Research output per year
Research output per year
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Dive into the research topics where Marc J.M. Merkx is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Research output
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Dependence of inherent selective atomic layer deposition of FeOxon Pt nanoparticles on the coreactant and temperature
Cai, J., Merkx, M. J. M., Lan, Y., Jing, Y., Cao, K., Wen, Y., Kessels, W. M. M., MacKus, A. J. M. & Chen, R., 1 Jan 2021, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 39, 1, 7 p., 012404.Research output: Contribution to journal › Article › Academic › peer-review
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Insight into the removal and reapplication of small inhibitor molecules during area-selective atomic layer deposition of SiO2
Merkx, M. J. M., Jongen, R. G. J., Mameli, A., Lemaire, P. C., Sharma, K., Hausmann, D. M., Kessels, W. M. M. & Mackus, A. J. M., Jan 2021, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 39, 1, 8 p., 012402.Research output: Contribution to journal › Article › Academic › peer-review
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Area-selective atomic layer deposition for bottom-up fabrication of nanoelectronics
Mackus, A. J. M., Merkx, M. J. M. & Li, J., 2 Jun 2020, In : Nevac Blad. 58, special on ALD, p. 32-34 2.Research output: Contribution to journal › Article › Popular
10 Downloads (Pure) -
Area-Selective Atomic Layer Deposition of TiN Using Aromatic Inhibitor Molecules for Metal/Dielectric Selectivity
Merkx, M. J. M., Vlaanderen, S., Faraz, T., Verheijen, M. A., Kessels, W. M. M. & MacKus, A. J. M., 22 Sep 2020, In : Chemistry of Materials. 32, 18, p. 7788-7795 8 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access2 Citations (Scopus) -
Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers
Balasubramanyam, S., Merkx, M. J. M., Verheijen, M. A., Kessels, W. M. M., Mackus, A. J. M. & Bol, A. A., 4 May 2020, In : ACS Materials Letters. 2, 5, p. 511-518 8 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access6 Citations (Scopus)
Student theses
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Area-selective atomic layer deposition of SiO2: studied by in situ Fourier transform infrared spectroscopy and spectroscopic ellipsometry
Author: Merkx, M. J., 2017Supervisor: Mackus, A. (Supervisor 1)
Student thesis: Master
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Creeping sparks: influences of a dielectric on the propagation of steamer channels
Author: Merkx, M., 2015Supervisor: Trienekens, D. (Supervisor 1) & Nijdam, S. (Supervisor 2)
Student thesis: Bachelor
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