Research Output per year
Fingerprint Dive into the research topics where Marc J.M. Merkx is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Research Output
Area-selective atomic layer deposition for bottom-up fabrication of nanoelectronics
Mackus, A. J. M., Merkx, M. J. M. & Li, J., 2 Jun 2020, In : Nevac Blad. 58, special on ALD, p. 32-34 2.Research output: Contribution to journal › Article › Popular
Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers
Balasubramanyam, S., Merkx, M. J. M., Verheijen, M. A., Kessels, W. M. M., Mackus, A. J. M. & Bol, A. A., 4 May 2020, In : ACS Materials Letters. 2, 5, p. 511-518 8 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
1
Citation
(Scopus)
Mechanism of precursor blocking by acetylacetone inhibitor molecules during area-selective atomic layer deposition of SiO2
Merkx, M. J. M., Sandoval, T. E., Hausmann, D. M., Kessels, W. M. M. E. & Mackus, A. J. M., 28 Apr 2020, In : Chemistry of Materials. 32, 8, p. 3335-3345Research output: Contribution to journal › Article › Academic › peer-review
From the bottom-up: toward area-selective atomic layer deposition with high selectivity
Mackus, A. J. M., Merkx, M. J. M. & Kessels, W. M. M., 8 Jan 2019, In : Chemistry of Materials. 31, 1, p. 2-12 11 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
31
Citations
(Scopus)
304
Downloads
(Pure)
Area-selective atomic layer deposition of SiO2 using acetylacetone as a chemoselective inhibitor in an ABC-type cycle
Mameli, A., Merkx, M. J. M., Karasulu, B., Roozeboom, F., Kessels, W. M. M. & MacKus, A. J. M., 26 Sep 2017, In : ACS Nano. 11, 9, p. 9303-9311 9 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
40
Citations
(Scopus)
232
Downloads
(Pure)
Student theses
Area-selective atomic layer deposition of Al2O3
Author: Angelidis, A., 2019Supervisor: Merkx, M. J. (Supervisor 1) & Mameli, A. (External coach)
Student thesis: Master
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Area-selective atomic layer deposition of SiO2: studied by in situ Fourier transform infrared spectroscopy and spectroscopic ellipsometry
Author: Merkx, M. J., 2017Supervisor: Mackus, A. (Supervisor 1)
Student thesis: Master
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Area-selective atomic layer deposition using inhibitor molecules in multi-step cycles
Author: Jongen, R. G., 2018Supervisor: Merkx, M. J. (Supervisor 1) & Mackus, A. J. (Supervisor 2)
Student thesis: Master
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Creeping sparks: influences of a dielectric on the propagation of steamer channels
Author: Merkx, M., 2015Supervisor: Trienekens, D. (Supervisor 1) & Nijdam, S. (Supervisor 2)
Student thesis: Bachelor
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The use of substrate biasing during plasma-enhanced atomic layer deposition of TiN for area-selective deposition
Author: Vlaanderen, S., 2019Supervisor: Faraz, T. (Supervisor 1), Merkx, M. J. (Supervisor 2) & Mackus, A. J. (Supervisor 2)
Student thesis: Master
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