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Content available in repository
Supervised Work
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Area-selective atomic layer deposition of Al2O3
Angelidis, A. (Author), Merkx, M. J. M. (Supervisor 1) & Mameli, A. (External coach), 2019Student thesis: Master
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Area-selective atomic layer deposition using inhibitor molecules in multi-step cycles
Jongen, R. G. J. (Author), Merkx, M. J. M. (Supervisor 1) & Mackus, A. J. M. (Supervisor 2), 2018Student thesis: Master
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Characterization of precursor blocking during area-selective ALD: Studied with probe molecules and infrared spectroscopy
Clevis, R. H. J. (Author), Mackus, A. J. M. (Supervisor 1), Li, J. (Supervisor 2) & Merkx, M. J. M. (Supervisor 2), 11 Jun 2021Student thesis: Master
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Precursor blocking mechanisms of aniline inhibitor molecules in area-selective atomic layer deposition of TaN
Lengers, R. J. (Author), Merkx, M. J. M. (Supervisor 1) & Mackus, A. J. M. (Supervisor 2), 16 Jul 2021Student thesis: Master
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The use of substrate biasing during plasma-enhanced atomic layer deposition of TiN for area-selective deposition
Vlaanderen, S. (Author), Faraz, T. (Supervisor 1), Merkx, M. J. M. (Supervisor 2) & Mackus, A. J. M. (Supervisor 2), 2019Student thesis: Master
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