• 51 Citations
20172019

Research output per year

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Research Output

  • 51 Citations
  • 6 Article
  • 12 Citations (Scopus)
    3 Downloads (Pure)

    Film conformality and extracted recombination probabilities of O atoms during plasma-assisted atomic layer deposition of SiO2, TiO2, Al2O3, and HfO2

    Arts, K., Utriainen, M., Puurunen, R. L., Kessels, E. & Knoops, H., 7 Nov 2019, In : Journal of Physical Chemistry C. 123, 44, p. 27030-27035 6 p.

    Research output: Contribution to journalArticleAcademicpeer-review

    Open Access
    File
  • 1 Citation (Scopus)
    12 Downloads (Pure)

    Status and prospects of plasma-assisted atomic layer deposition

    Knoops, H., Faraz, T., Arts, K. & Kessels, E., 1 May 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 37, 3, 26 p., 030902.

    Research output: Contribution to journalArticleAcademicpeer-review

    Open Access
    File
  • 16 Citations (Scopus)
    165 Downloads (Pure)

    Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2O3 extracted from their impact on film conformality

    Arts, K., Vandalon, V., Puurunen, R. L., Utriainen, M., Gao, F., Kessels, E. & Knoops, H., 24 Apr 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 37, 3, 5 p., 030908.

    Research output: Contribution to journalArticleAcademicpeer-review

  • 4 Citations (Scopus)

    Broadband optical response of graphene measured by terahertz time-domain spectroscopy and FTIR spectroscopy

    Arts, K., Vervuurt, R. H. J., Bhattacharya, A., Gómez Rivas, J., Oosterbeek, J. W. & Bol, A. A., 21 Aug 2018, In : Journal of Applied Physics. 124, 7, 6 p., 073105.

    Research output: Contribution to journalArticleAcademicpeer-review

    Open Access
    File
  • 3 Citations (Scopus)
    38 Downloads (Pure)

    Press / Media

    Manufacturing Bits: Feb. 18

    Karsten Arts

    18/02/20

    1 item of Media coverage

    Press/Media: Expert Comment

    Student theses

    File

    Graphene microwave-reflective coatings for diagnostic windows in fusion reactors

    Author: Arts, K., 2017

    Supervisor: Oosterbeek, J. (. (Supervisor 1), Bol, A. A. (Supervisor 2) & Vervuurt, R. H. (Supervisor 2)

    Student thesis: Master

    File