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Activities 2018 2018

  • 1 Contributed talk
  • 1 Invited talk

New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide

A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Speaker)
30 Sep 20184 Oct 2018

Activity: Talk or presentation typesContributed talkScientific

Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma

A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Invited speaker)
24 Jul 201828 Jul 2018

Activity: Talk or presentation typesInvited talkScientific