Job Beckers &ndash; Research Output

2019

12 Downloads (Pure)

Decay of the electron density and the electron collision frequency between successive discharges of a pulsed plasma jet in N₂

van der Schans, M., Platier, B., Koelman, P., van de Wetering, F. M. J. H., van Dijk, J., Beckers, J., Nijdam, S. & IJzerman, W., 27 Mar 2019, In : Plasma Sources Science and Technology. 28, 3, 13 p., 035020.

Research output: Contribution to journal › Article › Academic › peer-review

plasma jets

electron scattering

decay

cavities

collisions

3 Citations (Scopus)

Energy distribution functions for ions from pulsed EUV-induced plasmas in low pressure N2-diluted H2 gas

Beckers, J., van de Ven, T., de Meijere, C. A., van der Horst, R., van Kampen, M. & Banine, V., 2 Apr 2019, In : Applied Physics Letters. 114, 13, 5 p., 133502.

Research output: Contribution to journal › Article › Academic › peer-review

energy distribution

low pressure

distribution functions

gases

ions

1 Citation (Scopus)

15 Downloads (Pure)

EUV-induced plasma: a peculiar phenomenon of a modern lithographic technology

Beckers, J., van de Ven, T., van der Horst, R., Astakhov, D. . I. & Banine, V., 2 Jul 2019, In : Applied Sciences. 9, 14, 23 p., 2827.

Research output: Contribution to journal › Review article › Academic › peer-review

Open Access

File

Plasmas

Lithography

lithography

boom

Extreme ultraviolet lithography

4 Citations (Scopus)

5 Downloads (Pure)

Mapping electron dynamics in highly transient EUV photon-induced plasmas: a novel diagnostic approach using multi-mode microwave cavity resonance spectroscopy

Beckers, J., van de Wetering, F. M. J. H., Platier, B., van Ninhuijs, M. A. W., Brussaard, G. J. H., Banine, V. Y. & Luiten, O. J., 16 Jan 2019, In : Journal of Physics D: Applied Physics. 52, 3, 17 p., 034004.

Research output: Contribution to journal › Article › Academic › peer-review

Photons

Microwaves

Spectroscopy

Plasmas

microwaves

1 Citation (Scopus)

7 Downloads (Pure)

The charge of micro-particles in a low pressure spatial plasma afterglow

van Minderhout, B., Peijnenburg, T., Blom, P., Vogels, J. M., Kroesen, G. & Beckers, J., 10 Jun 2019, In : Journal of Physics D: Applied Physics. 52, 32, 6 p., 32LT03.

Research output: Contribution to journal › Article › Academic › peer-review

afterglows

low pressure

Plasmas

Analytical models

contamination

2 Downloads (Pure)

Time-resolved ion energy distribution functions in the afterglow of an EUV-induced plasma

Beckers, J., van de Ven, T. & Banine, V., 28 Oct 2019, In : Applied Physics Letters. 115, 18, 4 p., 183502.

Research output: Contribution to journal › Article › Academic › peer-review

Open Access

File

afterglows

energy distribution

distribution functions

ions

lithography

2018

5 Citations (Scopus)

8 Downloads (Pure)

Analysis of retarding field energy analyzer transmission by simulation of ion trajectories

van de Ven, T. H. M., de Meijere, C. A., van der Horst, R. M., van Kampen, M., Banine, V. Y. & Beckers, J., 1 Apr 2018, In : Review of Scientific Instruments. 89, 4, 11 p., 043501.

Research output: Contribution to journal › Article › Academic › peer-review

Open Access

File

analyzers

Trajectories

retarding

trajectories

Ions

4 Citations (Scopus)

Determination of microparticle characteristics in an etching plasma

Schepers, L. P. T., Beckers, J. & IJzerman, W. L., 1 Nov 2018, In : Contributions to Plasma Physics. 58, 10, p. 985-994

Research output: Contribution to journal › Article › Academic › peer-review

microparticles

plasma etching

refractivity

melamine

Mie scattering

7 Citations (Scopus)

73 Downloads (Pure)

Ion energy distributions in highly transient EUV induced plasma in hydrogen

van de Ven, T. H. M., Reefman, P., de Meijere, C. A., van der Horst, R. M., van Kampen, M., Banine, V. Y. & Beckers, J., 14 Feb 2018, In : Journal of Applied Physics. 123, 6, p. 1-6 063301.

