Research output per year
Research output per year
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Dive into the research topics where Marc J.M. Merkx is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Research output
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Area-selective atomic layer deposition using small molecule inhibitors
Merkx, M. J. M., 22 Feb 2022, Eindhoven: Eindhoven University of Technology. 234 p.Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)
18 Downloads (Pure) -
Relation between Reactive Surface Sites and Precursor Choice for Area-Selective Atomic Layer Deposition Using Small Molecule Inhibitors
Merkx, M. J. M., Angelidis, A., Mameli, A., Li, J., Lemaire, P. C., Sharma, K., Hausmann, D. M., Kessels, W. M. M., Sandoval, T. E. & Mackus, A. J. M., 17 Mar 2022, In: Journal of Physical Chemistry C. 126, 10, p. 4845-4853 9 p.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile8 Downloads (Pure) -
Dependence of inherent selective atomic layer deposition of FeOxon Pt nanoparticles on the coreactant and temperature
Cai, J., Merkx, M. J. M., Lan, Y., Jing, Y., Cao, K., Wen, Y., Kessels, W. M. M., MacKus, A. J. M. & Chen, R., 1 Jan 2021, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 39, 1, 7 p., 012404.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile29 Downloads (Pure) -
Insight into the removal and reapplication of small inhibitor molecules during area-selective atomic layer deposition of SiO2
Merkx, M. J. M., Jongen, R. G. J., Mameli, A., Lemaire, P. C., Sharma, K., Hausmann, D. M., Kessels, W. M. M. & Mackus, A. J. M., Jan 2021, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 39, 1, 8 p., 012402.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile3 Citations (Scopus)31 Downloads (Pure) -
Area-selective atomic layer deposition for bottom-up fabrication of nanoelectronics
Mackus, A. J. M., Merkx, M. J. M. & Li, J., 2 Jun 2020, In: Nevac Blad. 58, 2, p. 32-34Research output: Contribution to journal › Article › Popular
Open AccessFile73 Downloads (Pure)
Press / Media
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2D TMD Materials Enabling Future Electronics
Shashank Balasubramanyam, Marc J.M. Merkx, Marcel A. Verheijen, W.M.M. (Erwin) Kessels, Adrie J.M. Mackus & Ageeth A. Bol
27/06/21
1 Media contribution
Press/Media: Expert Comment
Thesis
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Area-selective atomic layer deposition of SiO2: studied by in situ Fourier transform infrared spectroscopy and spectroscopic ellipsometry
Author: Merkx, M. J. M., 2017Supervisor: Mackus, A. (Supervisor 1)
Student thesis: Master
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Creeping sparks: influences of a dielectric on the propagation of steamer channels
Author: Merkx, M. J. M., 2015Supervisor: Trienekens, D. J. M. (Supervisor 1) & Nijdam, S. (Supervisor 2)
Student thesis: Bachelor
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