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Research Output 1999 2020

1999
7 Citations (Scopus)

Low-energy implantations of decaborane (B10H14) ion clusters in silicon wafers

Dirks, A. G., Bancken, P. H. L., Politiek, J., Cowern, N. E. B., Snijders, J. H. M., van Berkum, J. G. M. & Verheijen, M. A., 1 Dec 1999, Proceedings of the International Conference on Ion Implantation Technology. Piscataway: Institute of Electrical and Electronics Engineers, Vol. 2. p. 1167-1170 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Silicon wafers
Ion implantation
Atoms
Ions
Rapid thermal annealing
2000
1 Citation (Scopus)

2D dopant profiling of advanced CMOS technologies by preferential etching, comparison with 2D process simulations

Dachs, C. J. J., Verheijen, M. A., Kaiser, M., Stolk, P. A. & Ponomarev, Y. V., 1 Jan 2000, ESSDERC 2000 - Proceedings of the 30th European Solid-State Device Research Conference. Piscataway: Institute of Electrical and Electronics Engineers, p. 360-363 4 p. 1503719

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Secondary ion mass spectrometry
Etching
Doping (additives)
Transmission electron microscopy
214 Citations (Scopus)

Difference between blocking and néel temperatures in the exchange biased Fe3O4/CoO system

van der Zaag, P. J., Ijiri, Y., Borchers, J. A., Feiner, L. F., Wolf, R. M., Gaines, J. M., Erwin, R. W. & Verheijen, M. A., 1 Jan 2000, In : Physical Review Letters. 84, 26, p. 6102-6105 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

temperature
neutron diffraction
proximity
scaling
1 Citation (Scopus)

In situ electrical resistance measurements of Al-Ge films in the TEM using a modified heating holder

Verheijen, M. A., Donkers, J. J. T. M., Thomassen, J. F. P., Van den Broek, J. J., van der Rijt, R. A. F., Dona, M. J. J. & Smit, C. M., 1 Dec 2000, Polycrystalline metal and magnetic thin films -2000 : symposium held April 25-27, 2000, San Francisco, California, USA. Clemens, B. M., Gignac, L. & Maclaren, J. M. (eds.). Warrendale: Materials Research Society, (Materials Research Society Symposium - Proceedings; vol. 615).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Acoustic impedance
holders
electrical resistance
Transmission electron microscopy
Heating
2001

A manufacturable sub-50nm PMOSFET technology

Loo, J. J. G. P., Ponomarev, Y. V., Kaiser, M., Verheijen, M. A., Cubaynes, F. N. & Dachs, C. J. J., 1 Jan 2001, European Solid-State Device Research Conference. Piscataway: Institute of Electrical and Electronics Engineers, p. 147-150 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Plasma enhanced chemical vapor deposition
Processing
Boron
Engineers
Hot Temperature
2002
58 Citations (Scopus)

Explanation for the leakage current in polycrystalline-silicon thin-film transistors made by Ni-silicide mediated crystallization

van der Zaag, P. J., Verheijen, M. A., Yoon, S. Y. & Young, N. D., 28 Oct 2002, In : Applied Physics Letters. 81, 18, p. 3404-3406 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

leakage
transistors
crystallization
silicon
thin films
2003

Monocrystalline InP nanotubes

Bakkers, E. P. A. M., Feiner, L. F., Verheijen, M. A., Van Dam, J. A., De Franceschi, S. & Kouwenhoven, L., 1 Dec 2003, Quantum Dots, Nanoparticles and Nanowires. Materials Research Society, p. 305-310 6 p. (Materials Research Society Symposium - Proceedings; vol. 789).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Indium phosphide
indium phosphides
Nanotubes
nanotubes
wire
103 Citations (Scopus)

