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Research Output 1999 2020

2011
16 Citations (Scopus)
1 Downloads (Pure)

Formation of wurtzite InP nanowires explained by liquid-ordering

Algra, R. E., Vonk, V., Wermeile, D., Szweryn, W. J., Verheijen, M. A., Enckevort, van, W. J. P., Bode, A. A. C., Noorduin, W. L., Tancini, E., Jong, de, A. E. F., Bakkers, E. P. A. M. & Vlieg, E., 2011, In : Nano Letters. 11, 1, p. 44-48 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

wurtzite
Nanowires
nanowires
liquid metals
Liquid metals
13 Citations (Scopus)
79 Downloads (Pure)

Plasma assisted deposition of Au/SiO2 multi-layers as surface plasmon resonance-based red colored coatings

Takele Beyene, H. T., Tichelaar, F. D., Verheijen, M. A., Sanden, van de, M. C. M. & Creatore, M., 2011, In : Plasmonics. 6, p. 255-260

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Surface Plasmon Resonance
Surface plasmon resonance
Nanoparticles
Metals
Plasmas

Scandium aluminum nitride nanowires

Bohnen, T., van Dreumel, G. W. G., Hageman, P. R., Yazdi, G. R., Yakimova, R., Vlieg, E., Algra, R. E., Verheijen, M. A. & Edgar, J. H., 1 Dec 2011, Scandium: compounds, productions and applications. Greene, V. A. (ed.). Nova Science, p. 135-152 18 p.

Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

Scandium
Aluminum nitride
Nitrides
Nanowires
Energy gap
82 Citations (Scopus)
4 Downloads (Pure)

The role of surface energies and chemical potential during nanowire growth

Algra, R. E., Verheijen, M. A., Feiner, L. F., Immink, W. G. G., Enckevort, van, W. J. P., Vlieg, E. & Bakkers, E. P. A. M., 2011, In : Nano Letters. 11, 3, p. 1259-1264

Research output: Contribution to journalArticleAcademicpeer-review

Chemical potential
Interfacial energy
Nanowires
surface energy
nanowires
2010
2 Downloads (Pure)

3-Dimensional passive and heterogeneous integration technology options for system-in-package

Roozeboom, F., Klootwijk, J. H., Dekkers, W., Jinesh, K. B., Lamy, Y., Grunsven, van, E. C. E., Burghoorn, M., Sanders, F. H. M., Verheijen, M. A., Weemaes, R. G. R., Kaiser, M., Sakai, T., Kim, H-D., Blin, D., Heil, S. B. S., Sanden, van de, M. C. M. & Kessels, W. M. M., 2010, Smart system integration and reliability : a special edition on the occasion of Herbert Reichl’s 65th birthday. Michel, B. & Lang, K. D. (eds.). Dresden: Goldenbogen Verlag, p. 120-131 12 p.

Research output: Chapter in Book/Report/Conference proceedingChapterAcademic

Etching
Drilling
Silicon
Atomic layer deposition
Reactive ion etching

Correlated twins in nanowires

Verheijen, M. A., Algra, R. E., Enckevort, van, W. J. P., Vlieg, E., Feiner, L. F., Immink, W. G. G., Theissmann, R. & Bakkers, E. P. A. M., 2010, Proceedings of the 16th Microscopy & Microanalysis Conference, 1-5 August 2010, Portland, OR, USA. p. 1808-1809 (Microscopy and Microanalysis; vol. 16, no. Supplement 2).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

nanowires
defects
crystal structure
electronics
crystals
21 Citations (Scopus)
65 Downloads (Pure)

Detection of the presence of gold nanoparticles in organs by transmission electron microscopy

Jong, de, W. H., Burger, M. C., Verheijen, M. A. & Geertsma, R. E., 2010, In : Materials. 3, 9, p. 4681-4694

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Gold
Nanoparticles
Transmission electron microscopy
Nanostructured materials
Liver
62 Citations (Scopus)

Generic nano-imprint process for fabrication of nanowire arrays

Pierret, A., Hocevar, M., Diedenhofen, S. L., Algra, R. E., Vlieg, E., Timmering, E. C., Verschuuren, M. A., Immink, W. G. G., Verheijen, M. A. & Bakkers, E. P. A. M., 2010, In : Nanotechnology. 21, 6, p. 065305-1/6 6 p., 065305.

