• 2735 Citations
20012020

Research output per year

If you made any changes in Pure these will be visible here soon.

Research Output

2012

Solid-phase crystallization of ultra high growth rate amorphous silicon films

Sharma, K., Ponomarev, M., Verheijen, M. A., Kunz, O., Sanden, van de, M. C. M. & Creatore, M., 2012, In : Journal of Applied Physics. 111, 10, p. 103510-1/5 103510.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
8 Citations (Scopus)
84 Downloads (Pure)

Surface dynamics of SiO2-like films on polymers grown by DBD assisted CVD at atmospheric pressure

Premkumar, P. A., Starostin, S. A., Vries, de, H., Creatore, M., Koenraad, P. M., MacDonald, W. A. & Sanden, van de, M. C. M., 2012, In : Plasma Processes and Polymers. 9, 11-12, p. 1194-1207 14 p.

Research output: Contribution to journalArticleAcademicpeer-review

14 Citations (Scopus)
10 Downloads (Pure)
2011

Effect of ion bombardment on the a-Si : H based surface passivation of c-Si surfaces

Illiberi, A., Kudlacek, P., Smets, A. H. M., Creatore, M. & Sanden, van de, M. C. M., 2011, In : Applied Physics Letters. 98, 24, p. 242115-1/3 242115.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
27 Citations (Scopus)
111 Downloads (Pure)

Improved adhesion and tribological properties of fast-deposited hard graphite-like hydrogenated amorphous carbon films

Zaharia, T., Kudlacek, P., Creatore, M., Groenen, R., Persoone, P. & Sanden, van de, M. C. M., 2011, In : Diamond and Related Materials. 20, 9, p. 1266-1272

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)
5 Downloads (Pure)

In-situ X-ray diffraction analysis of the crystallisation of a-SI: H films deposited by the expanding thermal plasma technique

Law, F., Hoex, B., Wang, J., Luther, J., Sharma, K., Creatore, M. & van de Sanden, M. C. M., 1 Dec 2011, Program - 37th IEEE Photovoltaic Specialists Conference, PVSC 2011. p. 3026-3030 5 p. 6186582

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Investigation on the discharge formation mechanisms and surface analysis of SiO2-like layers on polymers synthesized using high current dielectric barrier discharge at atmospheric pressure

Sanden, van de, M. C. M., Premkumar, P. A., Starostin, S. A., Vries, de, H. W. & Creatore, M., 2011, 38th International conference on metallurgical coatings & thin films (ICMCTF), May 2-6, 2011, San Diego, CA, USA. p. G3-2-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

On the effect of the amorphous silicon microstructure on the grain size of solid phase crystallized polycrystalline silicon

Sharma, K., Branca, A., Illiberi, A., Tichelaar, F. D., Creatore, M. & Sanden, van de, M. C. M., 2011, In : Advanced Energy Materials. 1, 3, p. 401-406

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)
3 Downloads (Pure)

On the oxidation mechanism of microcrystalline silicon thin films studied by Fourier transform infrared spectroscopy

Bronneberg, A. C., Smets, A. H. M., Creatore, M. & Sanden, van de, M. C. M., 2011, In : Journal of Non-Crystalline Solids. 357, 3, p. 884-887 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

23 Citations (Scopus)
2 Downloads (Pure)

On the role of atomic hydrogen during microcrystalline silicon thin-film deposition

Bronneberg, A. C., Creatore, M. & van de Sanden, M. C. M., 1 Dec 2011, Program - 37th IEEE Photovoltaic Specialists Conference, PVSC 2011. p. 2987-2990 4 p. 6186572

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Plasma assisted deposition of Au/SiO2 multi-layers as surface plasmon resonance-based red colored coatings

Takele Beyene, H. T., Tichelaar, F. D., Verheijen, M. A., Sanden, van de, M. C. M. & Creatore, M., 2011, In : Plasmonics. 6, p. 255-260

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
13 Citations (Scopus)
82 Downloads (Pure)
2010

