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Research Output 2001 2020

2016
6 Citations (Scopus)
2 Downloads (Pure)

The competing roles of i-ZnO in Cu(ln,Ga)Se¬2 solar cells

Williams, B. L., Zardetto, V., Kniknie, B. J., Verheijen, M. A., Kessels, W. M. M. & Creatore, M., 2016, In : Solar Energy Materials and Solar Cells. 157, December 2016, p. 798-807

Research output: Contribution to journalArticleAcademicpeer-review

Carrier concentration
Solar cells
Plasmas
Electric potential
Capacitance
2015
26 Citations (Scopus)
7 Downloads (Pure)

A comparative study of the effects of nontoxic chloride treatments on CdTe solar cell microstructure and stoichiometry

Williams, B. L., Major, J. D., Bowen, L., Keuning, W., Creatore, M. & Durose, K., 4 Nov 2015, In : Advanced Energy Materials. 5, 21, 10 p., 1500554.

Research output: Contribution to journalArticleAcademicpeer-review

17 Citations (Scopus)
2 Downloads (Pure)

Analysis of nanoporosity in moisture permeation barrier layers by electrochemical impedance spectroscopy

Perrotta, A., Garcia, S. J., Michels, J. J., Andringa, A. & Creatore, M., 2015, In : ACS Applied Materials & Interfaces. 7, 29, p. 15968-15977 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Electrochemical impedance spectroscopy
Permeation
Moisture
Water
Calcium
55 Downloads (Pure)

Corrigendum to "Expanding thermal plasma chemical vapour deposition of ZnO:Al layers for CIGS solar cells"

Sharma, K., Williams, B. L., Mittal, A., Knoops, H. C. M., Kniknie, B. J., Bakker, N. J., Kessels, W. M. M., Schropp, R. E. I. & Creatore, M., 2015, In : International Journal of Photoenergy. 2015, p. 1 321702.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
13 Citations (Scopus)
1 Downloads (Pure)

Ellipsometric porosimetry and electrochemical impedance spectroscopy characterization for moisture permeation barrier layers

Perrotta, A., Garcia, S. J. & Creatore, M., 2015, In : Plasma Processes and Polymers. 12, 9, p. 968-979

Research output: Contribution to journalArticleAcademicpeer-review

barrier layers
Electrochemical impedance spectroscopy
Permeation
moisture
Polymers
152 Citations (Scopus)
522 Downloads (Pure)

Flexible perovskite photovoltaic modules and cells rased on atomic layer deposited compact layers and UV-irradiated TiO2 scaffolds on plastic substrates

Di Giacomo, F., Zardetto, V., D'Epifanio, A., Pescetelli, S., Matteocci, F., Razza, S., Di Carlo, A., Licoccia, S., Kessels, W. M. M., Creatore, M. & Brown, T. M., 22 Apr 2015, In : Advanced Energy Materials. 5, 8, p. 1-9 1401808.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Scaffolds
Perovskite
Plastics
Atomic layer deposition
Substrates
31 Citations (Scopus)
316 Downloads (Pure)

Identifying parasitic current pathways in CIGS solar cells by modelling dark J-V response

Williams, B. L., Smit, S., Kniknie, B. J., Bakker, K., Keuning, W., Schropp, R. E. I., Creatore, M. & Kessels, W. M. M., Nov 2015, In : Progress in Photovoltaics: Research and Applications. 23, 11, p. 1516-1525 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Solar cells
solar cells
shunts
Diodes
cells
41 Citations (Scopus)
4 Downloads (Pure)

Low-temperature plasma-assisted atomic layer deposition of silicon nitride moisture permeation barrier layers

Andringa, A., Perrotta, A., de Peuter, K., Knoops, H. C. M., Kessels, W. M. M. & Creatore, M., 2015, In : ACS Applied Materials & Interfaces. 7, 40, p. 22525-22532

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)
709 Downloads (Pure)