Structural characterization of mesoporous organosilica films for ultralow-k dielectrics

de Theije, F. K., Verheijen, M. A., Baklanov, M. R., Mogilnikov, K. P. & Furukawa, Y., 8 May 2003, In : Journal of Physical Chemistry B. 107, 18, p. 4280-4289 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Surface-Active Agents
Surface active agents
Permittivity
Polymers
matrices
124 Citations (Scopus)

Synthesis of InP nanotubes

Bakkers, E. P. A. M. & Verheijen, M. A., 2003, In : Journal of the American Chemical Society. 125, 12, p. 3440-3441

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

TEM study of InSbTe crystal morphology as a function of crystallization conditions

Verheijen, M. A., Mijiritskii, A. & Kooi, B. J., 1 Dec 2003, Advanced data Storage Materials and Characterization Techniques. Warrendale: Materials Research Society, p. 161-166 6 p. (Materials Research Society Symposium - Proceedings; vol. 803).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Crystallization
Transmission electron microscopy
Crystals
Textures
Crystalline materials
2004
4 Citations (Scopus)

Advanced PMOS device architecture for highly-doped ultra-shallow junctions

Surdeanu, R., Pawlak, B. J., Lindsay, R., van Dal, M., Doornbos, G., Dachs, C. J. J., Ponomarev, Y. V., Loo, J. J. P., Cubaynes, F. N., Henson, K., Verheijen, M. A., Kaiser, M., Pages, X., Stolk, P. A., Taylor, B. & Jurczak, M., 1 Jan 2004, In : Japanese Journal of Applied Physics, Part 1 : Regular Papers and Short Notes & Review Papers. 43, 4 B, p. 1778-1783 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

MOS devices
semiconductor devices
metal oxide semiconductors
ramps
budgets
58 Citations (Scopus)

Assessing the performance of two-dimensional dopant profiling techniques

Duhayon, N., Eyben, P., Fouchier, M., Clarysse, T., Vandervorst, W., Álvarez, D., Schoemann, S., Ciappa, M., Stangoni, M., Fichtner, W., Formanek, P., Kittler, M., Raineri, V., Giannazzo, F., Goghero, D., Rosenwaks, Y., Shikler, R., Saraf, S., Sadewasser, S., Barreau, N. & 7 others, Glatzel, T., Verheijen, M., Mentink, S. A. M., von Sprekelsen, M., Maltezopoulos, T., Wiesendanger, R. & Hellemans, L., 1 Jan 2004, In : Journal of Vacuum Science and Technology, B. 22, 1, p. 385-393 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Doping (additives)
Calibration
11 Citations (Scopus)

Characterization of thermal and electrical stability of MOCVD HfO 2-HfSiO4 dielectric layers with polysilicon electrodes for advanced CMOS technologies

Rittersma, Z. M., Loo, J. J. G. P., Ponomarev, Y. V., Verheijen, M. A., Kaiser, M., Roozeboom, F., van Elshocht, S. & Caymax, M., 1 Dec 2004, In : Journal of the Electrochemical Society. 151, 12, p. G870-G877

Research output: Contribution to journalReview articleAcademicpeer-review

Metallorganic chemical vapor deposition
Polysilicon
CMOS
thermal stability
Metals
109 Citations (Scopus)

Critical review of the current status of thickness measurements for ultrathin SiO 2 on Si Part V: results of a CCQM pilot study

Seah, M. P., Spencer, S. J., Bensebaa, F., Vickridge, I., Danzebrink, H., Krumrey, M., Gross, T., Oesterle, W., Wendler, E., Rheinländer, B., Azuma, Y., Kojima, I., Suzuki, N., Suzuki, M., Tanuma, S., Moon, D. W., Lee, H. J., Cho, H. M., Chen, H. Y., Wee, A. T. S. & 17 others, Osipowicz, T., Pan, J. S., Jordaan, W. A., Hauert, R., Klotz, U., Van Der Marel, C., Verheijen, M., Tamminga, Y., Jeynes, C., Bailey, P., Biswas, S., Falke, U., Nguyen, N. V., Chandler-Horowitz, D., Ehrstein, J. R., Muller, D. & Dura, J. A., 1 Sep 2004, In : Surface and Interface Analysis. 36, 9, p. 1269-1303 35 p.