Research output: Contribution to journal › Article › Academic › peer-review

Open Access

File

3 Citations (Scopus)

Oxygen content dependent etch rate of single polymer microparticles confined in the sheath region of a low pressure radiofrequency argon/oxygen plasma

Schepers, L. P. T., IJzerman, W. L. & Beckers, J., 13 Aug 2018, In : Journal of Physics D: Applied Physics. 51, 37, 8 p., 375203.

Research output: Contribution to journal › Article › Academic › peer-review

Argon

argon plasma

oxygen plasma

microparticles

sheaths

2017

4 Citations (Scopus)

Experimental study of gliding arc plasma channel motion: buoyancy and gas flow phenomena under normal and hypergravity conditions

Potočňáková, L., Šperka, J., Zikán, P., van Loon, J. J. W. A., Beckers, J. & Kudrle, V., Apr 2017, In : Plasma Sources Science and Technology. 26, 4, 15 p., 045014.

Research output: Contribution to journal › Article › Academic › peer-review

2016

6 Citations (Scopus)

114 Downloads (Pure)

Conclusive evidence of abrupt coagulation inside the void during cyclic nanoparticle formation in reactive plasma

van de Wetering, F. M. J. H., Nijdam, S. & Beckers, J., 25 Jul 2016, In : Applied Physics Letters. 109, p. 1-4 4 p., 043105.

Research output: Contribution to journal › Article › Academic › peer-review

Open Access

File

coagulation

voids

nanoparticles

contraction

expansion

14 Citations (Scopus)

5 Downloads (Pure)

Exploring the electron density in plasma induced by EUV radiation: I. Experimental study in hydrogen

Van Der Horst, R. M., Beckers, J., Osorio, E. A., Astakhov, D. I., Goedheer, W. J., Lee, C. J., Ivanov, V. V., Krivtsum, V. M., Koshelev, K. N., Lopaev, D. V., Bijkerk, F. & Banine, V. Y., 10 Mar 2016, In : Journal of Physics D: Applied Physics. 49, 14, p. 1-9 145203.

Research output: Contribution to journal › Article › Academic › peer-review

Carrier concentration

Hydrogen

Plasmas

Radiation

hydrogen

14 Citations (Scopus)

3 Downloads (Pure)

Exploring the electron density in plasma induced by EUV radiation: II. Numerical studies in argon and hydrogen

Astakhov, D. I., Goedheer, W. J., Lee, C. J., Ivanov, V. V., Krivtsun, V. M., Koshelev, K. N., Lopaev, D. V., van der Horst, R. M., Beckers, J., Osorio, E. A. & Bijkerk, F., 1 Jul 2016, In : Journal of Physics D: Applied Physics. 49, 29, 9 p., 295204.

Research output: Contribution to journal › Article › Academic › peer-review

Argon

Carrier concentration

Hydrogen

argon

Plasmas

62 Downloads (Pure)

First-ever measurements of ion energy distribution functions in EUV induced plasma

van de Ven, T. H. M., Reefman, P., Osorio, E. A., Banine, V. Y. & Beckers, J., 16 Mar 2016.

Research output: Contribution to conference › Poster › Academic

Open Access

File

2 Citations (Scopus)

157 Downloads (Pure)

Interaction of nanosecond ultraviolet laser pulses with reactive dusty plasma

van de Wetering, F. M. J. H., Oosterbeek, W., Beckers, J., Nijdam, S., Gibert, T., Mikikian, M., Rabat, H., Kovacevic, E. & Berndt, J., 23 May 2016, In : Applied Physics Letters. 108, 21, p. 1-5 213103.