Low temperature temporal and spatial atomic layer deposition of TiO2 films

Aghaee, M., Maydannik, P. S., Johansson, P., Kuusipalo, J., Creatore, M., Homola, T. & Cameron, D. C., 2015, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 33, p. 041512-1/10

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Atomic layer deposition
atomic layer epitaxy
Plasmas
Ozone
Temperature
19 Citations (Scopus)
78 Downloads (Pure)

Nitrogen-doping of bulk and nanotubular TiO2 photocatalysts by plasma-assisted atomic layer depositio

Zhang, Y., Creatore, M., Ma, Q., El-Boukili, A., Gao, L., Verheijen, M. A., Verhoeven, M. W. G. M. & Hensen, E. J. M., 2015, In : Applied Surface Science. 330, p. 476-486 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Photocatalysts
Nitrogen
Doping (additives)
Plasmas
Atomic layer deposition
3 Citations (Scopus)
195 Downloads (Pure)

Opportunities of atomic layer deposition for perovskite solar cells

Zardetto, V., Di Giacomo, F., Mohammed, M. A., Lucarelli, G., Razza, S., D’Epifanio, A., Licoccia, S., Kessels, W. M. M., Di Carlo, A., Brown, T. M. & Creatore, M., 2 Oct 2015, In : ECS Transactions. 69, 7, p. 15-22

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Atomic layer deposition
Titanium dioxide
Solar cells
Deposits
Lead
122 Downloads (Pure)

Optical modeling of plasma-deposited ZnO films : electron scattering at different length scales

Knoops, H. C. M., Loo, van de, B. W. H., Smit, S., Ponomarev, M., Weber, J. W., Sharma, K., Kessels, W. M. M. & Creatore, M., 2015, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 33, p. 021509-1/13

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Electron scattering
electron scattering
Scattering
Plasmas
scattering
2 Citations (Scopus)

Plasma enhanced-chemical vapor deposited polymers: plasma phase reactions, plasma-surface interactions, and film properties

Creatore, M. & Perrotta, A., 2015, CVD Polymers: Fabrication of Organic Surfaces and Devices. Gleason, K. K. (ed.). Weinheim: Wiley-VCH Verlag, p. 111-132

Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

Plasma polymerization
Beam plasma interactions
Polymers
Vapors
Plasma enhanced chemical vapor deposition
18 Citations (Scopus)
1 Downloads (Pure)

Solution processed bismuth sulfide nanowire array core/silver shuffle shell solar cells

Cao, Y., Bernechea, M., Maclachlan, A., Zardetto, V., Creatore, M., Haque, S. A. & Konstantatos, G., 26 May 2015, In : Chemistry of Materials. 27, 10, p. 3700-3706

Research output: Contribution to journalArticleAcademicpeer-review

Bismuth
Silver
Nanowires
Solar cells
Semiconductor materials
4 Citations (Scopus)
5 Downloads (Pure)

The impact of the nano-pore filling on the performance of organosilicon-based moisture barriers

Perrotta, A., Aresta, G., van Beekum, E. R. J., Palmans, J., Weijer, van de, P., Sanden, van de, M. C. M., Kessels, W. M. M. & Creatore, M., 30 Nov 2015, In : Thin Solid Films. 595, Part B, p. 251-257 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Permeation
moisture
Moisture
interlayers
porosity
34 Citations (Scopus)
2 Downloads (Pure)

Toward roll-to-roll deposition of high quality moisture barrier films on polymers by atomospheric pressure plasma assisted process

Starostin, S. A., Creatore, M., Bouwstra, J. B., Sanden, van de, M. C. M. & Vries, de, H. W., Jun 2015, In : Plasma Processes and Polymers. 12, 6, p. 545-554

Research output: Contribution to journalArticleAcademicpeer-review

plasma pressure
Permeation
moisture
Silicon Dioxide
Atmospheric pressure
4 Citations (Scopus)

uPlasma printing deposition of amine-containing organo-silane polymers by means of 3-aminopropyl trimethoxysilane