Research output: Contribution to journalArticleAcademicpeer-review

Nanowires
Fabrication
Lithography
Chemical cleaning
Gold
38 Citations (Scopus)

Paired twins and {112¯} morphology in GaP nanowires

Algra, R. E., Verheijen, M. A., Feiner, L. F., Immink, W. G. G., Theissmann, R., Enckevort, van, W. J. P., Vlieg, E. & Bakkers, E. P. A. M., 2010, In : Nano Letters. 10, 7, p. 2349-2356

Research output: Contribution to journalArticleAcademicpeer-review

Nanowires
nanowires
Zinc
Nucleation
Crystal structure

Periodic nanowire structures

Bakkers, E. P. A. M., Algra, R., Hocevar, M., Borgstrom, M. T., Immink, G., Ketelaars, B., Feiner, L. F., van Enckevort, W. J. P., Vlieg, E. & Verheijen, M. A., 1 Dec 2010, 2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 Proceedings. Piscataway: Institute of Electrical and Electronics Engineers, p. 33-34 2 p. 5699764

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Nanowires
Zinc
Superlattices
Crystal structure
Doping (additives)
18 Citations (Scopus)

Quantitative prediction of junction leakage in bulk-technology CMOS devised

Duffy, R., Heringa, A., Venezia, V. C., Loo, J., Verheijen, M. A., Hopstaken, M. J. P., Tak, van der, K., Potter, de, M., Hooker, J. C., Meunier-Beillard, P. & Delhougne, R., 2010, In : Solid-State Electronics. 54, 3, p. 243-251

Research output: Contribution to journalArticleAcademicpeer-review

Silicon
CMOS
leakage
Defects
Diodes
92 Citations (Scopus)
2 Downloads (Pure)

Surface passivated InAs/InP core/shell nanowires

Tilburg, Van, J. W. W., Algra, R. E., Immink, W. G. G., Verheijen, M. A., Bakkers, E. P. A. M. & Kouwenhoven, L. P., 2010, In : Semiconductor Science and Technology. 25, 2, p. 024011-1/7 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Nanowires
nanowires
Carrier concentration
Scattering
indium arsenide
11 Citations (Scopus)
1 Downloads (Pure)

Zirconia thin film preparation by wet chemical methods at low temperature

Popovici, M., Graaf, de, J., Verschuuren, M. A., Graat, P. C. J. & Verheijen, M. A., 2010, In : Thin Solid Films. 519, 2, p. 630-634 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Film preparation
zirconium oxides
Zirconia
Thin films
preparation
2009

Dreidimensionale material-analysen im nanometerbereich

Translated title of the contribution: Three-dimentional material analyses in the field of nanometryVerheijen, M., Weemaes, R., Kaiser, M. & Krystek, P., 1 Jan 2009, In : Nachrichten aus der Chemie. 57, 1, p. 50-52 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Growth of scandium aluminum nitride nanowires on ScN(111) films on 6H-SiC substrates by HVPE

Bohnen, T., van Dreumel, G. W. G., Hageman, P. R., Algra, R. E., van Enckevort, W. J. P., Vlieg, E., Verheijen, M. A. & Edgar, J. H., 1 Dec 2009, In : Physica Status Solidi A : Applications and material science. 206, 12, p. 2809-2815 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Scandium
Vapor phase epitaxy
Aluminum nitride
scandium
aluminum nitrides
29 Citations (Scopus)

Orientation-dependent optical-polarization properties of single quantum dots in nanowires

Weert, van, M. H. M., Akopian, N., Kelkensberg, F., Perinetti, U., Kouwen, Van, M. P., Gómez Rivas, J., Borgström, M. T., Algra, R. E., Verheijen, M. A., Bakkers, E. P. A. M., Kouwenhoven, L. P. & Zwiller, V., 2009, In : Small. 5, 19, p. 2134-2138 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Nanowires
Quantum Dots
Light polarization
Semiconductor quantum dots
Polarization
13 Citations (Scopus)

ScAlN nanowires: a cathodoluminescence study

Bohnen, T., Yazdi, G. R., Yakimova, R., van Dreumel, G. W. G., Hageman, P. R., Vlieg, E., Algra, R. E., Verheijen, M. A. & Edgar, J. H., 15 May 2009, In : Journal of Crystal Growth. 311, 11, p. 3147-3151 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Cathodoluminescence
cathodoluminescence
Nanowires
nanowires
Scandium
78 Citations (Scopus)
2 Downloads (Pure)

