• 49 Citations
20162020
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Fingerprint Dive into the research topics where Marc J.M. Merkx is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

Atomic layer deposition Chemical Compounds
acetylacetone Physics & Astronomy
atomic layer epitaxy Physics & Astronomy
inhibitors Physics & Astronomy
Molecules Chemical Compounds
Silanes Chemical Compounds
cycles Physics & Astronomy
Density functional theory Chemical Compounds

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Research Output 2016 2020

  • 49 Citations
  • 3 Article
  • 1 Conference contribution

Mechanism of precursor blocking by acetylacetone inhibitor molecules during area-selective atomic layer deposition of SiO2

Merkx, M. J. M., Sandoval, T. E., Hausmann, D. M., Kessels, W. M. M. E. & Mackus, A. J. M., 12 Feb 2020, (Accepted/In press) In : Chemistry of Materials.

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition
Molecules
Silanes
Adsorbates
Density functional theory
20 Citations (Scopus)
229 Downloads (Pure)

From the bottom-up: toward area-selective atomic layer deposition with high selectivity

Mackus, A. J. M., Merkx, M. J. M. & Kessels, W. M. M., 8 Jan 2019, In : Chemistry of Materials. 31, 1, p. 2-12 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Atomic layer deposition
Level control
Processing
Nanotechnology
Etching
29 Citations (Scopus)
224 Downloads (Pure)

Area-selective atomic layer deposition of SiO2 using acetylacetone as a chemoselective inhibitor in an ABC-type cycle

Mameli, A., Merkx, M. J. M., Karasulu, B., Roozeboom, F., Kessels, W. M. M. & MacKus, A. J. M., 26 Sep 2017, In : ACS Nano. 11, 9, p. 9303-9311 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
acetylacetone
Atomic layer deposition
atomic layer epitaxy
inhibitors
cycles
2 Downloads (Pure)

When and why are streamers attracted to dielectric surfaces?

Trienekens, D. J. M., Nijdam, S., Akkermans, G. R. A., Plompen, I., Merkx, M. J. M., Christen, T. & Ebert, U. M., 8 Aug 2016, 2016 IEEE International Conference on Plasma Science (ICOPS) . Piscataway: Institute of Electrical and Electronics Engineers, 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

high voltages
gases
insulation
vessels
propagation

Student theses

Area-selective atomic layer deposition of Al2O3

Author: Angelidis, A., 2019

Supervisor: Merkx, M. J. (Supervisor 1) & Mameli, A. (External coach)

Student thesis: Master

File

Area-selective atomic layer deposition using inhibitor molecules in multi-step cycles

Author: Jongen, R. G., 2018

Supervisor: Merkx, M. J. (Supervisor 1) & Mackus, A. J. (Supervisor 2)

Student thesis: Master

File

Creeping sparks: influences of a dielectric on the propagation of steamer channels

Author: Merkx, M., 2015

Supervisor: Trienekens, D. (Supervisor 1) & Nijdam, S. (Supervisor 2)

Student thesis: Bachelor

File

The use of substrate biasing during plasma-enhanced atomic layer deposition in TiN for area-selective deposition

Author: Vlaanderen, S., 2019

Supervisor: Faraz, T. (Supervisor 1), Merkx, M. J. (Supervisor 2) & Mackus, A. J. (Supervisor 2)

Student thesis: Master

File