Research output: Contribution to journalArticleAcademicpeer-review

Thickness measurement
ion scattering
nuclear reactions
Spectrometry
ellipsometry
18 Citations (Scopus)

Effects of crystalline regrowth on dopant profiles in preamorphized silicon

Hopstaken, M. J. P., Tamminga, Y., Verheijen, M. A., Duffy, R., Venezia, V. C. & Heringa, A., 15 Jun 2004, In : Applied Surface Science. 231-232, p. 688-692 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Silicon
solid phases
Doping (additives)
Crystalline materials
silicon
162 Citations (Scopus)

Epitaxial growth of InP nanowires on germanium

Bakkers, E. P. A. M., Dam, Van, J. A., Franceschi, De, S., Kouwenhoven, L. P., Kaiser, M. A., Verheijen, M. A., Wondergem, H. J. & Sluis, van der, P., 2004, In : Nature Materials. 3, 11, p. 769-773 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Germanium
Epitaxial growth
Nanowires
germanium
nanowires
30 Citations (Scopus)

HfSiO4 dielectric layers deposited by ALD using HfCl4 and NH2(CH2)3Si(OC2H 5)3 precursors

Rittersma, Z. M., Roozeboom, F., Verheijen, M. A., Van Berkum, J. G. M., Dao, T., Snijders, J. H. M., Vainonen-Ahlgren, E., Tois, E., Tuominen, M. & Haukka, S., 1 Dec 2004, In : Journal of the Electrochemical Society. 151, 11, p. C716-C722 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition
atomic layer epitaxy
Leakage currents
Metals
Annealing
19 Citations (Scopus)

In situ transmission electron microscopy analysis of electron beam induced crystallization of amorphous marks in phase-change materials

Kaiser, M., van Pieterson, L. & Verheijen, M. A., 15 Sep 2004, In : Journal of Applied Physics. 96, 6, p. 3193-3198 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

phase change materials
electron beams
crystallization
transmission electron microscopy
electron irradiation
107 Citations (Scopus)

Island growth in the atomic layer deposition of zirconium oxide and aluminum oxide on hydrogen-terminated silicon: Growth mode modeling and transmission electron microscopy

Puurunen, R. L., Vandervorst, W., Besling, W. F. A., Richard, O., Bender, H., Conard, T., Zhao, C., Delabie, A., Caymax, M., de Gendt, S., Heyns, M., Viitanen, M. M., de Ridder, M., Brongersma, H. H., Tamminga, Y., Dao, T., de Win, T., Verheijen, M., Kaiser, M. & Tuominen, M., 1 Nov 2004, In : Journal of Applied Physics. 96, 9, p. 4878-4889 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

atomic layer epitaxy
zirconium oxides
aluminum oxides
transmission electron microscopy
oxides
8 Citations (Scopus)

Thickness and composition of ultrathin SiO2 layers on Si

van der Marel, C., Verheijen, M. A., Tamminga, Y., Pijnenburg, R. H. W., Tombros, N. & Cubaynes, F., 1 Jul 2004, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 22, 4, p. 1572-1578 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Photoelectron spectroscopy
Rutherford backscattering spectroscopy
x ray spectroscopy
X rays
photoelectron spectroscopy
4 Citations (Scopus)
8 Downloads (Pure)

Transmission electron microscopy specimen holder for simultaneous in situ heating and electrical resistance measurements

Verheijen, M. A., Donkers, J. J. T. M., Thomassen, J. F. P., van den Broek, J. J., Van der Rijt, R. A. F., Dona, M. J. J. & Smit, C. M., 1 Feb 2004, In : Review of Scientific Instruments. 75, 2, p. 426-429 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
resistance heating
Acoustic impedance
holders
electrical resistance
Transmission electron microscopy
2005