Research output: Contribution to journal › Article › Academic › peer-review

Open Access

File

Interaction of UV laser pulses with reactive dusty plasmas

van de Wetering, F. M. J. H., Beckers, J., Nijdam, S., Oosterbeek, W., Kovacevic, E. & Berndt, J., 2016, p. HT6.107.

Research output: Contribution to conference › Paper › Academic

dusty plasmas

ultraviolet lasers

pulses

interactions

dust

64 Downloads (Pure)

Investigation of ion energy distribution functions in EUV-induced plasmas by ion mass spectrometry

van de Ven, T. H. M., Reefman, P., Osorio, E. A., Banine, V. Y. & Beckers, J., 22 Jun 2016. 1 p.

Research output: Contribution to conference › Abstract › Academic

Open Access

File

energy distribution

mass spectroscopy

distribution functions

ions

mass spectrometers

2 Downloads (Pure)

Ion fluxes and energies increase with pressure in EUV-induced H2 plasmas

van de Ven, T. H. M., Reefman, P., de Meijere, C. A., van der Horst, R., Banine, V. Y. & Beckers, J., 13 Oct 2016.

Research output: Contribution to conference › Poster › Academic

extreme ultraviolet radiation

ions

mass spectrometers

vessels

photoionization

4 Citations (Scopus)

7 Downloads (Pure)

Laser-induced incandescence applied to dusty plasmas

van de Wetering, F. M. J. H., Oosterbeek, W., Beckers, J., Nijdam, S., Kovacevic, E. & Berndt, J., 1 Jul 2016, In : Journal of Physics D: Applied Physics. 49, 29

Research output: Contribution to journal › Article › Academic › peer-review

10 Citations (Scopus)

4 Downloads (Pure)

The influence of the EUV spectrum on plasma induced by EUV radiation in argon and hydrogen gas

Van Der Horst, R. M., Osorio, E. A., Banine, V. Y. & Beckers, J., 1 Feb 2016, In : Plasma Sources Science and Technology. 25, 1, 7 p., 015012.

Research output: Contribution to journal › Article › Academic › peer-review

argon

hydrogen

radiation

gases

lithography

9 Citations (Scopus)

13 Downloads (Pure)

Thermalization of electrons in decaying extreme ultraviolet photons induced low pressure argon plasma

Beckers, J., van der Horst, R., Osorio, E. A., Kroesen, G. M. W. & Banine, V. Y., 6 Apr 2016, In : Plasma Sources Science and Technology. 25, 3, p. 1-8 035010.

Research output: Contribution to journal › Article › Academic › peer-review

2015

79 Downloads (Pure)

Absolute calibration of an energy resolved ion mass spectrometer and Retarding Field Energy Analyzer

van de Ven, T. H. M., Banine, V. Y., Osorio, E. A. & Beckers, J., 4 Dec 2015.

Research output: Contribution to conference › Poster › Academic

Open Access

File

11 Citations (Scopus)

3 Downloads (Pure)

Dynamics of the spatial electron density distribution of EUV-induced plasmas

van der Horst, R. M., Beckers, J., Osorio, E. A. & Banine, V. Y., 4 Nov 2015, In : Journal of Physics D: Applied Physics. 48, 43, 5 p., 432001.

Research output: Contribution to journal › Article › Academic › peer-review

Electronic density of states

density distribution

Plasmas

gas pressure

Gases

378 Downloads (Pure)

Energy resolved mass spectrometry in EUV-induced plasmas

Ven, van de, T. H. M., Beckers, J., Osorio, E. A. & Banine, V. Y., 2015.

Research output: Contribution to conference › Poster › Academic

Open Access

File

EUV photons induced plasma

Beckers, J., 2015, XXXII International Conference on Phenomena in Ionized Gases, 26-31 July 2015, Iasi, Romania.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Expansion of the electrons in an EUV-induced plasma in argon

van der Horst, R. M., Beckers, J., Osorio, E. A. & Banine, V. Y., 2015.

