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Research Output 2001 2020

2001
21 Citations (Scopus)

NH3 plasma treatment of PET for enhancing aluminium adhesion

Creatore, M., Favia, P., Tenuto, G., Valentini, A. & Agostino, d', R., 2001, In : Plasmas and Polymers. 5, 3-4, p. 201-218

Research output: Contribution to journalArticleAcademicpeer-review

Aluminum
Adhesion
Plasmas
Polymers
Metals
2002
60 Citations (Scopus)
1 Downloads (Pure)

Deposition of SiOx : films from hexamehtyldisiloxane/oxygen radiofrequency glow discharges: process optimization by plasma diagnostics

Creatore, M., Palumbo, F. & Agostino, d', R., 2002, In : Plasmas and Polymers. 7, 3, p. 291-310

Research output: Contribution to journalArticleAcademicpeer-review

plasma diagnostics
glow discharges
optimization
oxygen
food
40 Citations (Scopus)

Diagnostics and insights on PECVD for gas-barrier coatings

Creatore, M., Palumbo, F. & Agostino, d', R., 2002, In : Pure and Applied Chemistry. 74, 3, p. 407-411

Research output: Contribution to journalArticleAcademicpeer-review

Plasma enhanced chemical vapor deposition
Gases
Plasmas
Coatings
Infrared absorption
7 Citations (Scopus)

Expanding thermal plasma deposition of silicon dioxide-like films for microelectronic devices

Creatore, M., van Hest, M. F. A. M., Benedikt, J. & van de Sanden, M. C. M., 2002, Amorphous and heterogeneous silicon-based films, 2002 : symposium held [at the 2002 MRS spring meeting] April 2 - 5, 2002, San Francisco, California, U.S.A. p. 101-107 A19.3. (Materials Research Society Symposium Proceedings; vol. 715).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

thermal plasmas
microelectronics
silicon dioxide
chemical properties
spectral resolution
2003
20 Citations (Scopus)

Ellipsometric characterization of expanding thermal plasma deposited SiO2-like films

Creatore, M., Kilic, M., O'Brien, K., Groenen, R. & Sanden, van de, M. C. M., 2003, In : Thin Solid Films. 427, 1-2, p. 137-141

Research output: Contribution to journalArticleAcademicpeer-review

Plasma Gases
thermal plasmas
Plasmas
ellipsometry
Plasma deposition
1 Citation (Scopus)

Expanding thermal plasma for low-k dielectrics deposition

Creatore, M., Barrell, Y., Kessels, W. M. M. & van de Sanden, M. C. M., 1 Dec 2003, Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics - 2003. Warrendale: Materials Research Society, p. 339-344 6 p. (Materials Research Society Symposium - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Plasma Gases
Plasmas
Argon
Silicon Dioxide
Electric properties
5 Citations (Scopus)

Remote nitridation of silicon surface by Ar/N2-fed expanding thermal plasma

Dinescu, G., Creatore, M. & Sanden, van de, M. C. M., 2003, In : Surface and Coatings Technology. 174-175, p. 370-374

Research output: Contribution to journalArticleAcademicpeer-review

Plasma Gases
Nitridation
thermal plasmas
Silicon
oxynitrides
2004
24 Citations (Scopus)

Expanding thermal plasma for fast deposition of scratch-resistant SiC/sub x/H/sub y/O/sub z/ films

Barrell, Y., Creatore, M., Schaepkens, M., Iacovangelo, C. D., Miebach, T. & Sanden, van de, M. C. M., 2004, In : Surface and Coatings Technology. 180-181, p. 367-371

Research output: Contribution to journalArticleAcademicpeer-review

Plasma Gases
thermal plasmas
Plasmas
polycarbonate
Mechanical properties
21 Citations (Scopus)
Plasma Gases
thermal plasmas
engineering
dissociation
chemistry
2 Downloads (Pure)

High rate plasma deposition of thin films for solar cell applications

Sanden, van der, M. C. M., Volintiru, I., Creatore, M., Linden, J. L., Hoex, B., Oever, van den, P. J., Bosch, R. C. M., Erven, van, R., Bijker, M. D., Evers, M. & Kessels, W. M. M., 2004, International symposium on inorganic and environmental materials 2004 : October 18-21, 2004, Eindhoven, The Netherlands : abstracts. p. 111-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Industrial implementation of plasma deposition using the expanding thermal plasma technique