Selective excitation and detection of spin states in a single nanowire dot

Weert, van, M. H. M., Akopian, N., Perinetti, U., Kouwen, Van, M. P., Algra, R. E., Verheijen, M. A., Bakkers, E. P. A. M., Kouwenhoven, L. P. & Zwiller, V., 2009, In : Nano Letters. 9, 5, p. 1989-1993

Research output: Contribution to journalArticleAcademicpeer-review

Semiconductor quantum dots
Nanowires
nanowires
Excitation energy
quantum dots
40 Citations (Scopus)

Zinc incorporation via the vapor-liquid-solid mechanism into InP nanowires

Weert, van, M. H. M., Helman, A., Einden, Van Den, W., Algra, R. E., Verheijen, M. A., Borgström, M. T., Immink, W. G. G., Kelly, J. J., Kouwenhoven, L. P. & Bakkers, E. P. A. M., 2009, In : Journal of the American Chemical Society. 131, 13, p. 4578-4579

Research output: Contribution to journalArticleAcademicpeer-review

Nanowires
Indium phosphide
Gold
Zinc
Etching
2008
5 Citations (Scopus)
3 Downloads (Pure)

Epitaxial growth of III-V nanowires on group IV substrates

Bakkers, E. P. A. M., Borgström, M. T. & Verheijen, M. A., 2008, Advances in GaN, GaAs, SiC and related alloys on silicon substrates : symposium held March 24 - 28, 2008, San Francisco, California, U.S.A.. Dadgar, A., Li, T., Mastro, M., Piner, E. L. & rEDWING, J. (eds.). wARRENDALE: Materials Research Society, p. 223-234 (Materials Research Society Symposium Proceedings; vol. 1068).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

nanowires
silicon
antiphase boundaries
accommodation
optoelectronic devices
5 Citations (Scopus)
89 Downloads (Pure)

Evolution of fluorine and boron profiles during annealing in crystalline Si

López, P., Pelaz, L., Duffy, R., Meunier-Beillard, P., Roozeboom, F., Tak, van der, K., Breimer, P., Berkum, van, J. G. M., Verheijen, M. A. & Kaiser, M., 2008, In : Journal of Vacuum Science and Technology, B. 26, 1, p. 377-381 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Fluorine
fluorine
Boron
boron
Annealing

F+ implants in crystalline Si: The Si interstitial contribution

Lopez, P., Pelaz, L., Duffy, R., Meunier-Beillard, P., Roozeboom, F., Van Der Tak, K., Breimer, P., Van Berkum, J. G. M., Verheijen, M. A. & Kaiser, M., 1 Dec 2008, Doping Engineering for Front-End Processing. Warrendale: Materials Research Society, p. 279-284 6 p. (Materials Research Society symposium proceedings; vol. 1070).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

interstitials
Crystalline materials
Defects
defects
transferred electron devices
2 Citations (Scopus)
71 Downloads (Pure)

Si interstitial contribution of F+ implants in crystalline Si

López, P., Pelaz, L., Duffy, R., Meunier-Beillard, P., Roozeboom, F., Tak, van der, K., Breimer, P., Berkum, van, J. G. M., Verheijen, M. A. & Kaiser, M., 2008, In : Journal of Applied Physics. 103, 9, 4 p., 093538.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
interstitials
annealing
defects
supersaturation
estimates
530 Citations (Scopus)
1 Downloads (Pure)

Twinning superlattices in indium phosphide nanowires

Algra, R. E., Verheijen, M. A., Borgström, M. T., Feiner, L. F., Immink, W. G. G., Enckevort, van, W. J. P., Vlieg, E. & Bakkers, E. P. A. M., 2008, In : Nature. 456, 7220, p. 369-372 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Nanowires
Zinc
Semiconductors
Silicon
Crystallization
112 Citations (Scopus)
2 Downloads (Pure)

Ultrahigh capacitance density for multiple ALD-grown MIM capacitor stacks in 3-D silicon

Klootwijk, J. H., Jinesh, K. B., Dekkers, W., Verhoeven, J. F. C., Heuvel, van den, F. C., Kim, H-D., Blin, D., Verheijen, M. A., Weemaes, R. G. R., Kaiser, M., Ruigrok, J. J. M. & Roozeboom, F., 2008, In : IEEE Electron Device Letters. 29, 7, p. 740-742 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition
Silicon
Capacitors
Capacitance
Metals

