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Research Output 2005 2019

2019
1 Citation (Scopus)
plasma jets
electron scattering
decay
cavities
collisions
1 Citation (Scopus)

Energy distribution functions for ions from pulsed EUV-induced plasmas in low pressure N2-diluted H2 gas

Beckers, J., van de Ven, T., de Meijere, C. A., van der Horst, R., van Kampen, M. & Banine, V., 2 Apr 2019, In : Applied Physics Letters. 114, 5 p., 133502

Research output: Contribution to journalArticleAcademicpeer-review

energy distribution
low pressure
distribution functions
gases
ions

EUV-induced plasma: a peculiar phenomenon of a modern lithographic technology

Beckers, J., van de Ven, T., van der Horst, R., Astakhov, D. . I. & Banine, V., 2 Jul 2019, In : Applied Sciences. 9, 14, 23 p., 2827

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Plasmas
Lithography
lithography
boom
Extreme ultraviolet lithography
3 Citations (Scopus)
Photons
Microwaves
Spectroscopy
Plasmas
microwaves
1 Citation (Scopus)

The charge of micro-particles in a low pressure spatial plasma afterglow

van Minderhout, B., Peijnenburg, T., Blom, P., Vogels, J. M., Kroesen, G. & Beckers, J., 10 Jun 2019, In : Journal of Physics D: Applied Physics. 52, 32, 6 p., 32LT03

Research output: Contribution to journalArticleAcademicpeer-review

afterglows
low pressure
Plasmas
Analytical models
contamination
2018
3 Citations (Scopus)

Analysis of retarding field energy analyzer transmission by simulation of ion trajectories

van de Ven, T. H. M., de Meijere, C. A., van der Horst, R. M., van Kampen, M., Banine, V. Y. & Beckers, J., 1 Apr 2018, In : Review of Scientific Instruments. 89, 4, 11 p., 043501

Research output: Contribution to journalArticleAcademicpeer-review

analyzers
Trajectories
retarding
trajectories
Ions
4 Citations (Scopus)

Determination of microparticle characteristics in an etching plasma

Schepers, L. P. T., Beckers, J. & IJzerman, W. L., 1 Nov 2018, In : Contributions to Plasma Physics. 58, 10, p. 985-994

Research output: Contribution to journalArticleAcademicpeer-review

microparticles
plasma etching
refractivity
melamine
Mie scattering

Illuminating the plasma - particle interaction

Schepers, L. P. T., 15 Feb 2018, Eindhoven: Technische Universiteit Eindhoven. 155 p.

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)Academic

Open Access
File
6 Citations (Scopus)

Ion energy distributions in highly transient EUV induced plasma in hydrogen

van de Ven, T. H. M., Reefman, P., de Meijere, C. A., van der Horst, R. M., van Kampen, M., Banine, V. Y. & Beckers, J., 14 Feb 2018, In : Journal of Applied Physics. 123, 6, p. 1-6 063301

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File

Ion fluxes towards surfaces exposed to EUV-induced plasmas

van de Ven, T. H. M., 4 Jul 2018, Eindhoven: Technische Universiteit Eindhoven. 207 p.

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)Academic

Open Access
File
3 Citations (Scopus)

Oxygen content dependent etch rate of single polymer microparticles confined in the sheath region of a low pressure radiofrequency argon/oxygen plasma

Schepers, L. P. T., IJzerman, W. L. & Beckers, J., 13 Aug 2018, In : Journal of Physics D: Applied Physics. 51, 37, 8 p., 375203

Research output: Contribution to journalArticleAcademicpeer-review

Argon
argon plasma
oxygen plasma
microparticles
sheaths
2017
2 Citations (Scopus)

Experimental study of gliding arc plasma channel motion: buoyancy and gas flow phenomena under normal and hypergravity conditions

Potočňáková, L., Šperka, J., Zikán, P., van Loon, J. J. W. A., Beckers, J. & Kudrle, V., Apr 2017, In : Plasma Sources Science and Technology. 26, 4, 15 p., 045014

Research output: Contribution to journalArticleAcademicpeer-review

2016
6 Citations (Scopus)

Conclusive evidence of abrupt coagulation inside the void during cyclic nanoparticle formation in reactive plasma

van de Wetering, F. M. J. H., Nijdam, S. & Beckers, J., 25 Jul 2016, In : Applied Physics Letters. 109, p. 1-4 4 p., 043105

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
coagulation
voids
nanoparticles
contraction
expansion
13 Citations (Scopus)

Exploring the electron density in plasma induced by EUV radiation: I. Experimental study in hydrogen

Van Der Horst, R. M., Beckers, J., Osorio, E. A., Astakhov, D. I., Goedheer, W. J., Lee, C. J., Ivanov, V. V., Krivtsum, V. M., Koshelev, K. N., Lopaev, D. V., Bijkerk, F. & Banine, V. Y., 10 Mar 2016, In : Journal of Physics D: Applied Physics. 49, 14, p. 1-9 145203