Sanden, van de, M. C. M., Oever, van den, P. J., Creatore, M., Schaepkens, M., Miebach, T., Iacovangelo, C. D., Bosch, R. C. M., Bijker, M. D., Evers, M. F. J., Schram, D. C. & Kessels, W. M. M., 2004, 47th annual technical conference proceedings / Society of Vacuum Coaters : April 24 - 29, 2004, Dallas, Texas, USA. Albuquerque, NM: Society of Vacuum Coaters, p. 447-454

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

thermal plasmas
silicones
polycarbonates
silicon nitrides
passivity
2005

Coatings, and methods and devices for the manufacture thereof

Alcott, G. R., Linden, J. L., Creatore, M. & Sanden, van de, M. C. M., 19 Oct 2005, Patent No. EP1586674

Research output: PatentPatent publication

coatings
inventions
vapor phases
nanoparticles
21 Citations (Scopus)
3 Downloads (Pure)

Dry etching of surface textured zinc oxide using a remote argon-hydrogen plasma

Groenen, R., Creatore, M. & Sanden, van de, M. C. M., 2005, In : Applied Surface Science. 241, 3-4, p. 321-325

Research output: Contribution to journalArticleAcademicpeer-review

Zinc Oxide
Dry etching
Argon
argon plasma
hydrogen plasma
79 Downloads (Pure)

Expanding thermal plasma CVD : experimental studies of the plasma-surface interaction

Sanden, van de, M. C. M., Creatore, M., Blauw, M. A., Hoefnagels, J. P. M., Hoex, B., Oever, van den, P. J., Smets, A. H. M., Schram, D. C. & Kessels, W. M. M., 2005, EUROCVD-15 : Fifteenth European Conference on Chemical Vapor Deposition; proceedings of the international symposium; [held from 5th to 9th September 2005 in Bochum, Germany]. Devi, A. (ed.). Pennington: Electrochemical Society, p. 36-48 (Proceedings - Electrochemical Society; vol. 2005-09).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
thermal plasmas
surface reactions
vapor deposition
amorphous silicon
gas flow
29 Citations (Scopus)

Optical and chemical characterization of expanding thermal plasma deposited silicon dioxide-like films

Creatore, M., Cigal, J. C., Kroesen, G. M. W. & Sanden, van de, M. C. M., 2005, In : Thin Solid Films. 484, 1-2, p. 104-112

Research output: Contribution to journalArticleAcademicpeer-review

Plasma Gases
thermal plasmas
Silicon Dioxide
Silica
silicon dioxide

Permeation barrier coatings for flexible electronics and polymer/inorganic layer interphase development in an expanding thermal plasma

Creatore, M., Lohmann, V. I. T. A., Klaasse Bos, C. G., Hamelinck, A. C. M., Koetse, M. M., Schoo, H. F. M. & Sanden, van de, M. C. M., 2005, Proceedings of the 27th International Conference on Phenomena in Ionised Gases (XXVII ICPIG 2005) 18-22 July 2005, Eindhoven, the Netherlands. Veldhuizen, van, E. M. (ed.). p. 10.405/1-1/4

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Permeation barrier coatings for flexible electronics and polymer/inorganic layer interphase development in an expanding thermal plasma

Creatore, M., Lohmann, V. I. T. A., Klaasse Bos, C. G., Hamelinck, A. C. M., Koetse, M. M., Schoo, H. F. M. & Sanden, van de, M. C. M., 2005, Proceedings 48th Annual Technical Conference - Society of Vacuum Coaters, 23-28 April 2005, Denver, Colorado, USA. Albuquerque: Society of Vacuum Coaters, p. 163-168

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Downloads (Pure)

Real-time growth studies on the expanding thermal plasma deposited ZnO films by means of in situ spectroscopic ellipsometry