Ultrahigh-density trench decoupling capacitors comprising multiple MIM layer stacks grown by atomic layer deposition

Roozeboom, F., Dekkers, W., Jinesh, K. B., Klootwijk, J. H., Verheijen, M. A., Kim, H-D. & Blin, D., 2008, Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). Kessels, W. M. M. & Delabie, A. (eds.). S.n.: s.n., p. MonA1-1-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2007

3D passive and heterogeneous integration technology options for system-in-package

Roozeboom, F., Klootwijk, J. H., Dekkers, W., Jinesh, K. B., Lamy, Y., Grunsven, van, E. C. E., Burghoorn, M., Sanders, F., Verheijen, M. A., Weemaes, R. G. R., Kaiser, M., Sakai, T., Kim, H-D., Blin, D., Heil, S. B. S., Sanden, van de, M. C. M. & Kessels, W. M. M., 2007, Proceedings 2nd IEEE Workshop on 3D System Integration, Munich, Germany. München, Germany, p. 38-46

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Etching
Drilling
Silicon
Atomic layer deposition
Reactive ion etching
1 Downloads (Pure)

Analysis of the degradation mechanism during repeated overwrite of phase-change discs

Kuiper, A. E. T., Pasquariello, D., Bulle-Lieuwma, C. W. T., Kaiser, M., Verheijen, M. A., Nulens, H. A. G., Van Pieterson, L. & Zhong, G. J. Y., 8 Mar 2007, In : Japanese Journal of Applied Physics, Part 1 : Regular Papers and Short Notes & Review Papers. 46, 3 A, p. 1037-1041 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Depth profiling
Jitter
Electron microscopes
degradation
Decomposition
88 Citations (Scopus)
3 Downloads (Pure)

Epitaxial growth of III–V nanowires on group IV substrates

Bakkers, E. P. A. M., Borgström, M. T. & Verheijen, M. A., 2007, Functional Nanowires : From Fundamental Science to Emerging Applications. Pittsburgh, Pa: Materials Research Society, p. 117-122 (MRS Bulletin; vol. 32).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

nanowires
silicon
antiphase boundaries
accommodation
optoelectronic devices
56 Citations (Scopus)

Evidence of the thermo-electric Thomson effect and influence on the program conditions and cell optimization in phase-change memory cells

Castro, D. T., Goux, L., Hurkx, G. A. M., Attenborough, K., Delhougne, R., Lisoni, J., Jedema, F. J., In't Zandt, M. A. A., Wolters, R. A. M., Gravesteijn, D. J., Verheijen, M. A., Kaiser, M., Weemaes, R. G. R. & Wouters, D. J., 1 Dec 2007, 2007 IEEE International Electron Devices Meeting. Piscataway: Institute of Electrical and Electronics Engineers, p. 315-318 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Thermoelectricity
thermoelectricity
Phase change memory
phase change materials
Phase change materials
66 Citations (Scopus)

Remote p-doping of InAs nanowires

Li, H-Y., Wunnicke, O., Borgström, M. T., Immink, W. G. G., Weert, van, M. H. M., Verheijen, M. A. & Bakkers, E. P. A. M., 2007, In : Nano Letters. 7, 5, p. 1144-1148 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Nanowires
nanowires
Doping (additives)
Shielding
shielding
301 Citations (Scopus)
2 Downloads (Pure)

Single quantum dot nanowire LEDs

Minot, E. D., Kelkensberg, F., Kouwen, Van, M. P., Dam, Van, J. A., Kouwenhoven, L. P., Zwiller, V., Borgström, M. T., Wunnicke, O., Verheijen, M. A. & Bakkers, E. P. A. M., 2007, In : Nano Letters. 7, 2, p. 367-371

Research output: Contribution to journalArticleAcademicpeer-review

Semiconductor quantum dots
Nanowires
Light emitting diodes
nanowires
light emitting diodes
80 Citations (Scopus)
1 Downloads (Pure)

Three-dimensional morphology of GaP-GaAs nanowires revealed by transmission electron microscopy tomography

Verheijen, M. A., Algra, R. E., Borgström, M. T., Immink, W. G. G., Sourty, E., Enckevort, van, W. J. P., Vlieg, E. & Bakkers, E. P. A. M., 2007, In : Nano Letters. 7, 10, p. 3051-3055