Schalken, J. R. G., Creatore, M., Verhoeven, P. & Stevens, A., 2015, In : Nanoscience and Nanotechnology Letters. 7, 1, p. 62-66 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Silanes
Fluorocarbon Polymers
Amines
Printing
Polymers
2014
129 Citations (Scopus)
36 Downloads (Pure)

ALD4PV Workshop Eindhoven

Garcia-Alonso Garcia, D., Creatore, M. & Kessels, W. M. M., 2014, In : Nevac Blad. 52, 1, p. 12-14 3 p.

Research output: Contribution to journalArticleProfessional

Open Access
File
21 Citations (Scopus)
9 Downloads (Pure)

Atomic layer deposition of highly transparent platinum counter electrodes for metal/polymer flexible dye-sensitized solar cells

Garcia - Alonso, D., Zardetto, V., Mackus, A. J. M., Rossi, De, F., Verheijen, M. A., Brown, T. M., Kessels, W. M. M. & Creatore, M., 2014, In : Advanced Energy Materials. 4, 4, p. 1300831-1/8 8 p., 1300831.

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition
Platinum
Polymers
Metals
Electrodes
469 Downloads (Pure)

Dye-sensitized and perovskite solar cells : interface engineering by atomic layer deposition

Zardetto, V., Di Giacomo, F., Brown, T. M., Di Carlo, A., D’Epifanio, A., Licoccia, S., Kessels, W. M. M. & Creatore, M., 2014, In : Material Matters. 9, 4, p. 103-106

Research output: Contribution to journalArticlePopular

Open Access
File
6 Citations (Scopus)
80 Downloads (Pure)

Expanding thermal plasma chemical vapour deposition of ZnO:Al layers for CIGS solar cells

Sharma, K., Williams, B. L., Mittal, A., Knoops, H. C. M., Kniknie, B. J., Bakker, N. J., Kessels, W. M. M., Schropp, R. E. I. & Creatore, M., 2014, In : International Journal of Photoenergy. 2014, p. 253140-1/9 9 p., 253140.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Plasma Gases
thermal plasmas
budgets
Chemical vapor deposition
Solar cells
49 Citations (Scopus)

Hybrid organosilica membranes and processes : status and outlook

Agirre, I., Arias, P. L., Castricum, H. L., Creatore, M., Elshof, ten, J. E., Paradis, G. G., Tchoua Ngamou, P. H., Veen, van, H. M. & Vente, J. F., 2014, In : Separation and Purification Technology. 121, p. 2-12 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Membranes
Silicon Dioxide
Silica
Plasma Gases
Ceramic membranes
2 Citations (Scopus)

Identifying parasitic current pathways in CIGS solar cells by modelling dark JV response

Williams, B. L., Smit, S., Kniknie, B. J., Bakkers, N. J., Kessels, W. M. M., Schropp, R. E. I. & Creatore, M., 15 Oct 2014, 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014. Piscataway: Institute of Electrical and Electronics Engineers, p. 1729-1734 6 p. 6925255

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Solar cells
Degradation
Temperature
18 Citations (Scopus)
1 Downloads (Pure)

On the intrinsic moisture permeation rate of remote microwave plasma-deposited silicon nitride layers

Assche, van, F. J. H., Unnikrishnan, S., Michels, J. J., Mol, van, A. M. B., Weijer, van de, P., Sanden, van de, M. C. M. & Creatore, M., 2014, In : Thin Solid Films. 558, p. 54-61 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Silicon nitride
silicon nitrides
Permeation
moisture
Moisture
31 Citations (Scopus)
6 Downloads (Pure)

On the role of nanoporosity in controlling the performance of moisture permeation barrier layers