Volintiru, I., Creatore, M., Linden, J. L. & Sanden, van de, M. C. M., 2005, Proceedings 48th Annual Technical Conference - Society of Vacuum Coaters, 23-28 April 2005, Denver, Colorado, USA. Albuquerque: Society of Vacuum Coaters, p. 534-539

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

36 Citations (Scopus)
122 Downloads (Pure)

Threshold ionization mass spectrometry of reactive species in remote Ar/C2H2 expanding thermal plasma

Benedikt, J., Agarwal, S., Eijkman, D. J., Vandamme, W. N. J., Creatore, M. & Sanden, van de, M. C. M., 2005, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 23, 5, p. 1400-1412

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Plasma Gases
thermal plasmas
Hydrocarbons
Ionization
Mass spectrometry
2006

Atmospheric pressure barrier discharge deposition of silica-like films on polymeric substrates

Starostine, S., Vries, de, H. W., Aldea, E., Sanden, van de, M. C. M. & Creatore, M., 2006, 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts). p. 97-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Atmospheric pressure deposition of thin films on polymers by APG discharge

Starostin, S. A., Vries, de, H. W., Aldea, E., Creatore, M. & Sanden, van de, M. C. M., 2006, p. B 17-.

Research output: Contribution to conferencePosterAcademic

atmospheric pressure
polymers
thin films
10 Citations (Scopus)

Expanding thermal plasma-deposited ZnO films : substrate temperature influence on films properties : film growth studies

Volintiru, I., Creatore, M., Linden, J. L. & Sanden, van de, M. C. M., 2006, In : Superlattices and Microstructures. 39, 1-4, p. 348-357

Research output: Contribution to journalArticleAcademicpeer-review

Plasma Gases
thermal plasmas
Film growth
Plasmas
Surface roughness
4 Citations (Scopus)

Good surface passivation of C-Si by high rate plasma deposited silicon oxide

Hoex, B., Peeters, F. J. J., Creatore, M., Bijker, M. D., Kessels, W. M. M. & Sanden, van de, M. C. M., 2006, Conference record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion. Waikoloa, HI, USA. IEEE Electron Devices Soc. 7-12 May 2006. Piscataway, NJ, USA: Institute of Electrical and Electronics Engineers, p. 1134-1137

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

silicon oxides
passivity
silicon dioxide
thermal plasmas
ellipsometry
39 Citations (Scopus)
304 Downloads (Pure)

High-rate plasma-deposited SiO2 films for surface passivation of crystalline silicon

Hoex, B., Peeters, F. J. J., Creatore, M., Blauw, M. A., Kessels, W. M. M. & Sanden, van de, M. C. M., 2006, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 24, 5, p. 1823-1830

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Silicon
Passivation
passivity
Crystalline materials
Plasmas
2 Downloads (Pure)
moisture
bombardment
ions
3 Downloads (Pure)

Influence of the ion bombardment on the growth of plasma-deposited Si02-like films on polymers

Milella, A., Creatore, M., Blauw, M. A. & Sanden, van de, M. C. M., 2006, Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts). S.l.: s.n., p. 197-197

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Low-temperature aluminium oxide deposition using the extending thermal plasma technique : film properties and applications

Volintiru, I., Hemmen, van, J. L., Creatore, M. & van de Sanden, M. C. M., 2006, p. B 22-.

Research output: Contribution to conferencePosterAcademic

thermal plasmas
aluminum oxides
10 Citations (Scopus)
81 Downloads (Pure)

Nitrogen incorporation during metal organic chemical vapor deposition of ZnO films using a remote Ar/N2 plasma

Volintiru, I., Creatore, M., van Helvoort, W. H., Linden, J. L. & Sanden, van de, M. C. M., 2006, In : Applied Physics Letters. 89, 2, p. 022110-1/3 022110.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
metalorganic chemical vapor deposition
thermal plasmas
nitrogen
nitrogen plasma
nitriles
24 Citations (Scopus)

On the hexamethyldisiloxane dissociation paths in a remote Ar-fed expanding thermal plasma

Creatore, M., Barrell, Y., Benedikt, J. & Sanden, van de, M. C. M., 2006, In : Plasma Sources Science and Technology. 15, 3, p. 421-431

