• 2746 Citations
20012020

Research output per year

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Research Output

2005

Threshold ionization mass spectrometry of reactive species in remote Ar/C2H2 expanding thermal plasma

Benedikt, J., Agarwal, S., Eijkman, D. J., Vandamme, W. N. J., Creatore, M. & Sanden, van de, M. C. M., 2005, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 23, 5, p. 1400-1412

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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36 Citations (Scopus)
131 Downloads (Pure)
2004

Expanding thermal plasma for fast deposition of scratch-resistant SiC/sub x/H/sub y/O/sub z/ films

Barrell, Y., Creatore, M., Schaepkens, M., Iacovangelo, C. D., Miebach, T. & Sanden, van de, M. C. M., 2004, In : Surface and Coatings Technology. 180-181, p. 367-371

Research output: Contribution to journalArticleAcademicpeer-review

24 Citations (Scopus)
21 Citations (Scopus)

High rate plasma deposition of thin films for solar cell applications

Sanden, van der, M. C. M., Volintiru, I., Creatore, M., Linden, J. L., Hoex, B., Oever, van den, P. J., Bosch, R. C. M., Erven, van, R., Bijker, M. D., Evers, M. & Kessels, W. M. M., 2004, International symposium on inorganic and environmental materials 2004 : October 18-21, 2004, Eindhoven, The Netherlands : abstracts. p. 111-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2 Downloads (Pure)

Industrial implementation of plasma deposition using the expanding thermal plasma technique

Sanden, van de, M. C. M., Oever, van den, P. J., Creatore, M., Schaepkens, M., Miebach, T., Iacovangelo, C. D., Bosch, R. C. M., Bijker, M. D., Evers, M. F. J., Schram, D. C. & Kessels, W. M. M., 2004, 47th annual technical conference proceedings / Society of Vacuum Coaters : April 24 - 29, 2004, Dallas, Texas, USA. Albuquerque, NM: Society of Vacuum Coaters, p. 447-454

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2003

Ellipsometric characterization of expanding thermal plasma deposited SiO2-like films

Creatore, M., Kilic, M., O'Brien, K., Groenen, R. & Sanden, van de, M. C. M., 2003, In : Thin Solid Films. 427, 1-2, p. 137-141

Research output: Contribution to journalArticleAcademicpeer-review

21 Citations (Scopus)

Expanding thermal plasma for low-k dielectrics deposition

Creatore, M., Barrell, Y., Kessels, W. M. M. & van de Sanden, M. C. M., 1 Dec 2003, Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics - 2003. Warrendale: Materials Research Society, p. 339-344 6 p. (Materials Research Society Symposium - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Remote nitridation of silicon surface by Ar/N2-fed expanding thermal plasma

Dinescu, G., Creatore, M. & Sanden, van de, M. C. M., 2003, In : Surface and Coatings Technology. 174-175, p. 370-374

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)
2002

Deposition of SiOx : films from hexamehtyldisiloxane/oxygen radiofrequency glow discharges: process optimization by plasma diagnostics

Creatore, M., Palumbo, F. & Agostino, d', R., 2002, In : Plasmas and Polymers. 7, 3, p. 291-310

Research output: Contribution to journalArticleAcademicpeer-review

61 Citations (Scopus)
1 Downloads (Pure)

Diagnostics and insights on PECVD for gas-barrier coatings

Creatore, M., Palumbo, F. & Agostino, d', R., 2002, In : Pure and Applied Chemistry. 74, 3, p. 407-411

Research output: Contribution to journalArticleAcademicpeer-review

40 Citations (Scopus)

Expanding thermal plasma deposition of silicon dioxide-like films for microelectronic devices

Creatore, M., van Hest, M. F. A. M., Benedikt, J. & van de Sanden, M. C. M., 2002, Amorphous and heterogeneous silicon-based films, 2002 : symposium held [at the 2002 MRS spring meeting] April 2 - 5, 2002, San Francisco, California, U.S.A. p. 101-107 A19.3. (Materials Research Society Symposium Proceedings; vol. 715).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

7 Citations (Scopus)
2001

NH3 plasma treatment of PET for enhancing aluminium adhesion

Creatore, M., Favia, P., Tenuto, G., Valentini, A. & Agostino, d', R., 2001, In : Plasmas and Polymers. 5, 3-4, p. 201-218

Research output: Contribution to journalArticleAcademicpeer-review

21 Citations (Scopus)