• 72 Citations
20162020

Research output per year

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Fingerprint Dive into the research topics where Marc J.M. Merkx is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

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Research Output

  • 72 Citations
  • 5 Article
  • 1 Conference contribution

Area-selective atomic layer deposition for bottom-up fabrication of nanoelectronics

Mackus, A. J. M., Merkx, M. J. M. & Li, J., 2 Jun 2020, In : Nevac Blad. 58, special on ALD, p. 32-34 2.

Research output: Contribution to journalArticlePopular

  • Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers

    Balasubramanyam, S., Merkx, M. J. M., Verheijen, M. A., Kessels, W. M. M., Mackus, A. J. M. & Bol, A. A., 4 May 2020, In : ACS Materials Letters. 2, 5, p. 511-518 8 p.

    Research output: Contribution to journalArticleAcademicpeer-review

    Open Access
    1 Citation (Scopus)

    Mechanism of precursor blocking by acetylacetone inhibitor molecules during area-selective atomic layer deposition of SiO2

    Merkx, M. J. M., Sandoval, T. E., Hausmann, D. M., Kessels, W. M. M. E. & Mackus, A. J. M., 28 Apr 2020, In : Chemistry of Materials. 32, 8, p. 3335-3345

    Research output: Contribution to journalArticleAcademicpeer-review

  • From the bottom-up: toward area-selective atomic layer deposition with high selectivity

    Mackus, A. J. M., Merkx, M. J. M. & Kessels, W. M. M., 8 Jan 2019, In : Chemistry of Materials. 31, 1, p. 2-12 11 p.

    Research output: Contribution to journalArticleAcademicpeer-review

    Open Access
    File
  • 31 Citations (Scopus)
    304 Downloads (Pure)

    Area-selective atomic layer deposition of SiO2 using acetylacetone as a chemoselective inhibitor in an ABC-type cycle

    Mameli, A., Merkx, M. J. M., Karasulu, B., Roozeboom, F., Kessels, W. M. M. & MacKus, A. J. M., 26 Sep 2017, In : ACS Nano. 11, 9, p. 9303-9311 9 p.

    Research output: Contribution to journalArticleAcademicpeer-review

    Open Access
    File
  • 40 Citations (Scopus)
    232 Downloads (Pure)

    Student theses

    Area-selective atomic layer deposition of Al2O3

    Author: Angelidis, A., 2019

    Supervisor: Merkx, M. J. (Supervisor 1) & Mameli, A. (External coach)

    Student thesis: Master

    File

    Area-selective atomic layer deposition using inhibitor molecules in multi-step cycles

    Author: Jongen, R. G., 2018

    Supervisor: Merkx, M. J. (Supervisor 1) & Mackus, A. J. (Supervisor 2)

    Student thesis: Master

    File

    Creeping sparks: influences of a dielectric on the propagation of steamer channels

    Author: Merkx, M., 2015

    Supervisor: Trienekens, D. (Supervisor 1) & Nijdam, S. (Supervisor 2)

    Student thesis: Bachelor

    File

    The use of substrate biasing during plasma-enhanced atomic layer deposition of TiN for area-selective deposition

    Author: Vlaanderen, S., 2019

    Supervisor: Faraz, T. (Supervisor 1), Merkx, M. J. (Supervisor 2) & Mackus, A. J. (Supervisor 2)

    Student thesis: Master

    File