• 6599 Citations

Research output per year

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Personal profile


“I enjoy both solving industrial problems in materials science and finding answers to relevant scientific questions.”

Research profile

Marcel Verheijen operates the high-end TEM microscope purchased as part of Solliance (the alliance that brings together R&D activities in thin-film solar cells of TU/e, TNO, Holst Centre, ECN, Imec and Forschungszentrum Jülich). It is physically housed at Philips Innovation labson the Eindhoven High Tech Campus, where Verheijen is employed as TEM application specialist. At Eindhoven University of Technology (TU/e) Verheijen is a part-time Assistant Professor in the Plasma & Materials Processing group of Prof. Erwin Kessels, where he serves all TU/e Applied Physics research groups with his expertise. As such he has co-authored many publications and acted as co-promotor (doctoral advisor) with multiple PhD students.

At TU/e his research interest includes high resolution TEM characterization of multi-layer systems, nanowires and ALD deposited nano-particles and nano-laminates. At Philips Verheijen performed materials characterization studies on a variety of materials systems, such as IC devices, rewritable DVD materials, MRI contrast agents, OLED and solar cell devices, and nanomaterials. The present focus of his Philips work is on failure analysis and yield improvement.

Academic background

Marcel Verheijen has received his MSc. in Chemistry from the Radboud University Nijmegen where he obtained his PhD. degree in 1995 under supervision of Prof. Piet Bennema. His research involved crystal growth and microscopy studies of fullerene crystals (C60 and C70) and incommensurately modulated crystals. Following his graduation he started working at Philips where he held various positions as TEM application specialist. Since January 2010, Verheijen is part-time researcher at the department of Applied Physics of Eindhoven University of Technology (TU/e).

Affiliated with

  • Soliance
  • Netherlands Electron Microscopy Infrastructure (NEMI)

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Research Output

Three-dimensional morphology of GaP-GaAs nanowires revealed by transmission electron microscopy tomography

Verheijen, M. A., Algra, R. E., Borgström, M. T., Immink, W. G. G., Sourty, E., Enckevort, van, W. J. P., Vlieg, E. & Bakkers, E. P. A. M., 2007, In : Nano Letters. 7, 10, p. 3051-3055

Research output: Contribution to journalArticleAcademicpeer-review

  • 80 Citations (Scopus)
    1 Downloads (Pure)

    Twinning superlattices in indium phosphide nanowires

    Algra, R. E., Verheijen, M. A., Borgström, M. T., Feiner, L. F., Immink, W. G. G., Enckevort, van, W. J. P., Vlieg, E. & Bakkers, E. P. A. M., 2008, In : Nature. 456, 7220, p. 369-372 4 p.

    Research output: Contribution to journalArticleAcademicpeer-review

  • 531 Citations (Scopus)
    1 Downloads (Pure)

    Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition

    Weber, M. J., Verheijen, M. A., Bol, A. A. & Kessels, W. M. M., 6 Mar 2015, In : Nanotechnology. 26, 9, p. 094002-1/11 11 p., 094002.

    Research output: Contribution to journalArticleAcademicpeer-review

    Open Access
  • 40 Citations (Scopus)
    117 Downloads (Pure)
  • Extraction of Dzyaloshinskii-Moriya interaction from propagating spin waves

    Lucassen, J., Schippers, C. F., Verheijen, M. A., Fritsch, P., Geluk, E. J., Barcones Campo, B., Duine, R. A., Wurmehl, S., Swagten, H. J. M., Koopmans, B. & Lavrijsen, R., 28 Feb 2020, In : Physical Review B. 101, 6, 6 p., 064432.

    Research output: Contribution to journalArticleAcademicpeer-review


    • 1 Contributed talk
    • 1 Invited talk

    New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide

    A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Speaker)
    30 Sep 20184 Oct 2018

    Activity: Talk or presentation typesContributed talkScientific

    Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma

    A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Invited speaker)
    24 Jul 201828 Jul 2018

    Activity: Talk or presentation typesInvited talkScientific