Research output: Contribution to journalArticleAcademicpeer-review

Carrier concentration
Hydrogen
Plasmas
Radiation
hydrogen
12 Citations (Scopus)

Exploring the electron density in plasma induced by EUV radiation: II. Numerical studies in argon and hydrogen

Astakhov, D. I., Goedheer, W. J., Lee, C. J., Ivanov, V. V., Krivtsun, V. M., Koshelev, K. N., Lopaev, D. V., van der Horst, R. M., Beckers, J., Osorio, E. A. & Bijkerk, F., 1 Jul 2016, In : Journal of Physics D: Applied Physics. 49, 29, 9 p., 295204

Research output: Contribution to journalArticleAcademicpeer-review

Argon
Carrier concentration
Hydrogen
argon
Plasmas

First-ever measurements of ion energy distribution functions in EUV induced plasma

van de Ven, T. H. M., Reefman, P., Osorio, E. A., Banine, V. Y. & Beckers, J., 16 Mar 2016

Research output: Contribution to conferencePosterAcademic

Open Access
File

Formation and dynamics of nanoparticles in plasmas

van de Wetering, F., 17 Feb 2016, Eindhoven: Technische Universiteit Eindhoven. 207 p.

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)Academic

Open Access
File
2 Citations (Scopus)

Interaction of nanosecond ultraviolet laser pulses with reactive dusty plasma

van de Wetering, F. M. J. H., Oosterbeek, W., Beckers, J., Nijdam, S., Gibert, T., Mikikian, M., Rabat, H., Kovacevic, E. & Berndt, J., 23 May 2016, In : Applied Physics Letters. 108, 21, p. 1-5 213103

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File

Interaction of UV laser pulses with reactive dusty plasmas

van de Wetering, F. M. J. H., Beckers, J., Nijdam, S., Oosterbeek, W., Kovacevic, E. & Berndt, J., 2016, p. HT6.107

Research output: Contribution to conferencePaperAcademic

dusty plasmas
ultraviolet lasers
pulses
interactions
dust

Investigation of ion energy distribution functions in EUV-induced plasmas by ion mass spectrometry

van de Ven, T. H. M., Reefman, P., Osorio, E. A., Banine, V. Y. & Beckers, J., 22 Jun 2016 1 p.

Research output: Contribution to conferenceAbstractAcademic

Open Access
File
energy distribution
mass spectroscopy
distribution functions
ions
mass spectrometers

Ion fluxes and energies increase with pressure in EUV-induced H2 plasmas

van de Ven, T. H. M., Reefman, P., de Meijere, C. A., van der Horst, R., Banine, V. Y. & Beckers, J., 13 Oct 2016

Research output: Contribution to conferencePosterAcademic

extreme ultraviolet radiation
ions
mass spectrometers
vessels
photoionization
4 Citations (Scopus)

Laser-induced incandescence applied to dusty plasmas

van de Wetering, F. M. J. H., Oosterbeek, W., Beckers, J., Nijdam, S., Kovacevic, E. & Berndt, J., 1 Jul 2016, In : Journal of Physics D: Applied Physics. 49, 29

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

The influence of the EUV spectrum on plasma induced by EUV radiation in argon and hydrogen gas

Van Der Horst, R. M., Osorio, E. A., Banine, V. Y. & Beckers, J., 1 Feb 2016, In : Plasma Sources Science and Technology. 25, 1, 7 p., 015012

Research output: Contribution to journalArticleAcademicpeer-review

argon
hydrogen
radiation
gases
lithography
8 Citations (Scopus)

Thermalization of electrons in decaying extreme ultraviolet photons induced low pressure argon plasma

Beckers, J., van der Horst, R., Osorio, E. A., Kroesen, G. M. W. & Banine, V. Y., 6 Apr 2016, In : Plasma Sources Science and Technology. 25, 3, p. 1-8 035010

Research output: Contribution to journalArticleAcademicpeer-review

2015

Absolute calibration of an energy resolved ion mass spectrometer and Retarding Field Energy Analyzer

van de Ven, T. H. M., Banine, V. Y., Osorio, E. A. & Beckers, J., 4 Dec 2015

Research output: Contribution to conferencePosterAcademic

Open Access
File
10 Citations (Scopus)

Dynamics of the spatial electron density distribution of EUV-induced plasmas

van der Horst, R. M., Beckers, J., Osorio, E. A. & Banine, V. Y., 4 Nov 2015, In : Journal of Physics D: Applied Physics. 48, 43, 5 p., 432001

Research output: Contribution to journalArticleAcademicpeer-review

Electronic density of states
density distribution
Plasmas
gas pressure
Gases

Electron dynamics in EUV-induced plasmas

Horst, van der, R. M., 19 Nov 2015, Eindhoven: Technische Universiteit Eindhoven. 171 p.

