Research Output per year
Research Output per year
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Dive into the research topics where Karsten Arts is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Research Output
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Evidence for low-energy ions influencing plasma-assisted atomic layer deposition of SiO2: Impact on the growth per cycle and wet etch rate
Arts, K., Deijkers, J. H., Faraz, T., Puurunen, R. L., Kessels, W. M. M. & Knoops, H. C. M., 20 Jul 2020, In : Applied Physics Letters. 117, 3, 5 p., 031602.Research output: Contribution to journal › Article › Academic › peer-review
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Evidence for low-energy ions influencing plasma-assisted atomic layer deposition of SiO2 as measured with Impedans' Quantum System: Application note [QC03]
Arts, K., Deijkers, J. H., Faraz, T., Puurunen, R. L., Kessels, W. M. M. & Knoops, H. C. M., Aug 2020, Impedans Plasma Measurement. 2 p.Research output: Book/Report › Report › Academic
Open AccessFile18 Downloads (Pure) -
Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
Karwal, S., Verheijen, M. A., Arts, K., Faraz, T., Kessels, W. M. M. & Creatore, M., 1 May 2020, In : Plasma Chemistry and Plasma Processing. 40, 3, p. 697-712 16 p.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile3 Citations (Scopus)16 Downloads (Pure) -
Energetic Ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
Faraz, T., Arts, K., Karwal, S., Knoops, H. C. M. & Kessels, W. M. M., 28 Feb 2019, In : Plasma Sources Science and Technology. 28, 2, 19 p., 024002.Research output: Contribution to journal › Article › Academic › peer-review
24 Citations (Scopus)3 Downloads (Pure) -
Film conformality and extracted recombination probabilities of O atoms during plasma-assisted atomic layer deposition of SiO2, TiO2, Al2O3, and HfO2
Arts, K., Utriainen, M., Puurunen, R. L., Kessels, E. & Knoops, H., 7 Nov 2019, In : Journal of Physical Chemistry C. 123, 44, p. 27030-27035 6 p.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile8 Citations (Scopus)40 Downloads (Pure)
Press / Media
Student theses
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Graphene microwave-reflective coatings for diagnostic windows in fusion reactors
Author: Arts, K., 2017Supervisor: Oosterbeek, J. (. (Supervisor 1), Bol, A. A. (Supervisor 2) & Vervuurt, R. H. (Supervisor 2)
Student thesis: Master
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On the influence of ICP-PECVD deposition parameters and annealing on the properties of a-Si:H passivation layers
Author: Arts, K., 2014Supervisor: Macco, B. (Supervisor 1) & Kessels, W. (Supervisor 2)
Student thesis: Bachelor
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