Research output per year
Research output per year
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Dive into the research topics where Karsten Arts is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Conformality and the role of ions during plasma-assisted atomic layer deposition
Arts, K., 15 Sep 2021, Eindhoven: Eindhoven University of Technology. 187 p.Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)
6 Downloads (Pure) -
Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2
Arts, K., Thepass, H., Verheijen, M. A., Puurunen, R. L., Kessels, W. M. M. & Knoops, H. C. M., 13 Jul 2021, In: Chemistry of Materials. 33, 13, p. 5002-5009 8 p.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile1 Citation (Scopus)8 Downloads (Pure) -
Innovative remote plasma source for atomic layer deposition for GaN devices
Knoops, H., Arts, K., Buiter, J. W., Martini, L. M., Engeln, R. A. H., Hemakumara, D. T., Powell, M., Kessels, W. M. M., Hodson, C. J. & O'Mahony, A., 21 Sep 2021, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 39, 6, 9 p., 062403.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile15 Downloads (Pure) -
Oxygen Recombination Probability Data for Plasma-Assisted Atomic Layer Deposition of SiO2 and TiO2
Arts, K., Deijkers, J. H., Puurunen, R. L., Kessels, W. M. M. & Knoops, H. C. M., 8 Apr 2021, In: Journal of Physical Chemistry C. 125, 15, p. 8244–8252 9 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access2 Citations (Scopus) -
Surface zeta potential and diamond growth on gallium oxide single crystal
Mandal, S., Arts, K., Knoops, H. C. M., Cuenca, J. A., Klemencic, G. M. & Williams, O. A., 30 Aug 2021, In: Carbon. 181, p. 79-86 8 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access1 Citation (Scopus)
Press / Media
Thesis
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Graphene microwave-reflective coatings for diagnostic windows in fusion reactors
Author: Arts, K., 2017Supervisor: Oosterbeek, J. (. (Supervisor 1), Bol, A. A. (Supervisor 2) & Vervuurt, R. H. (Supervisor 2)
Student thesis: Master
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On the influence of ICP-PECVD deposition parameters and annealing on the properties of a-Si:H passivation layers
Author: Arts, K., 2014Supervisor: Macco, B. (Supervisor 1) & Kessels, W. (Supervisor 2)
Student thesis: Bachelor
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