Characterization of laminated CEO2-HFO2 high-K gate dielectrics deposited by pulsed laser deposition

Karakaya, K., Zinine, A., Van Berkum, J. G. M., Graat, P., Verheijen, M. A., Rittersma, Z. M., Rijnders, G. & Blank, D. H. A., 1 Dec 2005, Advanced gate stack, source/drain and channel engineering for Si-based CMOS :$bnew materials, processes, and equipment : proceedings of the international symposium . Pennington: Electrochemical Society, Inc., p. 331-338 8 p. (Proceedings Electrochemical Society; vol. 2005-05).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Gate dielectrics
Pulsed laser deposition
Oxides
Leakage currents
Laminates
33 Citations (Scopus)

Low-temperature diffusion of high-concentration phosphorus in silicon, a preferential movement toward the surface

Duffy, R., Venezia, V. C., Loo, J., Hopstaken, M. J. P., Verheijen, M. A., Van Berkum, J. G. M., Maas, G. C. J., Tamminga, Y., Dao, T. & Demeurisse, C., 21 Feb 2005, In : Applied Physics Letters. 86, 8, 3 p., 081917.

Research output: Contribution to journalArticleAcademicpeer-review

phosphorus
silicon
profiles
defects
surface temperature
2006
6 Citations (Scopus)

Archival-overwrite performance of GeSnSb-based phase-change discs

Van Pieterson, L., Hesselink, E. W., Rijpers, J. C. N., Kaiser, M., Verheijen, M. A. & Elfrink, R., 14 Apr 2006, In : Journal of Applied Physics. 99, 6, 066111.

Research output: Contribution to journalArticleAcademicpeer-review

reflectance
phase change materials
specifications
recording
high speed
10 Citations (Scopus)

Characterization of laminated CeO2-HfO2 high-k gate dielectrics grown by pulsed laser deposition

Karakaya, K., Zinine, A., Van Berkum, J. G. M., Verheijen, M. A., Rittersma, Z. M., Rijnders, G. & Blank, D. H. A., 13 Sep 2006, In : Journal of the Electrochemical Society. 153, 10, p. F233-F236 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

Gate dielectrics
Pulsed laser deposition
pulsed laser deposition
Leakage currents
Temperature
2 Downloads (Pure)

Dedicated FIB preparation for TEM cross-section samples of nanowires grown vertically on silicon substrates

Kaiser, M., Verheijen, M. A., Roest, A. L. & Bakkers, E. P. A. M., 2006, In : Microscopy and Microanalysis. 12, SUPPL. 2, p. 504-505 2 p.

Research output: Contribution to journalArticleAcademicpeer-review

Nanowires
nanowires
Transmission electron microscopy
Silicon
preparation
9 Citations (Scopus)

Electrical and structural characterization of PLD grown CeO2-HfO2 laminated high-k gate dielectrics

Karakaya, K., Barcones, B., Rittersma, Z. M., van Berkum, J. G. M., Verheijen, M. A., Rijnders, G. & Blank, D. H. A., 1 Dec 2006, In : Materials Science in Semiconductor Processing. 9, 6, p. 1061-1064 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Gate dielectrics
Pulsed laser deposition
pulsed laser deposition
Cooling
leakage
1 Citation (Scopus)

Epitaxial III-V nanowires on silicon for vertical devices

Bakkers, E. P. A. M., Borgström, M. T., Einden, Van Den, W., Weert, van, M. H. M., Helman, A. & Verheijen, M. A., 2006, In : ECS Transactions. 3, 2, p. 415-423

Research output: Contribution to journalArticleAcademicpeer-review

Nanowires
Silicon
Vapors
Vapor phase epitaxy
Liquids
171 Citations (Scopus)