Research output: Contribution to journalArticleAcademicpeer-review

Nanowires
Tomography
nanowires
tomography
Transmission electron microscopy

Towards vertical III-V nanowire devices

Borgström, M. T., Immink, W. G. G., Ketelaars, B., Verheijen, M. A., Algra, R. E. & Bakkers, E. P. A. M., 2007, Proceedings of the 14th International Workshop on the Physics of Semiconductor Devices (IWPSD), Mumbai, India, 16-20 December 2007. p. 343-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

nanowires
wire
electronics
1 Citation (Scopus)

Towards vertical III-V nanowire devices on silicon

Bakkers, E. P. A. M., Borgström, M. T., Einden, Van Den, W., Weert, van, M. H. M., Minot, E. D., Kelkensberg, F., Kouwen, Van, M. P., Dam, Van, J. A., Kouwenhoven, L. P., Zwiller, V., Helman, A., Wunnicke, O. & Verheijen, M. A., 2007, Proceedings of the 65th DRC Device Research Conference, South Bend , Indiana, 2007. Institute of Electrical and Electronics Engineers, p. 163-164

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

nanowires
silicon
vapor phase epitaxy
light emitting diodes
vapors
2006
6 Citations (Scopus)

Archival-overwrite performance of GeSnSb-based phase-change discs

Van Pieterson, L., Hesselink, E. W., Rijpers, J. C. N., Kaiser, M., Verheijen, M. A. & Elfrink, R., 14 Apr 2006, In : Journal of Applied Physics. 99, 6, 066111.

Research output: Contribution to journalArticleAcademicpeer-review

reflectance
phase change materials
specifications
recording
high speed
10 Citations (Scopus)

Characterization of laminated CeO2-HfO2 high-k gate dielectrics grown by pulsed laser deposition

Karakaya, K., Zinine, A., Van Berkum, J. G. M., Verheijen, M. A., Rittersma, Z. M., Rijnders, G. & Blank, D. H. A., 13 Sep 2006, In : Journal of the Electrochemical Society. 153, 10, p. F233-F236 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

Gate dielectrics
Pulsed laser deposition
pulsed laser deposition
Leakage currents
Temperature
2 Downloads (Pure)

Dedicated FIB preparation for TEM cross-section samples of nanowires grown vertically on silicon substrates

Kaiser, M., Verheijen, M. A., Roest, A. L. & Bakkers, E. P. A. M., 2006, In : Microscopy and Microanalysis. 12, SUPPL. 2, p. 504-505 2 p.

Research output: Contribution to journalArticleAcademicpeer-review

Nanowires
nanowires
Transmission electron microscopy
Silicon
preparation
9 Citations (Scopus)

Electrical and structural characterization of PLD grown CeO2-HfO2 laminated high-k gate dielectrics

Karakaya, K., Barcones, B., Rittersma, Z. M., van Berkum, J. G. M., Verheijen, M. A., Rijnders, G. & Blank, D. H. A., 1 Dec 2006, In : Materials Science in Semiconductor Processing. 9, 6, p. 1061-1064 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Gate dielectrics
Pulsed laser deposition
pulsed laser deposition
Cooling
leakage
1 Citation (Scopus)

Epitaxial III-V nanowires on silicon for vertical devices

Bakkers, E. P. A. M., Borgström, M. T., Einden, Van Den, W., Weert, van, M. H. M., Helman, A. & Verheijen, M. A., 2006, In : ECS Transactions. 3, 2, p. 415-423

Research output: Contribution to journalArticleAcademicpeer-review

Nanowires
Silicon
Vapors
Vapor phase epitaxy
Liquids
171 Citations (Scopus)

Growth kinetics of heterostructured GaP-GaAs nanowires

Verheijen, M. A., Immink, W. G. G., Smet, de, T., Borgström, M. T. & Bakkers, E. P. A. M., 2006, In : Journal of the American Chemical Society. 128, 4, p. 1353-1359

Research output: Contribution to journalArticleAcademicpeer-review

Nanowires
Growth kinetics
Growth
phosphine
Vapors

III-V semiconductor nanowires grown on silicon for vertical devices

Helman, A., Borgström, M. T., Wunnicke, O., Einden, Van Den, W., Verheijen, M. A., Roest, A. L. & Bakkers, E. P. A. M., 2006, 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings. Vol. 3. p. 133-136

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

nanowires
silicon
electronics
vapor phase epitaxy
laser ablation
6 Citations (Scopus)

In situ transmission electron microscopy observations of individually selected freestanding carbon nanotubes during field emission