Atmospheric pressure plasma vapour coatings

Sanden, van de, M. C. M., Starostine, S., Premkumar, P. A., Creatore, M. & Vries, de, H. W., 2010, Proceedings 8th International Conference on Coatings and Plastics, June 13-17, 2010, Braunschweig, Germany. Kondruweit, S., Szyszka, B. & Pütz, J. (eds.). Braunschweig: Fraunhofer Institute for Surface Engineering and Thin Films, p. 57-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Expanding thermal plasma deposited a-Si: H thin films for surface passivation of c-Si wafers

Illiberi, A., Sharma, K., Creatore, M., Kessels, W. M. M. & Van De Sanden, M. C. M., 20 Dec 2010, Program - 35th IEEE Photovoltaic Specialists Conference, PVSC 2010. Institute of Electrical and Electronics Engineers, p. 637-639 3 p. 5616869

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Hard graphitelike hydrogenated amorphous carbon growth at high rates by a remote plasma

Singh, S. V., Zaharia, T., Creatore, M., Groenen, R., van Hege, K. & Sanden, van de, M. C. M., 2010, In : Journal of Applied Physics. 107, 1, p. 013305-1/10 10 p., 013305.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
26 Citations (Scopus)
78 Downloads (Pure)

High current diffuse dielectric barrier discharge in atmospheric pressure air for the deposition of thin silica-like films

Starostine, S., Premkumar, P. A., Creatore, M., Vries, de, H. W., Paffen, R. M. J. & Sanden, van de, M. C. M., 2010, In : Applied Physics Letters. 96, 6, p. 061502-1/3 3 p., 061502.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
51 Citations (Scopus)
100 Downloads (Pure)

Hybrid sputtering-remote PECVD deposition of Au nanoparticles on SiO 2 layers for surface plasmon resonance-based colored coatings

Beyene, H. T., Tichelaar, F. D., Peeters, P., Kolev, I., Van De Sanden, M. C. M. & Creatore, M., 23 Aug 2010, In : Plasma Processes and Polymers. 7, 8, p. 657-664 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)
7 Citations (Scopus)
1 Downloads (Pure)

Implementaion of nanoclusters in intermediate reflective layers

Ponomarev, M. V., Beyene, H. T., Creatore, M. & Van De Sanden, M. C. M., 20 Dec 2010, Program - 35th IEEE Photovoltaic Specialists Conference, PVSC 2010. Institute of Electrical and Electronics Engineers, p. 1565-1568 4 p. 5617042

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Ion probe detection of clusters in a remotely expanding thermal plasma

Petcu, M. C., Sarkar, A., Bronneberg, A. C., Creatore, M. & Sanden, van de, M. C. M., 2010, In : Plasma Sources Science and Technology. 19, 6, p. 065012-1/8

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Optical characterization of plasma-deposited SiO2-like layers on anisotropic polymeric substrates

Aresta, G., Premkumar, P. A., Starostine, S., Vries, de, H. W., Sanden, van de, M. C. M. & Creatore, M., 2010, In : Plasma Processes and Polymers. 7, 9-10, p. 766-774

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)
4 Downloads (Pure)

Plasma deposition of Au-SiO2 multilayers for surface plasmon resonance based red colored coatings

Takele Beyene, H. T., Tichelaar, F. D., Sanden, van de, M. C. M. & Creatore, M., 2010, Proceedings 8th International Conference on Coatings and Plastics, June 13-17, 2010, Braunschweig, Germany. Kondruweit, S., Szyszka, B. & Pütz, J. (eds.). Braunschweig: Fraunhofer Institute for Surface Engineering and Thin Films, p. 383-387

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

4 Downloads (Pure)

Plasma deposition of Au-SiO2 multilayers for surface plasmon resonance-based red colored coatings

Takele Beyene, H. T., Tichelaar, F. D., Sanden, van de, M. C. M. & Creatore, M., 2010, Proceedings of the 53rd Society of Vacuum Coaters Conference (SVC) Annual technical conference proceedings, 17-22 April 2010, Florida, USA. Albuquerque, NM, U.S.A.: Society of Vacuum Coaters, p. T10-448

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Role of a-Si:H bulk in surface passivation on c-Si wafers

