• 0 Citations
20202020

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Research Output

Area-selective atomic layer deposition for bottom-up fabrication of nanoelectronics

Mackus, A. J. M., Merkx, M. J. M. & Li, J., 2 Jun 2020, In : Nevac Blad. 58, special on ALD, p. 32-34 2.

Research output: Contribution to journalArticlePopular

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