Perrotta, A., van Beekum, E. R. J., Aresta, G., Jagia, A., Keuning, W., Sanden, van de, M. C. M., Kessels, W. M. M. & Creatore, M., 2014, In : Microporous and Mesoporous Materials. 188, p. 163-171 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Steam
barrier layers
Permeation
moisture
Water vapor
7 Citations (Scopus)
4 Downloads (Pure)

Plasma-surface interaction during low pressure microcrystalline silicon thin film growth

Palmans, J., Kessels, W. M. M. & Creatore, M., 2014, In : Journal of Physics D: Applied Physics. 47, p. 224003-1/11 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Microcrystalline silicon
Beam plasma interactions
Film growth
surface reactions
low pressure
4 Citations (Scopus)
105 Downloads (Pure)

Study of the effect of boron doping on the solid phase crystallisation of hydrogenated amorphous silicon films

Westra, J. M., Swaaij, van, R. A. C. M. M., Sutta, P., Sharma, K., Creatore, M. & Zeman, M., 2014, In : Thin Solid Films. 568, p. 38-43

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Boron
Crystallization
silicon films
Amorphous silicon
amorphous silicon
2013
2 Downloads (Pure)

Atomic layer deposition of nanomaterials for Li-ion batteries, fuel cells, and solar cells

Kessels, W. M. M., Knoops, H. C. M., Weber, M. J., Mackus, A. J. M. & Creatore, M., 2013, In : Material Matters. 8, 4, p. 117-117 1 p.

Research output: Contribution to journalArticlePopular

101 Downloads (Pure)

Depositie van polykristallijn silicium voor dunne-film zonnecellen

Macco, B., Sharma, K., Kessels, W. M. M. & Creatore, M., 2013, In : Nevac Blad. 51, 1, p. 6-11

Research output: Contribution to journalArticleProfessional

Open Access
File
80 Downloads (Pure)

De relatie tussen de elektrische en optische eigenschappen van plasma-gedeponeerd zinkoxide

Loo, van de, B. W. H., Knoops, H. C. M., Ponomarev, M., Kessels, W. M. M. & Creatore, M., 2013, In : Nevac Blad. 51, 2, p. 14-18 5 p.

Research output: Contribution to journalArticleProfessional

Open Access
File
16 Citations (Scopus)
98 Downloads (Pure)

Direct ion flux measurements at high-pressure-depletion conditions for microcrystalline silicon deposition

Bronneberg, A. C., Kang, X., Palmans, J., Janssen, P. H. J., Lorne, T., Creatore, M. & Sanden, van de, M. C. M., 2013, In : Journal of Applied Physics. 114, 6, p. 063305-1/6 063305.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
depletion
silicon
ions
collisional plasmas
thin films
49 Citations (Scopus)
1 Downloads (Pure)

Fully plastic dye solar cell devices by low-temperature UV-irradiation of both the mesoporous TiO2 photo- and platinized counter-electrode

Zardetto, V., Giacomo, Di, F., Garcia-Alonso Garcia, D., Keuning, W., Creatore, M., Mazzucca, C., Reale, A., Carlo, Di, A. & Brown, T. M., 2013, In : Advanced Energy Materials. 3, 10, p. 1292-1298 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Solar cells
Coloring Agents
Dyes
Irradiation
Plastics
13 Citations (Scopus)

Morphological description of ultra smooth organo-silicon layers synthesized using atmospheric pressure dielectric barrier discharge assisted PECVD

Premkumar, P. A., Starostin, S. A., Vries, de, H., Creatore, M., Koenraad, P. M. & Sanden, van de, M. C. M., 2013, In : Plasma Processes and Polymers. 10, 4, p. 313-319 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Silicon
Plasma enhanced chemical vapor deposition
Atmospheric pressure
atmospheric pressure
silicon
2 Citations (Scopus)
35 Downloads (Pure)

On the effect of the underlying ZnO : Al layer on the crystallization kinetics of hydrognated amorphous silicon

