Research Output per year
Fingerprint Dive into the research topics where Marc J.M. Merkx is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
Atomic layer deposition
Chemical Compounds
acetylacetone
Physics & Astronomy
atomic layer epitaxy
Physics & Astronomy
inhibitors
Physics & Astronomy
Molecules
Chemical Compounds
Silanes
Chemical Compounds
cycles
Physics & Astronomy
Density functional theory
Chemical Compounds
Network
Recent external collaboration on country level. Dive into details by clicking on the dots.
Research Output 2016 2020
Mechanism of precursor blocking by acetylacetone inhibitor molecules during area-selective atomic layer deposition of SiO2
Merkx, M. J. M., Sandoval, T. E., Hausmann, D. M., Kessels, W. M. M. E. & Mackus, A. J. M., 12 Feb 2020, (Accepted/In press) In : Chemistry of Materials.Research output: Contribution to journal › Article › Academic › peer-review
Atomic layer deposition
Molecules
Silanes
Adsorbates
Density functional theory
20
Citations
(Scopus)
229
Downloads
(Pure)
From the bottom-up: toward area-selective atomic layer deposition with high selectivity
Mackus, A. J. M., Merkx, M. J. M. & Kessels, W. M. M., 8 Jan 2019, In : Chemistry of Materials. 31, 1, p. 2-12 11 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
Atomic layer deposition
Level control
Processing
Nanotechnology
Etching
29
Citations
(Scopus)
224
Downloads
(Pure)
Area-selective atomic layer deposition of SiO2 using acetylacetone as a chemoselective inhibitor in an ABC-type cycle
Mameli, A., Merkx, M. J. M., Karasulu, B., Roozeboom, F., Kessels, W. M. M. & MacKus, A. J. M., 26 Sep 2017, In : ACS Nano. 11, 9, p. 9303-9311 9 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
acetylacetone
Atomic layer deposition
atomic layer epitaxy
inhibitors
cycles
When and why are streamers attracted to dielectric surfaces?
Trienekens, D. J. M., Nijdam, S., Akkermans, G. R. A., Plompen, I., Merkx, M. J. M., Christen, T. & Ebert, U. M., 8 Aug 2016, 2016 IEEE International Conference on Plasma Science (ICOPS) . Piscataway: Institute of Electrical and Electronics Engineers, 1 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
high voltages
gases
insulation
vessels
propagation
Student theses
Area-selective atomic layer deposition of Al2O3
Author: Angelidis, A., 2019Supervisor: Merkx, M. J. (Supervisor 1) & Mameli, A. (External coach)
Student thesis: Master
File
Area-selective atomic layer deposition using inhibitor molecules in multi-step cycles
Author: Jongen, R. G., 2018Supervisor: Merkx, M. J. (Supervisor 1) & Mackus, A. J. (Supervisor 2)
Student thesis: Master
File
Creeping sparks: influences of a dielectric on the propagation of steamer channels
Author: Merkx, M., 2015Supervisor: Trienekens, D. (Supervisor 1) & Nijdam, S. (Supervisor 2)
Student thesis: Bachelor
File
The use of substrate biasing during plasma-enhanced atomic layer deposition in TiN for area-selective deposition
Author: Vlaanderen, S., 2019Supervisor: Faraz, T. (Supervisor 1), Merkx, M. J. (Supervisor 2) & Mackus, A. J. (Supervisor 2)
Student thesis: Master
File