Research output: Contribution to conference › Poster › Academic

argon

cavities

expansion

electrons

lithography

25 Downloads (Pure)

Exploring light scattering on dusty plasmas to improve color management in white LEDs

Schepers, L. P. T., Beckers, J., Tukker, T. W. & IJzerman, W. L., 11 Mar 2015, 27th Symposium on Plasma Physics & Radiation Technology: Book of Abstracts. Dutch Physical Society, 1 p. B7

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Open Access

File

dusty plasmas

light scattering

light emitting diodes

color

dust

15 Citations (Scopus)

5 Downloads (Pure)

Exploring the electron density in plasmas induced by extreme ultraviolet radiation in argon

Horst, van der, R. M., Beckers, J., Osorio, E. A. & Banine, V. Y., 2015, In : Journal of Physics D: Applied Physics. 48, 28, p. 285203-1/9

Research output: Contribution to journal › Article › Academic › peer-review

extreme ultraviolet radiation

Argon

Ultraviolet radiation

Carrier concentration

Gases

53 Downloads (Pure)

Fast and interrupted expansion in cyclic void growth in a dusty plasma

Wetering, van de, F. M. J. H., Brooimans, R. J. C., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2015, Proceedings of the 27th Symposium Plasma Physics & Radiation Technology, 10-11 March 2015, Lunteren, the Netherlands.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Open Access

File

21 Citations (Scopus)

77 Downloads (Pure)

Fast and interrupted expansion in cyclic void growth in dusty plasma

Wetering, van de, F. M. J. H., Brooimans, R. J. C., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2015, In : Journal of Physics D: Applied Physics. 48, p. 035204 13 p.

Research output: Contribution to journal › Article › Academic › peer-review

Open Access

File

dusty plasmas

Dust

voids

Plasmas

dust

4 Citations (Scopus)

1 Downloads (Pure)

Gravity effects on a gliding arc in four noble gases : from normal to hypergravity

Potocnáková, L., Šperka, J., Zikán, P., Loon, van, J. J. W. A., Beckers, J. & Kudrle, V., 2015, In : Plasma Sources Science and Technology. 24, 2, p. 022002-1/6 6 p.

Research output: Contribution to journal › Article › Academic › peer-review

high gravity environments

gliding

artificial gravity

rare gases

arcs

Light scattering on a dusty plasma: in-situ monitoring of a single particle

Schepers, L. P. T., Beckers, J. & IJzerman, W. L., 4 Dec 2015.

Research output: Contribution to conference › Poster › Academic

9 Downloads (Pure)

Light scattering on dusty plasmas : how to improve the quality of white LEDs?

Schepers, L. P. T., Beckers, J., Tukker, T. W. & IJzerman, W. L., 2015, 2015 IEEE International Conference on Plasma Sciences (ICOPS, Antalya, Turkey, May 24-28, 2015). Piscataway: Institute of Electrical and Electronics Engineers, p. 1-1

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

dusty plasmas

light scattering

light emitting diodes

dust

phosphors

6 Citations (Scopus)

6 Downloads (Pure)

Radiating plasma species density distribution in EUV-induced plasma in argon: a spatiotemporal experimental study

Van Der Horst, R. M., Beckers, J., Osorio, E. A., van de Ven, T. H. M. & Banine, V. Y., 1 Dec 2015, In : Plasma Sources Science and Technology. 24, 6, p. 1-10 065016.

Research output: Contribution to journal › Article › Academic › peer-review

density distribution

argon

decay

gas pressure

photoionization

2 Citations (Scopus)

73 Downloads (Pure)

Revealing an intermediate region between the collisional radiofrequency plasma bulk and its sheath

Beckers, J., Trienekens, D. J. M. & Kroesen, G. M. W., 18 Mar 2015, In : Physical Review E. 91, 3, p. 1-5 033109.