Growth kinetics of heterostructured GaP-GaAs nanowires

Verheijen, M. A., Immink, W. G. G., Smet, de, T., Borgström, M. T. & Bakkers, E. P. A. M., 2006, In : Journal of the American Chemical Society. 128, 4, p. 1353-1359

Research output: Contribution to journalArticleAcademicpeer-review

Nanowires
Growth kinetics
Growth
phosphine
Vapors

III-V semiconductor nanowires grown on silicon for vertical devices

Helman, A., Borgström, M. T., Wunnicke, O., Einden, Van Den, W., Verheijen, M. A., Roest, A. L. & Bakkers, E. P. A. M., 2006, 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings. Vol. 3. p. 133-136

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

nanowires
silicon
electronics
vapor phase epitaxy
laser ablation
6 Citations (Scopus)

In situ transmission electron microscopy observations of individually selected freestanding carbon nanotubes during field emission

Kaiser, M., Doytcheva, M., Verheijen, M. & de Jonge, N., 1 Aug 2006, In : Ultramicroscopy. 106, 10, p. 902-908 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Carbon Nanotubes
Field emission
field emission
Carbon nanotubes
carbon nanotubes
50 Citations (Scopus)

Interface study on heterostructured GaP-GaAs nanowires

Borgström, M. T., Verheijen, M. A., Immink, W. G. G., Smet, de, T. & Bakkers, E. P. A. M., 2006, In : Nanotechnology. 17, 16, p. 4010-4013 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Nanowires
Arsenic
Temperature
Vapors
X rays
2 Citations (Scopus)

Laminated CeO2/HfO2 high-k gate dielectrics grown by pulsed laser deposition in reducing ambient

Karakaya, K., Barcones, B., Zinine, A., Rittersma, Z. M., Graat, P., van Berkum, J. G. M., Verheijen, M. A., Rijnders, G. & Blank, D. H. A., 1 Dec 2006, In : ECS Transactions. 3, 3, p. 521-533 13 p.

Research output: Contribution to journalConference articleAcademicpeer-review

Gate dielectrics
Pulsed laser deposition
Laminates
Electric properties
Gas mixtures

Low VT Mo(O,N) metal gate electrodes on HfSiON for sub-45nm pMOSFET devices

Singanamalla, R., Ravit, C., Vellianitis, G., Petry, J., Paraschiv, V., Van Zijl, J. P., Brus, S., Verheijen, M., Weemaes, R. G. R., Kaiser, M., Van Berkum, J. G. M., Bancken, P. H. L., Vos, R., Yu, H., De Meyer, K., Kubicek, S., Biesemans, S. & Hooker, J. C., 1 Dec 2006, 2006 International Electron Devices Meeting Technical Digest, IEDM. Piscataway: Institute of Electrical and Electronics Engineers, 4 p. 4154283

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Gate dielectrics
Field effect transistors
Threshold voltage
Polysilicon
Metals
104 Citations (Scopus)
2 Downloads (Pure)

Position-controlled epitaxial III-V nanowires on silicon

Roest, A. L., Verheijen, M. A., Wunnicke, O., Serafin, S. N., Wondergem, H. J. & Bakkers, E. P. A. M., 2006, In : Nanotechnology. 17, 11, p. s271-s275 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Silicon
Nanowires
Vapor phase epitaxy
Laser ablation
Epitaxial growth
2007

3D passive and heterogeneous integration technology options for system-in-package

Roozeboom, F., Klootwijk, J. H., Dekkers, W., Jinesh, K. B., Lamy, Y., Grunsven, van, E. C. E., Burghoorn, M., Sanders, F., Verheijen, M. A., Weemaes, R. G. R., Kaiser, M., Sakai, T., Kim, H-D., Blin, D., Heil, S. B. S., Sanden, van de, M. C. M. & Kessels, W. M. M., 2007, Proceedings 2nd IEEE Workshop on 3D System Integration, Munich, Germany. München, Germany, p. 38-46