Illiberi, A., Sharma, K., Creatore, M. & Sanden, van de, M. C. M., 2010, In : Physica Status Solidi : Rapid Research Letters. 4, 7, p. 172-174 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)

Smooth and self-similar SiO2-like films on polymers synthesized in roll-to-roll atmospheric pressure-PECVD for gas diffusion barrier applications

Premkumar, P. A., Starostin, S. A., Creatore, M., Vries, de, H. W., Paffen, R. M. J., Koenraad, P. M. & Sanden, van de, M. C. M., 2010, In : Plasma Processes and Polymers. 7, 8, p. 635-639

Research output: Contribution to journalArticleAcademicpeer-review

46 Citations (Scopus)

Smooth and uniform Si02-like layers on polymers synthesized by glow-like dielectric barrier discharge assisted CVD at atmospheric pressure

Peter, A. P., Starostin, S. A., Vries, de, H. W., Creatore, M. & Sanden, van de, M. C. M., 2010, Proceedings of the 12th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2010), September 13-17, 2010, Garmisch-Partenkirchen, Germany (Abstracts). S.l.: s.n., p. 98-98

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

SPR voor uniform gekleurde lagen

Takele Beyene, H. T., Sanden, van de, M. C. M., Westing, van, E. P. M. & Creatore, M., 2010, In : Metaal en Techniek. 55, september 2010, p. 20-21

Research output: Contribution to journalArticleProfessional

2009

Ellipsometric Porosimetry for the Microstructure Characterization of Plasma-Deposited SiO2-Like Films

Creatore, M., Terlinden, N. M., Aresta, G. & Sanden, van de, M. C. M., 2009, Proceedings of the 56th international American Vacuum Society Symposium & Exhibition (AVS 56) 8-13 November 2009, San Jose, California. New York, NY: AVS, p. AS+EM+MS+TF-MoM2-2

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
78 Downloads (Pure)

Expanding Thermal Plasma Deposition of a-Si:H Thin Films for Surface Passivation of c-Si Wafers,

Illiberi, A., Verlaan, V., Creatore, M., Kessels, W. M. M. & Sanden, van de, M. C. M., 2009, Proceedings of the 56th international American Vacuum Society Symposium & Exhibition (AVS 56) 8-13 November 2009, San Jose, California. New York, NY: AVS, p. TF-ThA8-208

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
24 Downloads (Pure)

High quality SiO2-like layers by large area atmospheric pressure plasma enhanced CVD : Deposition process studies by surface analysis

Premkumar, P. A., Starostin, S. A., Vries, de, H., Paffen, R. M. J., Creatore, M., Eijkemans, T. J., Koenraad, P. M. & Sanden, van de, M. C. M., 2009, In : Plasma Processes and Polymers. 6, 10, p. 693-702

Research output: Contribution to journalArticleAcademicpeer-review

40 Citations (Scopus)
1 Downloads (Pure)

Investigation of Rare Earth - Doped Silicon Nitride Layers for Solar Cell Applications

Sarkar, A., Creatore, M., Hintzen, H. T. J. M., Sanden, van de, M. C. M. & Petcu, M. C., 2009, Proceedings of the 56th international American Vacuum Society Symposium & Exhibition (AVS 56) 8-13 November 2009, San Jose, California. New York, NY: AVS, p. EM1+PV-TuM12-48

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
12 Citations (Scopus)
36 Downloads (Pure)

Novel approach to thin film polycrystalline silicon on glass

Illiberi, A., Sharma, K., Creatore, M. & Sanden, van de, M. C. M., 2009, In : Materials Letters. 63, 21, p. 1817-1819

Research output: Contribution to journalArticleAcademicpeer-review

25 Citations (Scopus)

OLED Encapsulation by Room Temperature Plasma-Assisted ALD Al2O3 Films

Keuning, W., Creatore, M., Langereis, E., Lifka, H., Weijer, van de, P. & Sanden, van de, M. C. M., 2009, Proceedings of the 56th international American Vacuum Society Symposium & Exhibition (AVS 56) 8-13 November 2009, San Jose, California. New York, NY: AVS, p. TF2-TuM11-64

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
115 Downloads (Pure)