Research output: Contribution to journal › Article › Academic › peer-review

Open Access

File

collisional plasmas

sheaths

Plasma

microparticles

borders

21 Downloads (Pure)

The temporal evolution of electrons in EUV-induced plasmas

Horst, van der, R. M., Beckers, J., Osorio, E. A. & Banine, V. Y., 28 Jul 2015, Proceedings of the 32st International Conference of Plasmas and Ionized Gases.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Open Access

File

gas pressure

cavities

microwaves

ambipolar diffusion

electrons

2014

36 Downloads (Pure)

Electron density in an Extreme Ultra-Violet generated plasma

Horst, van der, R. M., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2014, Presentation at the congress of Physics@FOM, January 21-22, 2014, Veldhoven, The Netherlands.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Open Access

File

cavities

lithography

argon

microwaves

miniaturization

1 Downloads (Pure)

Experimental method to determine the electron density in EUV-induced plasmas

Horst, van der, R. M., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2014.

Research output: Contribution to conference › Poster › Academic

17 Citations (Scopus)

3 Downloads (Pure)

Exploring the temporally resolved electron density evolution in extreme ultra-violet induced plasmas

Horst, van der, R. M., Beckers, J., Nijdam, S. & Kroesen, G. M. W., 30 Jul 2014, In : Journal of Physics D: Applied Physics. 47, 30, p. 302001-1/4 5 p.

Research output: Contribution to journal › Article › Academic › peer-review

Carrier concentration

Plasmas

Photoionization

Impact ionization

Argon

5 Citations (Scopus)

2 Downloads (Pure)

Gliding arc in noble gases under normal and hypergravity conditions

Potočňáková, L., Šperka, J., Zikán, P., Van Loon, J. J. W. A., Beckers, J. & Kudrle, V., 21 Oct 2014, In : IEEE Transactions on Plasma Science. 42, 10, p. 2724-2725

Research output: Contribution to journal › Article › Academic › peer-review

27 Downloads (Pure)

Ion energies in EUV induced plasma: Measuring methods

Ven, van de, T. H. M., Beckers, J., Osorio, E. A., Banine, V. Y. & Kroesen, G. M. W., 2014.

Research output: Contribution to conference › Poster › Academic

Open Access

File

Ions

Light scattering on dusty plasmas for enhanced color management in white LEDs

Schepers, L. P. T., Beckers, J., Tukker, T. W. & IJzerman, W. L., 2014.

Research output: Contribution to conference › Poster › Academic

31 Downloads (Pure)

Plasma accumulation effects in Extreme Ultra-Violet generated plasmas

Horst, van der, R. M., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2014, p. 1-1.

Research output: Contribution to conference › Poster › Academic

Open Access

File

cavities

lithography

microwaves

miniaturization

spectroscopy

29 Downloads (Pure)

Plasma and nanoparticles in cylindrical microwave cavities

Wetering, van de, F. M. J. H., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2014, Proceedings of the 26th Symposium Plasma Physics & Radiation Technology, 11-12 March 2014, Lunteren, the Netherlands. p. 79-79

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Open Access

File

microwaves

nanoparticles

cavities

dust

acetylene

1 Downloads (Pure)

Plasmafysica en stof tot nadenken

Beckers, J., 2014, Het beste idee van 2014. Baijens, J. A. (ed.). Tilburg: De Wereld, p. 124-125 309 p.

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Popular

Plasma particle lofting

Heijmans, L. C. J., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2014.

Research output: Contribution to conference › Poster › Academic

lofting

adhesives

floating

electron flux

Shake it off - Real-time dynamics of particle release by vibration

Heijmans, L. C. J., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2014.

Research output: Contribution to conference › Poster › Academic

vibration

lofting

contamination

causes

adhesives

The electron density in an EUV-generated plasma

Horst, van der, R. M., Beckers, J., Nijdam, S., Osorio, E. A., Banine, V. Y. & Kroesen, G. M. W., 2014, Presentation at the CP3E, 27-5-2014, Veldhoven, The Netherlands.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

The electron density in an EUV-generated plasma in hydrogen

Horst, van der, R. M., Beckers, J., Nijdam, S. & Kroesen, G. M. W., 2014, 2014 International Symposium on Extreme Ultraviolet Lithography, October 27-29 2014, Washington DC. Washingthon DC

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

hydrogen

resonant frequencies

gases

argon

permittivity