Research output: Contribution to journalArticleAcademicpeer-review

thermal plasmas
charge exchange
dissociation
recombination reactions
argon

On the morphology and conductivity control of the expanding thermal plasma-deposited ZnO films

Volintiru, I., Creatore, M., Spee, C. I. M. A. & Sanden, van de, M. C. M., 2006, Proceedings of the 1st International Symposium on Transparent Conductive Oxides, 23-25 October 2006, Heraklion, Crete, Greece.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

atomic layer epitaxy
moisture
polymers
218 Citations (Scopus)
426 Downloads (Pure)

Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers

Langereis, E., Creatore, M., Heil, S. B. S., Sanden, van de, M. C. M. & Kessels, W. M. M., 2006, In : Applied Physics Letters. 89, 8, p. 081915-1/3 3 p., 081915.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
atomic layer epitaxy
moisture
water vapor
polymers
purging
3 Downloads (Pure)

Plasma-assisted atomic layer deposition of Al-2O3 on polymers

Langereis, E., Heil, S. B. S., Creatore, M., Sanden, van de, M. C. M. & Kessels, W. M. M., 2006, Proceedings 49th Annual Technical Conference of Vacuum Coaters, Washington DC, USA. p. 151-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

atomic layer epitaxy
moisture
polymers
composite materials
temperature

Plasma-assisted growth of moisture diffusion barrier films on polymers : from chemical vapour deposition to atomic layer deposition

Creatore, M., Langereis, E., Heil, S. B. S., Sanden, van de, M. C. M. & Kessels, W. M. M., 2006, Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts). S.l.: s.n., p. 37-37

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Plasma-polymer interaction leading to interphase formation during SiO2-like film deposition

Creatore, M., Lohmann, V. I. T. A. & Sanden, van de, M. C. M., 2006, p. B 11-.

Research output: Contribution to conferencePosterAcademic

1 Downloads (Pure)

Remote plasma deposition of inorganic films : the influence of plasma chemistry and ion bombardment on film growth and moisture permeation barrier performances

Creatore, M., Blauw, M. A., Hemmen, van, J. L., Volintiru, I., Koetse, M. M., Lohmann, V. I. T. A., Sanden, van de, M. C. M., Milella, A. & Schoo, H. F. M., 2006, Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts). S.l.: s.n., p. 277-277

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)

SiOx structural modifications by ion bombardment and their influence on electrical properties

Milella, A., Creatore, M., Sanden, van de, M. C. M. & Tomozeiu, N., 2006, In : Journal of Optoelectronics and Advanced Materials. 8, 6, p. 2003-2010

Research output: Contribution to journalArticleAcademicpeer-review

Ion bombardment
bombardment
Electric properties
electrical properties
Silicon
2007
97 Downloads (Pure)

Application of atmospheric pressure glow discharge (APGD) for deposition of thin silica like films on polymeric webs

Starostin, S. A., Aldea, E., Vries, de, H. W., Creatore, M. & Sanden, van de, M. C. M., 2007, Proceedings of the 28th International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic. Gordillo-Vazquez, F. J., Pick, R. M., Helfenstein, P., Schmidt, J., Simek, M., Pekarek, S. & Prukner, V. (eds.). Bristol, United Kingdom: Institute of Physics, p. 2P13-35-749/752

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
glow discharges
atmospheric pressure
silicon dioxide
air
gas mixtures
42 Citations (Scopus)
1 Downloads (Pure)

Atmospheric pressure barrier discharge deposition of silica-like films on polymeric substrates

Starostin, S. A., Aldea, E., Vries, de, H. W., Creatore, M. & Sanden, van de, M. C. M., 2007, In : Plasma Processes and Polymers. 4, S1, p. S440-S444 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Silicon Dioxide
Atmospheric pressure
atmospheric pressure
Silica
silicon dioxide

Characterization of mesoporous oxide coatings by ellipsometric porosimetry with an improved condensation model

Muraza, O., Rebrov, E. V., Creatore, M., Croon, de, M. H. J. M., Sanden, van de, M. C. M. & Schouten, J. C., 2007, Netherlands Process Technology Symposium. Netherlands, Veldhoven, p. pp.-1