On the Deposition Mechanism of the Silica Like Films in Atmospheric Pressure Glow Discharge

Starostin, S. A., Premkumar, P. A., Creatore, M., Vries, de, H., Paffen, R. M. J. & Sanden, van de, M. C. M., 2009, Proceedings of the 56th international American Vacuum Society Symposium & Exhibition (AVS 56) 8-13 November 2009, San Jose, California. New York, NY: AVS, p. PS2-TuM5-56

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
46 Downloads (Pure)

On the formation mechanisms of the diffuse atmospheric pressure dielectric barrier discharge in CVD processes of thin silica-like films

Starostin, S. A., Premkumar, P. A., Creatore, M., Veldhuizen, van, E. M., Vries, de, H., Paffen, R. M. J. & Sanden, van de, M. C. M., 2009, In : Plasma Sources Science and Technology. 18, 4, p. 045021-1/9

Research output: Contribution to journalArticleAcademicpeer-review

46 Citations (Scopus)
1 Downloads (Pure)

Optical Characterization of Plasma-Deposited SiO2-like Layers on Anisotropic Polymeric Substrates

Aresta, G., Premkumar, P. A., Starostin, S. A., Vries, de, H., Sanden, van de, M. C. M. & Creatore, M., 2009, Proceedings of the 56th international American Vacuum Society Symposium & Exhibition (AVS 56) 8-13 November 2009, San Jose, California. New York, NY: AVS, p. AS+EM+MS+TF-TuM1-43

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
65 Downloads (Pure)

Optimization of Precursor Injection in an Atmospheric Pressure Plasma Jet System

Peeters, F. J. J., Dams, R., Rego, R., Dubreuil, M., Vangeneugden, D. L., Creatore, M. & Sanden, van de, M. C. M., 2009, Proceedings of the 56th international American Vacuum Society Symposium & Exhibition (AVS 56) 8-13 November 2009, San Jose, California. New York, NY: AVS, p. PS-TuP10-107

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
57 Downloads (Pure)

Plasma enhanced chemical vapor deposition of ZnO : AI Iayers for thin film photovoltaics : control on the film growth

Creatore, M., Volintiru, I., Spee, C. I. M. A. & Sanden, van de, M. C. M., 2009, Proceedings of the 11th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2008), September 15-19, 2008, Garmisch-Partenkirchen, Germany (Abstracts). S.l.: s.n., p. 16-16

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

10 Downloads (Pure)
2008

A capacitive probe with shaped probe bias for ion flux measurements in depositing plasmas

Petcu, M. C., Bronneberg, A. C., Sarkar, A., Blauw, M. A., Creatore, M. & Sanden, van de, M. C. M., 2008, In : Review of Scientific Instruments. 79, 11, p. 115104-1/4

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
10 Citations (Scopus)
84 Downloads (Pure)

Advanced plasma diagnostics for thin-film deposition

Engeln, R. A. H., Sanden, van de, M. C. M., Kessels, W. M. M., Creatore, M. & Schram, D. C., 2008, Advanced plasma technology. Agostino, d', R., Favia, P. & Kawai, Y. (eds.). New York: Wiley-VCH Verlag, p. 117-136

Research output: Chapter in Book/Report/Conference proceedingChapterAcademic

A hard graphitelike hydrogenated amorphous carbon grown at high deposition rate (>15 nm/s)

Singh, S. V., Creatore, M., Groenen, R., van Hege, K. & Sanden, van de, M. C. M., 2008, In : Applied Physics Letters. 92, 22, p. 221502-1/3 221502.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
15 Citations (Scopus)
89 Downloads (Pure)

A hydrogenated amorphous carbon coating

Creatore, M., Groenen, R., Singh, S. V., Sanden, van de, M. C. M. & van Hege, K., 14 Aug 2008, Patent No. WO2008095920

Research output: PatentPatent publication

1 Downloads (Pure)

A novel approach for thin film polycristalline silicon on glass

Illiberi, A., Sharma, K., Branca, A., Creatore, M. & van de Sanden, R., 2008, Proceedings of ICTF14 & RSD2008 : Ghent, Belgium, 17-20 November 2008. De Gryse, R., Depla, D., Poelman, D., Mathieu, S., Leroy, W. P. & Poelman, H. (eds.). Ghent, p. 25-25