Kaiser, M., Doytcheva, M., Verheijen, M. & de Jonge, N., 1 Aug 2006, In : Ultramicroscopy. 106, 10, p. 902-908 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Carbon Nanotubes
Field emission
field emission
Carbon nanotubes
carbon nanotubes
50 Citations (Scopus)

Interface study on heterostructured GaP-GaAs nanowires

Borgström, M. T., Verheijen, M. A., Immink, W. G. G., Smet, de, T. & Bakkers, E. P. A. M., 2006, In : Nanotechnology. 17, 16, p. 4010-4013 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Nanowires
Arsenic
Temperature
Vapors
X rays
2 Citations (Scopus)

Laminated CeO2/HfO2 high-k gate dielectrics grown by pulsed laser deposition in reducing ambient

Karakaya, K., Barcones, B., Zinine, A., Rittersma, Z. M., Graat, P., van Berkum, J. G. M., Verheijen, M. A., Rijnders, G. & Blank, D. H. A., 1 Dec 2006, In : ECS Transactions. 3, 3, p. 521-533 13 p.

Research output: Contribution to journalConference articleAcademicpeer-review

Gate dielectrics
Pulsed laser deposition
Laminates
Electric properties
Gas mixtures

Low VT Mo(O,N) metal gate electrodes on HfSiON for sub-45nm pMOSFET devices

Singanamalla, R., Ravit, C., Vellianitis, G., Petry, J., Paraschiv, V., Van Zijl, J. P., Brus, S., Verheijen, M., Weemaes, R. G. R., Kaiser, M., Van Berkum, J. G. M., Bancken, P. H. L., Vos, R., Yu, H., De Meyer, K., Kubicek, S., Biesemans, S. & Hooker, J. C., 1 Dec 2006, 2006 International Electron Devices Meeting Technical Digest, IEDM. Piscataway: Institute of Electrical and Electronics Engineers, 4 p. 4154283

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Gate dielectrics
Field effect transistors
Threshold voltage
Polysilicon
Metals
104 Citations (Scopus)
2 Downloads (Pure)

Position-controlled epitaxial III-V nanowires on silicon

Roest, A. L., Verheijen, M. A., Wunnicke, O., Serafin, S. N., Wondergem, H. J. & Bakkers, E. P. A. M., 2006, In : Nanotechnology. 17, 11, p. s271-s275 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Silicon
Nanowires
Vapor phase epitaxy
Laser ablation
Epitaxial growth
2005

Characterization of laminated CEO2-HFO2 high-K gate dielectrics deposited by pulsed laser deposition

Karakaya, K., Zinine, A., Van Berkum, J. G. M., Graat, P., Verheijen, M. A., Rittersma, Z. M., Rijnders, G. & Blank, D. H. A., 1 Dec 2005, Advanced gate stack, source/drain and channel engineering for Si-based CMOS :$bnew materials, processes, and equipment : proceedings of the international symposium . Pennington: Electrochemical Society, Inc., p. 331-338 8 p. (Proceedings Electrochemical Society; vol. 2005-05).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Gate dielectrics
Pulsed laser deposition
Oxides
Leakage currents
Laminates
33 Citations (Scopus)

Low-temperature diffusion of high-concentration phosphorus in silicon, a preferential movement toward the surface

Duffy, R., Venezia, V. C., Loo, J., Hopstaken, M. J. P., Verheijen, M. A., Van Berkum, J. G. M., Maas, G. C. J., Tamminga, Y., Dao, T. & Demeurisse, C., 21 Feb 2005, In : Applied Physics Letters. 86, 8, 3 p., 081917.

Research output: Contribution to journalArticleAcademicpeer-review

phosphorus
silicon
profiles
defects
surface temperature
2004
4 Citations (Scopus)

Advanced PMOS device architecture for highly-doped ultra-shallow junctions

Surdeanu, R., Pawlak, B. J., Lindsay, R., van Dal, M., Doornbos, G., Dachs, C. J. J., Ponomarev, Y. V., Loo, J. J. P., Cubaynes, F. N., Henson, K., Verheijen, M. A., Kaiser, M., Pages, X., Stolk, P. A., Taylor, B. & Jurczak, M., 1 Jan 2004, In : Japanese Journal of Applied Physics, Part 1 : Regular Papers and Short Notes & Review Papers. 43, 4 B, p. 1778-1783 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

MOS devices
semiconductor devices
metal oxide semiconductors
ramps
budgets