• 57 Citations
20172020

Research output per year

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Research Output

  • 57 Citations
  • 7 Article
2020
Open Access
File
1 Downloads (Pure)
2019
16 Citations (Scopus)
3 Downloads (Pure)

Film conformality and extracted recombination probabilities of O atoms during plasma-assisted atomic layer deposition of SiO2, TiO2, Al2O3, and HfO2

Arts, K., Utriainen, M., Puurunen, R. L., Kessels, E. & Knoops, H., 7 Nov 2019, In : Journal of Physical Chemistry C. 123, 44, p. 27030-27035 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
1 Citation (Scopus)
14 Downloads (Pure)

Status and prospects of plasma-assisted atomic layer deposition

Knoops, H., Faraz, T., Arts, K. & Kessels, E., 1 May 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 37, 3, 26 p., 030902.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
17 Citations (Scopus)
226 Downloads (Pure)

Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2O3 extracted from their impact on film conformality

Arts, K., Vandalon, V., Puurunen, R. L., Utriainen, M., Gao, F., Kessels, E. & Knoops, H., 24 Apr 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 37, 3, 5 p., 030908.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
4 Citations (Scopus)
1 Downloads (Pure)
2018

Broadband optical response of graphene measured by terahertz time-domain spectroscopy and FTIR spectroscopy

Arts, K., Vervuurt, R. H. J., Bhattacharya, A., Gómez Rivas, J., Oosterbeek, J. W. & Bol, A. A., 21 Aug 2018, In : Journal of Applied Physics. 124, 7, 6 p., 073105.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
3 Citations (Scopus)
41 Downloads (Pure)
2017

Correlating the silicon surface passivation to the nanostructure of low-temperature a-Si:H after rapid thermal annealing

Macco, B., Melskens, J., Podraza, N. J., Arts, K., Pugh, C., Thomas, O. & Kessels, W. M. M., 20 Jul 2017, In : Journal of Applied Physics. 122, 3, 7 p., 035302.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
16 Citations (Scopus)
91 Downloads (Pure)