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Downloads (Pure)

A novel form of hard hydrogenated amorphous carbon grown under long gas residence time conditions

Sanden, van de, M. C. M., Singh, S. V., Zaharia, T., Creatore, M., Groenen, R. & van Hege, K., 2008, Proceedings of the 11th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2008), September 15-19, 2008, Garmisch-Partenkirchen, Germany (Abstracts). S.l.: s.n., p. 548-548

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Characterization of the porous structure of mesoporous thin films by ellipsometric porosimetry using the modified Deriaguin-Broekhoff-De Boer model

Rebrov, E. V., Creatore, M., Protasova, L. N., Muraza, O., Sanden, van de, M. C. M. & Schouten, J. C., 2008, Mesostructured Materials: Design and Opportunities : proceedings of the 6th Int. Mesostructured Materials Symposium (IMMS 2008), September 9-11 2008, Namur, Belgium. Belgium, Namur, p. P-054

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Film microstructure control and characterization of plasma-deposited Si02-like films by means of ellipsometric porosimetry

Aresta, G., Terlinden, N. M., Creatore, M. & Sanden, van de, M. C. M., 2008, Proceedings of the 11th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2008), September 15-19, 2008, Garmisch-Partenkirchen, Germany (Abstracts). S.l.: s.n., p. 479-479

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Film microstructure control and characterization of plasma-deposited SiO2-like films

Sanden, van de, M. C. M., Terlinden, N. M., Aresta, G. & Creatore, M., 2008, Proceedings of ICTF14 & RSD2008 : Ghent, Belgium, 17-20 November 2008. De Gryse, R., Depla, D., Poelman, D., Mathieu, S., Leroy, W. P. & Poelman, H. (eds.). p. 141-141

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Formation and evolution of the glow-like dielectric barrier discharge at atmospheric pressure

Starostin, S. A., ElSabbagh, M. A. M., Premkumar, P. A., Vries, de, H. W., Paffen, R. M. J., Creatore, M. & Sanden, van de, M. C. M., 2008, Proceedings of the 11th International Symposium on High Pressure, Low Temperature Plasma (Hakone XI) 7-12 September 2008, Oleron Island, France. p. 90-90

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Formation and expansion phases of an atmospheric pressure glow discharge in a PECVD reactor via fast ICCD imaging

Starostin, S. A., ElSabbagh, M. A. M., Aldea, E., Vries, de, H. W., Creatore, M. & Sanden, van de, M. C. M., 2008, In : IEEE Transactions on Plasma Science. 36, 4, p. 968-969 2 p.

Research output: Contribution to journalArticleAcademicpeer-review

15 Citations (Scopus)
2 Downloads (Pure)

High rate deposition of hard hydrogenated amorphous carbon for tribologic applications

Zaharia, T., Singh, S. V., Creatore, M., Groenen, R., van Hege, K. & Sanden, van de, M. C. M., 2008, Proceedings of ICTF14 & RSD2008 : Ghent, Belgium, 17-20 November 2008. De Gryse, R., Depla, D., Poelman, D., Mathieu, S., Leroy, W. P. & Poelman, H. (eds.). Ghent, p. 117-117

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Downloads (Pure)

Influence of impregnation on the properties of mesoporous thin films deposited on metal substrates

Muraza, O., Rebrov, E. V., Creatore, M., Croon, de, M. H. J. M. & Schouten, J. C., 2008, Proceedings of the IXth Netherlands Catalysis and Chemistry Conference (NCCC IX), 03-05 March 2009, Noordwijkerhout. p. 75-75

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

In situ spectroscopic ellipsometry growth studies on the Al-doped ZnO films deposited by remote plasma-enhanced metalorganic chemical vapor deposition

Volintiru, I., Creatore, M. & Sanden, van de, M. C. M., 2008, In : Journal of Applied Physics. 103, 3, p. 033704-1/10 033704.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
65 Citations (Scopus)
130 Downloads (Pure)