Research Output per year
Fingerprint Dive into the research topics where Karsten Arts is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Research Output
- 51 Citations
- 6 Article
Energetic Ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
Faraz, T., Arts, K., Karwal, S., Knoops, H. C. M. & Kessels, W. M. M., 28 Feb 2019, In : Plasma Sources Science and Technology. 28, 2, 19 p., 024002.Research output: Contribution to journal › Article › Academic › peer-review
12
Citations
(Scopus)
3
Downloads
(Pure)
Film conformality and extracted recombination probabilities of O atoms during plasma-assisted atomic layer deposition of SiO2, TiO2, Al2O3, and HfO2
Arts, K., Utriainen, M., Puurunen, R. L., Kessels, E. & Knoops, H., 7 Nov 2019, In : Journal of Physical Chemistry C. 123, 44, p. 27030-27035 6 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
1
Citation
(Scopus)
12
Downloads
(Pure)
Status and prospects of plasma-assisted atomic layer deposition
Knoops, H., Faraz, T., Arts, K. & Kessels, E., 1 May 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 37, 3, 26 p., 030902.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
16
Citations
(Scopus)
165
Downloads
(Pure)
Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2O3 extracted from their impact on film conformality
Arts, K., Vandalon, V., Puurunen, R. L., Utriainen, M., Gao, F., Kessels, E. & Knoops, H., 24 Apr 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 37, 3, 5 p., 030908.Research output: Contribution to journal › Article › Academic › peer-review
4
Citations
(Scopus)
Broadband optical response of graphene measured by terahertz time-domain spectroscopy and FTIR spectroscopy
Arts, K., Vervuurt, R. H. J., Bhattacharya, A., Gómez Rivas, J., Oosterbeek, J. W. & Bol, A. A., 21 Aug 2018, In : Journal of Applied Physics. 124, 7, 6 p., 073105.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
3
Citations
(Scopus)
38
Downloads
(Pure)
Press / Media
Student theses
Functional analysis of retarding field energy analyzers for ion energy distribution measurements in plasma enhanced atomic layer deposition
Author: Buiter, J. W., 2018Supervisor: Arts, K. (Supervisor 1), Kessels, W. (. (Supervisor 2) & Knoops, H. C. (Supervisor 2)
Student thesis: Master
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Graphene microwave-reflective coatings for diagnostic windows in fusion reactors
Author: Arts, K., 2017Supervisor: Oosterbeek, J. (. (Supervisor 1), Bol, A. A. (Supervisor 2) & Vervuurt, R. H. (Supervisor 2)
Student thesis: Master
File
On the influence of ICP-PECVD deposition parameters and annealing on the properties of a-Si:H passivation layers
Author: Arts, K., 2014Supervisor: Macco, B. (Supervisor 1) & Kessels, W. (Supervisor 2)
Student thesis: Bachelor
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