Sharma, K., Ponomarev, M., Sanden, van de, M. C. M. & Creatore, M., 2013, In : Applied Physics Letters. 102, 21, p. 212107-1/4 4 p., 212107.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
amorphous silicon
crystallization
kinetics
zinc oxides
roughness
9 Citations (Scopus)
2 Downloads (Pure)

On the enhancement of pervaporation properties of plasma-deposited hybrid silica membranes

Tchoua Ngamou, P. H., Overbeek, J. P., Veen, van, H. M., Vente, J. F., Cuperus, P. F. & Creatore, M., 2013, In : RSC Advances. 3, 34, p. 14241-14244 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Plasma deposition
Pervaporation
Dehydration
Silicon Dioxide
Silica
53 Citations (Scopus)
305 Downloads (Pure)

Plasma-deposited hybrid silica membranes with a controlled retention of organic bridges

Tchoua Ngamou, P. H., Overbeek, J. P., Kreiter, R., Veen, van, H. M., Vente, J. F., Wienk, I. M., Cuperus, P. F. & Creatore, M., 2013, In : Journal of Materials Chemistry A. 1, 18, p. 5567-5576 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Silicon Dioxide
Silica
Membranes
Plasmas
Plasma Gases
27 Downloads (Pure)

Supported polysilsesquioxane membrane and production thereof

Kreiter, R., Creatore, M., Cuperus, F. P., Vente, J. F. & Tchoua Ngamou, P. H., 10 May 2013, Patent No. WO2013066184 A1, Priority date 28 Apr 1956, Priority No. NL2011200770520111102

Research output: PatentPatent publication

Open Access
File
Silanes
Silicon
Membranes
Silicon Dioxide
Atoms
2012
37 Citations (Scopus)
151 Downloads (Pure)

Cathode encapsulation of organic light emitting diodes by atomic layer deposited Al2O3 films and Al2O3/a-SiNx: H stacks

Keuning, W., Weijer, van de, P., Lifka, H., Kessels, W. M. M. & Creatore, M., 2012, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 30, 1, p. 01A131-1/6 6 p., 01A131.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Organic light emitting diodes (OLED)
Encapsulation
Cathodes
light emitting diodes
cathodes
7 Citations (Scopus)
87 Downloads (Pure)

Controlling the resistivity gradient in aluminum-doped zinc oxide grown by plasma-enhanced chemical vapor deposition

Ponomarev, M., Verheijen, M. A., Keuning, W., Sanden, van de, M. C. M. & Creatore, M., 2012, In : Journal of Applied Physics. 112, 4, p. 043708-1/7 7 p., 043708.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
zinc oxides
vapor deposition
aluminum
gradients
electrical resistivity

Erratum: Controlling the resistivity gradient in aluminum-doped zinc oxide grown by plasma-enhanced chemical vapor deposition (J. Appl. Phys. (112) 043708 (2012))

Ponomarev, M. V., Verheijen, M. A., Keuning, W., van de Sanden, M. C. M. & Creatore, M., 15 Sep 2012, In : Journal of Applied Physics. 112, 6, 8 p., 069902.

Research output: Contribution to journalComment/Letter to the editorAcademicpeer-review

Open Access
zinc oxides
vapor deposition
aluminum
gradients
electrical resistivity
21 Citations (Scopus)
1 Downloads (Pure)

Evidence of the filling of nano-porosity in SiO2-like layers by an initiated-CVD monomer

Aresta, G., Palmans, J., Sanden, van de, M. C. M. & Creatore, M., 2012, In : Microporous and Mesoporous Materials. 151, p. 434-439

Research output: Contribution to journalArticleAcademicpeer-review

Chemical vapor deposition
monomers
Porosity
Monomers
vapor deposition
8 Citations (Scopus)
76 Downloads (Pure)

Improved conductivity of aluminum-doped ZnO : the effect of hydrogen diffusion from a hydrogenated amorphous silicon capping layer