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Etching
Drilling
Silicon
Atomic layer deposition
Reactive ion etching
1 Downloads (Pure)

Analysis of the degradation mechanism during repeated overwrite of phase-change discs

Kuiper, A. E. T., Pasquariello, D., Bulle-Lieuwma, C. W. T., Kaiser, M., Verheijen, M. A., Nulens, H. A. G., Van Pieterson, L. & Zhong, G. J. Y., 8 Mar 2007, In : Japanese Journal of Applied Physics, Part 1 : Regular Papers and Short Notes & Review Papers. 46, 3 A, p. 1037-1041 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Depth profiling
Jitter
Electron microscopes
degradation
Decomposition
88 Citations (Scopus)
3 Downloads (Pure)

Epitaxial growth of III–V nanowires on group IV substrates

Bakkers, E. P. A. M., Borgström, M. T. & Verheijen, M. A., 2007, Functional Nanowires : From Fundamental Science to Emerging Applications. Pittsburgh, Pa: Materials Research Society, p. 117-122 (MRS Bulletin; vol. 32).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

nanowires
silicon
antiphase boundaries
accommodation
optoelectronic devices
56 Citations (Scopus)

Evidence of the thermo-electric Thomson effect and influence on the program conditions and cell optimization in phase-change memory cells

Castro, D. T., Goux, L., Hurkx, G. A. M., Attenborough, K., Delhougne, R., Lisoni, J., Jedema, F. J., In't Zandt, M. A. A., Wolters, R. A. M., Gravesteijn, D. J., Verheijen, M. A., Kaiser, M., Weemaes, R. G. R. & Wouters, D. J., 1 Dec 2007, 2007 IEEE International Electron Devices Meeting. Piscataway: Institute of Electrical and Electronics Engineers, p. 315-318 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Thermoelectricity
thermoelectricity
Phase change memory
phase change materials
Phase change materials
66 Citations (Scopus)

Remote p-doping of InAs nanowires

Li, H-Y., Wunnicke, O., Borgström, M. T., Immink, W. G. G., Weert, van, M. H. M., Verheijen, M. A. & Bakkers, E. P. A. M., 2007, In : Nano Letters. 7, 5, p. 1144-1148 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Nanowires
nanowires
Doping (additives)
Shielding
shielding
301 Citations (Scopus)
2 Downloads (Pure)

Single quantum dot nanowire LEDs

Minot, E. D., Kelkensberg, F., Kouwen, Van, M. P., Dam, Van, J. A., Kouwenhoven, L. P., Zwiller, V., Borgström, M. T., Wunnicke, O., Verheijen, M. A. & Bakkers, E. P. A. M., 2007, In : Nano Letters. 7, 2, p. 367-371

Research output: Contribution to journalArticleAcademicpeer-review

Semiconductor quantum dots
Nanowires
Light emitting diodes
nanowires
light emitting diodes
80 Citations (Scopus)
1 Downloads (Pure)

Three-dimensional morphology of GaP-GaAs nanowires revealed by transmission electron microscopy tomography

Verheijen, M. A., Algra, R. E., Borgström, M. T., Immink, W. G. G., Sourty, E., Enckevort, van, W. J. P., Vlieg, E. & Bakkers, E. P. A. M., 2007, In : Nano Letters. 7, 10, p. 3051-3055

Research output: Contribution to journalArticleAcademicpeer-review

Nanowires
Tomography
nanowires
tomography
Transmission electron microscopy

Towards vertical III-V nanowire devices

Borgström, M. T., Immink, W. G. G., Ketelaars, B., Verheijen, M. A., Algra, R. E. & Bakkers, E. P. A. M., 2007, Proceedings of the 14th International Workshop on the Physics of Semiconductor Devices (IWPSD), Mumbai, India, 16-20 December 2007. p. 343-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

nanowires
wire
electronics
1 Citation (Scopus)