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

104 Citations (Scopus)
184 Downloads (Pure)

Evolution of the electrical and structural properties during the growth of Al doped ZnO films by remote plasma-enhanced metalorganic chemical vapor deposition

Volintiru, I., Creatore, M., Kniknie, B. J., Spee, C. I. M. A. & Sanden, van de, M. C. M., 2007, In : Journal of Applied Physics. 102, 4, p. 043709-1/9 9 p., 043709.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
zinc oxides
metalorganic chemical vapor deposition
oxide films
electrical properties
film thickness
2 Downloads (Pure)

Ion energy and ion flux control during deposition of thin oxide films

Sanden, van de, M. C. M., Milella, A., Blauw, M. A., Rumphorst, R. F. & Creatore, M., 2007, Proceedings of the 50th Society of Vacuum Coaters Conference (SVC) and 50th Annual Technical Conference, 30 April 2007 Lousiville, Kentucky, USA. Albuquerque, NM, U.S.A.: Society of Vacuum Coaters

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

oxide films
ions
energy
thermal plasmas
plasma chemistry

Ion flux measurements in an Ar/NH3/SiH4-remote plasma using a pulse shaped double-side capacitive probe

Petcu, M. C., Bronneberg, A. C., Creatore, M. & Sanden, van de, M. C. M., 2007, 14th international Conference on Plasma Physics and Applications, September 14-18, 2007, Brasov, Romania. Mitu, B. & Dinescu, G. (eds.). p. 39-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Materials processing with the expanding thermal plasma technique using controlled ion flux and energy

Sanden, van de, M. C. M., Blauw, M. A., Rumphorst, R. F., Creatore, M. & Kessels, W. M. M., 2007, 16th International Colloquium on Plasma Processing (CIP 2007), 4-8 June, 2007, Toulouse, France. p. 44-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Method and apparatus for atomic layer deposition using an atmospheric pressure glow discharge plasma

Vries, de, H. W., Sanden, van de, M. C. M., Creatore, M. & Kessels, W. M. M., 21 Dec 2007, Patent No. WO/2007/145513-A1

Research output: PatentPatent publication

atomic layer epitaxy
glow discharges
gas mixtures
atmospheric pressure
molecules

Method and apparatus for atomic layer desposition using an atmospheric pressure glow discharge plasma

Vries, de, H. W., Sanden, van de, M. C. M., Creatore, M. & Kessels, W. M. M., 21 Dec 2007, Patent No. WO2007145513

Research output: PatentPatent publication

glow discharges
gas mixtures
atmospheric pressure
molecules
plasma generators

Method and apparatus for deposition using pulsed atomspheric pressure glow discharge

Vries, de, H. W., Aldea, E., Starostine, S., Creatore, M. & Sanden, van de, M. C. M., 6 Dec 2007, Patent No. WO2007139379

Research output: PatentPatent publication

gas composition
glow discharges
chemical compounds
chemical elements
power supplies

On the film microstructure control by means of PE-CVD and PA-ALD

Creatore, M., Langereis, E., Terlinden, N. M., Hemmen, van, J. L., Kessels, W. M. M. & Sanden, van de, M. C. M., 2007, Proceedings of the 50th Society of Vacuum Coaters Conference (SVC) and 50th Annual Technical Conference, 28 April - 3 May 2007, Louisville, Kentucky, USA. Albuquerque, NM, U.S.A.: Society of Vacuum Coaters

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

atomic layer epitaxy
vapor deposition
microstructure
desorption
bombardment
59 Downloads (Pure)

On the film microstructure control by means of PE-CVD and PA-ALD

Creatore, M., Langereis, E., Terlinden, N. M., Hemmen, van, J. L., Kessels, W. M. M. & Sanden, van de, M. C. M., 2007, Proceedings of the 18th international symposium on plasma chemistry (ISPC 18) 26-31 August 2007, Kyoto, Japan. Tachibana, K., Takai, O., Ono, K. & Shirafuji, T. (eds.). Kyoto, Japan: Kyoto University, p. 27A-P3-1/4

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
atomic layer epitaxy
vapor deposition
microstructure
desorption
bombardment