Ponomarev, M., Sharma, K., Verheijen, M. A., Sanden, van de, M. C. M. & Creatore, M., 2012, In : Journal of Applied Physics. 111, 6, p. 063715-1/7 7 p., 063715.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
amorphous silicon
film thickness
grain boundaries
aluminum
conductivity
15 Citations (Scopus)
91 Downloads (Pure)

Initiated-chemical vapor deposition of organosilicon layers: Monomer adsorption bulk growth and process window definition

Aresta, G., Palmans, J., Sanden, van de, M. C. M. & Creatore, M., 2012, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 30, 4, p. 041503-1/11 11 p., 041503.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Spectroscopic ellipsometry
Chemical vapor deposition
monomers
Monomers
vapor deposition
10 Citations (Scopus)
80 Downloads (Pure)

In situ crystallization kinetics studies of plasma-deposited, hydrogenated amorphous silicon layers

Sharma, K., Verheijen, M. A., Sanden, van de, M. C. M. & Creatore, M., 2012, In : Journal of Applied Physics. 111, 3, p. 033508-1/6 6 p., 033508.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
amorphous silicon
crystallization
kinetics
microstructure
voids
5 Citations (Scopus)
77 Downloads (Pure)

Ion-induced effects on grain boundaries and a-Si:H tissue quality in microcrystalline silicon films

Bronneberg, A. C., Canköy, N., Sanden, van de, M. C. M. & Creatore, M., 2012, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 30, 6, p. 061512-1/10 061512.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Microcrystalline silicon
silicon films
Ion bombardment
Grain boundaries
grain boundaries
5 Citations (Scopus)
1 Downloads (Pure)

Kinetic study of solid phase crystallization of expanding thermal plasma deposited a-Si:H

Law, F., Hoex, B., Wang, J., Luther, J., Sharma, K., Creatore, M. & Sanden, van de, M. C. M., 2012, In : Thin Solid Films. 520, 17, p. 5820-5825 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Plasma Gases
thermal plasmas
Crystallization
solid phases
crystallization
28 Citations (Scopus)
3 Downloads (Pure)

Real time in situ spectroscopic ellipsometry of the growth and plasmonic properties of AU nanoparticles on SiO2

Beyene, H. T., Weber, J. W., Verheijen, M. A., Sanden, van de, M. C. M. & Creatore, M., 2012, In : Nano Research. 5, 8, p. 513-520 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Spectroscopic ellipsometry
Nanoparticles
Optical constants
Rutherford backscattering spectroscopy
Parameterization
9 Citations (Scopus)

Remote plasma deposition of microcrystalline silicon thin films : film structure and the role of atomic hydrogen

Bronneberg, A. C., Sanden, van de, M. C. M. & Creatore, M., 2012, In : Journal of Non-Crystalline Solids. 358, 2, p. 379-386 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Microcrystalline silicon
Plasma deposition
Hydrogen
silicon films
amorphous silicon
8 Citations (Scopus)
80 Downloads (Pure)

Solid-phase crystallization of ultra high growth rate amorphous silicon films

Sharma, K., Ponomarev, M., Verheijen, M. A., Kunz, O., Sanden, van de, M. C. M. & Creatore, M., 2012, In : Journal of Applied Physics. 111, 10, p. 103510-1/5 103510.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
silicon films
amorphous silicon
solid phases
crystallization
thermal plasmas
14 Citations (Scopus)
10 Downloads (Pure)

Surface dynamics of SiO2-like films on polymers grown by DBD assisted CVD at atmospheric pressure

Premkumar, P. A., Starostin, S. A., Vries, de, H., Creatore, M., Koenraad, P. M., MacDonald, W. A. & Sanden, van de, M. C. M., 2012, In : Plasma Processes and Polymers. 9, 11-12, p. 1194-1207 14 p.

Research output: Contribution to journalArticleAcademicpeer-review

Atmospheric pressure
Chemical vapor deposition
atmospheric pressure
Polymers
vapor deposition