Towards vertical III-V nanowire devices on silicon

Bakkers, E. P. A. M., Borgström, M. T., Einden, Van Den, W., Weert, van, M. H. M., Minot, E. D., Kelkensberg, F., Kouwen, Van, M. P., Dam, Van, J. A., Kouwenhoven, L. P., Zwiller, V., Helman, A., Wunnicke, O. & Verheijen, M. A., 2007, Proceedings of the 65th DRC Device Research Conference, South Bend , Indiana, 2007. Institute of Electrical and Electronics Engineers, p. 163-164

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

nanowires
silicon
vapor phase epitaxy
light emitting diodes
vapors
2008
5 Citations (Scopus)
3 Downloads (Pure)

Epitaxial growth of III-V nanowires on group IV substrates

Bakkers, E. P. A. M., Borgström, M. T. & Verheijen, M. A., 2008, Advances in GaN, GaAs, SiC and related alloys on silicon substrates : symposium held March 24 - 28, 2008, San Francisco, California, U.S.A.. Dadgar, A., Li, T., Mastro, M., Piner, E. L. & rEDWING, J. (eds.). wARRENDALE: Materials Research Society, p. 223-234 (Materials Research Society Symposium Proceedings; vol. 1068).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

nanowires
silicon
antiphase boundaries
accommodation
optoelectronic devices
5 Citations (Scopus)
88 Downloads (Pure)

Evolution of fluorine and boron profiles during annealing in crystalline Si

López, P., Pelaz, L., Duffy, R., Meunier-Beillard, P., Roozeboom, F., Tak, van der, K., Breimer, P., Berkum, van, J. G. M., Verheijen, M. A. & Kaiser, M., 2008, In : Journal of Vacuum Science and Technology, B. 26, 1, p. 377-381 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Fluorine
fluorine
Boron
boron
Annealing

F+ implants in crystalline Si: The Si interstitial contribution

Lopez, P., Pelaz, L., Duffy, R., Meunier-Beillard, P., Roozeboom, F., Van Der Tak, K., Breimer, P., Van Berkum, J. G. M., Verheijen, M. A. & Kaiser, M., 1 Dec 2008, Doping Engineering for Front-End Processing. Warrendale: Materials Research Society, p. 279-284 6 p. (Materials Research Society symposium proceedings; vol. 1070).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

interstitials
Crystalline materials
Defects
defects
transferred electron devices
2 Citations (Scopus)
71 Downloads (Pure)

Si interstitial contribution of F+ implants in crystalline Si

López, P., Pelaz, L., Duffy, R., Meunier-Beillard, P., Roozeboom, F., Tak, van der, K., Breimer, P., Berkum, van, J. G. M., Verheijen, M. A. & Kaiser, M., 2008, In : Journal of Applied Physics. 103, 9, 4 p., 093538.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
interstitials
annealing
defects
supersaturation
estimates
529 Citations (Scopus)
1 Downloads (Pure)

Twinning superlattices in indium phosphide nanowires

Algra, R. E., Verheijen, M. A., Borgström, M. T., Feiner, L. F., Immink, W. G. G., Enckevort, van, W. J. P., Vlieg, E. & Bakkers, E. P. A. M., 2008, In : Nature. 456, 7220, p. 369-372 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Nanowires
Zinc
Semiconductors
Silicon
Crystallization
112 Citations (Scopus)
2 Downloads (Pure)

Ultrahigh capacitance density for multiple ALD-grown MIM capacitor stacks in 3-D silicon

Klootwijk, J. H., Jinesh, K. B., Dekkers, W., Verhoeven, J. F. C., Heuvel, van den, F. C., Kim, H-D., Blin, D., Verheijen, M. A., Weemaes, R. G. R., Kaiser, M., Ruigrok, J. J. M. & Roozeboom, F., 2008, In : IEEE Electron Device Letters. 29, 7, p. 740-742 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition
Silicon
Capacitors
Capacitance
Metals