• 1399 Citations
20022020
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Research Output 2002 2020

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Poster
2019
36 Downloads (Pure)

Application of optical proximity correction for 193 nm deep UV enabled InP photonic integrated circuits

Bolk, J., Ambrosius, H., Latkowski, S., Unal, N., Ritter, D. & Williams, K., 25 Apr 2019, p. 1-3. 3 p.

Research output: Contribution to conferencePosterAcademic

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integrated circuits
proximity
lithography
photonics
simulation
2017

Ultra-low loss arrayed waveguide grating using deep UV lithography on a generic InP photonic integration platform

Bolk, J., Ambrosius, H. P. M. M., Dasmahapatra, P., Stabile, R., Latkowski, S., D'Agostino, D., Bitincka, E., Augustin, L. M., Marsan, D., Voets, R. & Williams, K. A., 19 Sep 2017, p. 1-3. 3 p.

Research output: Contribution to conferencePosterAcademic