijen, M. A., Baklanov, M. R., Mogilnikov, K. P. & Furukawa, Y., 8 May 2003, In : Journal of Physical Chemistry B. 107, 18, p. 4280-4289 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Surface-Active Agents
Surface active agents
Permittivity
Polymers
matrices
124 Citations (Scopus)

Synthesis of InP nanotubes

Bakkers, E. P. A. M. & Verheijen, M. A., 2003, In : Journal of the American Chemical Society. 125, 12, p. 3440-3441

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

TEM study of InSbTe crystal morphology as a function of crystallization conditions

Verheijen, M. A., Mijiritskii, A. & Kooi, B. J., 1 Dec 2003, Advanced data Storage Materials and Characterization Techniques. Warrendale: Materials Research Society, p. 161-166 6 p. (Materials Research Society Symposium - Proceedings; vol. 803).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Crystallization
Transmission electron microscopy
Crystals
Textures
Crystalline materials
2002
58 Citations (Scopus)

Explanation for the leakage current in polycrystalline-silicon thin-film transistors made by Ni-silicide mediated crystallization

van der Zaag, P. J., Verheijen, M. A., Yoon, S. Y. & Young, N. D., 28 Oct 2002, In : Applied Physics Letters. 81, 18, p. 3404-3406 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

leakage
transistors
crystallization
silicon
thin films
2001

A manufacturable sub-50nm PMOSFET technology

Loo, J. J. G. P., Ponomarev, Y. V., Kaiser, M., Verheijen, M. A., Cubaynes, F. N. & Dachs, C. J. J., 1 Jan 2001, European Solid-State Device Research Conference. Piscataway: Institute of Electrical and Electronics Engineers, p. 147-150 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Plasma enhanced chemical vapor deposition
Processing
Boron
Engineers
Hot Temperature
2000
1 Citation (Scopus)

2D dopant profiling of advanced CMOS technologies by preferential etching, comparison with 2D process simulations

Dachs, C. J. J., Verheijen, M. A., Kaiser, M., Stolk, P. A. & Ponomarev, Y. V., 1 Jan 2000, ESSDERC 2000 - Proceedings of the 30th European Solid-State Device Research Conference. Piscataway: Institute of Electrical and Electronics Engineers, p. 360-363 4 p. 1503719

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Secondary ion mass spectrometry
Etching
Doping (additives)
Transmission electron microscopy
214 Citations (Scopus)

Difference between blocking and néel temperatures in the exchange biased Fe3O4/CoO system

van der Zaag, P. J., Ijiri, Y., Borchers, J. A., Feiner, L. F., Wolf, R. M., Gaines, J. M., Erwin, R. W. & Verheijen, M. A., 1 Jan 2000, In : Physical Review Letters. 84, 26, p. 6102-6105 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

temperature
neutron diffraction
proximity
scaling
1 Citation (Scopus)

In situ electrical resistance measurements of Al-Ge films in the TEM using a modified heating holder

Verheijen, M. A., Donkers, J. J. T. M., Thomassen, J. F. P., Van den Broek, J. J., van der Rijt, R. A. F., Dona, M. J. J. & Smit, C. M., 1 Dec 2000, Polycrystalline metal and magnetic thin films -2000 : symposium held April 25-27, 2000, San Francisco, California, USA. Clemens, B. M., Gignac, L. & Maclaren, J. M. (eds.). Warrendale: Materials Research Society, (Materials Research Society Symposium - Proceedings; vol. 615).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Acoustic impedance
holders
electrical resistance
Transmission electron microscopy
Heating
1999
7 Citations (Scopus)

Low-energy implantations of decaborane (B10H14) ion clusters in silicon wafers

Dirks, A. G., Bancken, P. H. L., Politiek, J., Cowern, N. E. B., Snijders, J. H. M., van Berkum, J. G. M. & Verheijen, M. A., 1 Dec 1999, Proceedings of the International Conference on Ion Implantation Technology. Piscataway: Institute of Electrical and Electronics Engineers, Vol. 2. p. 1167-1170 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Silicon wafers
Ion implantation
Atoms
Ions
Rapid thermal annealing