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Research Output 2001 2020

2004
2 Downloads (Pure)

High rate plasma deposition of thin films for solar cell applications

Sanden, van der, M. C. M., Volintiru, I., Creatore, M., Linden, J. L., Hoex, B., Oever, van den, P. J., Bosch, R. C. M., Erven, van, R., Bijker, M. D., Evers, M. & Kessels, W. M. M., 2004, International symposium on inorganic and environmental materials 2004 : October 18-21, 2004, Eindhoven, The Netherlands : abstracts. p. 111-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Industrial implementation of plasma deposition using the expanding thermal plasma technique

Sanden, van de, M. C. M., Oever, van den, P. J., Creatore, M., Schaepkens, M., Miebach, T., Iacovangelo, C. D., Bosch, R. C. M., Bijker, M. D., Evers, M. F. J., Schram, D. C. & Kessels, W. M. M., 2004, 47th annual technical conference proceedings / Society of Vacuum Coaters : April 24 - 29, 2004, Dallas, Texas, USA. Albuquerque, NM: Society of Vacuum Coaters, p. 447-454

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

thermal plasmas
silicones
polycarbonates
silicon nitrides
passivity
2003
20 Citations (Scopus)

Ellipsometric characterization of expanding thermal plasma deposited SiO2-like films

Creatore, M., Kilic, M., O'Brien, K., Groenen, R. & Sanden, van de, M. C. M., 2003, In : Thin Solid Films. 427, 1-2, p. 137-141

Research output: Contribution to journalArticleAcademicpeer-review

Plasma Gases
thermal plasmas
Plasmas
ellipsometry
Plasma deposition
1 Citation (Scopus)

Expanding thermal plasma for low-k dielectrics deposition

Creatore, M., Barrell, Y., Kessels, W. M. M. & van de Sanden, M. C. M., 1 Dec 2003, Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics - 2003. Warrendale: Materials Research Society, p. 339-344 6 p. (Materials Research Society Symposium - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Plasma Gases
Plasmas
Argon
Silicon Dioxide
Electric properties
5 Citations (Scopus)

Remote nitridation of silicon surface by Ar/N2-fed expanding thermal plasma

Dinescu, G., Creatore, M. & Sanden, van de, M. C. M., 2003, In : Surface and Coatings Technology. 174-175, p. 370-374

Research output: Contribution to journalArticleAcademicpeer-review

Plasma Gases
Nitridation
thermal plasmas
Silicon
oxynitrides
2002
60 Citations (Scopus)
1 Downloads (Pure)

Deposition of SiOx : films from hexamehtyldisiloxane/oxygen radiofrequency glow discharges: process optimization by plasma diagnostics

Creatore, M., Palumbo, F. & Agostino, d', R., 2002, In : Plasmas and Polymers. 7, 3, p. 291-310

Research output: Contribution to journalArticleAcademicpeer-review

plasma diagnostics
glow discharges
optimization
oxygen
food
40 Citations (Scopus)

Diagnostics and insights on PECVD for gas-barrier coatings

Creatore, M., Palumbo, F. & Agostino, d', R., 2002, In : Pure and Applied Chemistry. 74, 3, p. 407-411

Research output: Contribution to journalArticleAcademicpeer-review

Plasma enhanced chemical vapor deposition
Gases
Plasmas
Coatings
Infrared absorption
7 Citations (Scopus)

Expanding thermal plasma deposition of silicon dioxide-like films for microelectronic devices

Creatore, M., van Hest, M. F. A. M., Benedikt, J. & van de Sanden, M. C. M., 2002, Amorphous and heterogeneous silicon-based films, 2002 : symposium held [at the 2002 MRS spring meeting] April 2 - 5, 2002, San Francisco, California, U.S.A. p. 101-107 A19.3. (Materials Research Society Symposium Proceedings; vol. 715).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

thermal plasmas
microelectronics
silicon dioxide
chemical properties
spectral resolution
2001
21 Citations (Scopus)

NH3 plasma treatment of PET for enhancing aluminium adhesion

Creatore, M., Favia, P., Tenuto, G., Valentini, A. & Agostino, d', R., 2001, In : Plasmas and Polymers. 5, 3-4, p. 201-218

Research output: Contribution to journalArticleAcademicpeer-review

Aluminum
Adhesion
Plasmas
Polymers
Metals