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)Academic

Open Access
File

Energy resolved mass spectrometry in EUV-induced plasmas

Ven, van de, T. H. M., Beckers, J., Osorio, E. A. & Banine, V. Y., 2015

Research output: Contribution to conferencePosterAcademic

Open Access
File

EUV photons induced plasma

Beckers, J., 2015, XXXII International Conference on Phenomena in Ionized Gases, 26-31 July 2015, Iasi, Romania.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Expansion of the electrons in an EUV-induced plasma in argon

van der Horst, R. M., Beckers, J., Osorio, E. A. & Banine, V. Y., 2015

Research output: Contribution to conferencePosterAcademic

argon
cavities
expansion
electrons
lithography

Exploring light scattering on dusty plasmas to improve color management in white LEDs

Schepers, L. P. T., Beckers, J., Tukker, T. W. & IJzerman, W. L., 11 Mar 2015, 27th Symposium on Plasma Physics & Radiation Technology: Book of Abstracts. Dutch Physical Society, 1 p. B7

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
dusty plasmas
light scattering
light emitting diodes
color
dust
14 Citations (Scopus)

Exploring the electron density in plasmas induced by extreme ultraviolet radiation in argon

Horst, van der, R. M., Beckers, J., Osorio, E. A. & Banine, V. Y., 2015, In : Journal of Physics D: Applied Physics. 48, 28, p. 285203-1/9

Research output: Contribution to journalArticleAcademicpeer-review

extreme ultraviolet radiation
Argon
Ultraviolet radiation
Carrier concentration
Gases

Fast and interrupted expansion in cyclic void growth in a dusty plasma

Wetering, van de, F. M. J. H., Brooimans, R. J. C., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2015, Proceedings of the 27th Symposium Plasma Physics & Radiation Technology, 10-11 March 2015, Lunteren, the Netherlands.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
21 Citations (Scopus)

Fast and interrupted expansion in cyclic void growth in dusty plasma

Wetering, van de, F. M. J. H., Brooimans, R. J. C., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2015, In : Journal of Physics D: Applied Physics. 48, p. 035204 13 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
dusty plasmas
Dust
voids
Plasmas
dust
3 Citations (Scopus)

Gravity effects on a gliding arc in four noble gases : from normal to hypergravity

Potocnáková, L., Šperka, J., Zikán, P., Loon, van, J. J. W. A., Beckers, J. & Kudrle, V., 2015, In : Plasma Sources Science and Technology. 24, 2, p. 022002-1/6 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

high gravity environments
gliding
artificial gravity
rare gases
arcs

Light scattering on a dusty plasma: in-situ monitoring of a single particle

Schepers, L. P. T., Beckers, J. & IJzerman, W. L., 4 Dec 2015

Research output: Contribution to conferencePosterAcademic

Light scattering on dusty plasmas : how to improve the quality of white LEDs?

Schepers, L. P. T., Beckers, J., Tukker, T. W. & IJzerman, W. L., 2015, 2015 IEEE International Conference on Plasma Sciences (ICOPS, Antalya, Turkey, May 24-28, 2015). Piscataway: Institute of Electrical and Electronics Engineers, p. 1-1

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

dusty plasmas
light scattering
light emitting diodes
dust
phosphors
5 Citations (Scopus)

Radiating plasma species density distribution in EUV-induced plasma in argon: a spatiotemporal experimental study

Van Der Horst, R. M., Beckers, J., Osorio, E. A., van de Ven, T. H. M. & Banine, V. Y., 1 Dec 2015, In : Plasma Sources Science and Technology. 24, 6, p. 1-10 065016

Research output: Contribution to journalArticleAcademicpeer-review

density distribution
argon
decay
gas pressure
photoionization

Revealing an intermediate region between the collisional radiofrequency plasma bulk and its sheath

Beckers, J., Trienekens, D. J. M. & Kroesen, G. M. W., 18 Mar 2015, In : Physical Review E. 91, 3, p. 1-5 033109

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
collisional plasmas
sheaths
space charge
Plasma
parabolic flight

The temporal evolution of electrons in EUV-induced plasmas

Horst, van der, R. M., Beckers, J., Osorio, E. A. & Banine, V. Y., 28 Jul 2015, Proceedings of the 32st International Conference of Plasmas and Ionized Gases.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
gas pressure
cavities
microwaves
ambipolar diffusion
electrons
2014

Electron density in an Extreme Ultra-Violet generated plasma

Horst, van der, R. M., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2014, Presentation at the congress of Physics@FOM, January 21-22, 2014, Veldhoven, The Netherlands.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
cavities
lithography
argon
microwaves
miniaturization
16 Citations (Scopus)

Exploring the temporally resolved electron density evolution in extreme ultra-violet induced plasmas

Horst, van der, R. M., Beckers, J., Nijdam, S. & Kroesen, G. M. W., 30 Jul 2014, In : Journal of Physics D: Applied Physics. 47, 30, p. 302001-1/4 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Carrier concentration
Plasmas
Photoionization
Impact ionization
Argon
5 Citations (Scopus)

Gliding arc in noble gases under normal and hypergravity conditions

Potočňáková, L., Šperka, J., Zikán, P., Van Loon, J. J. W. A., Beckers, J. & Kudrle, V., 21 Oct 2014, In : IEEE Transactions on Plasma Science. 42, 10, p. 2724-2725

Research output: Contribution to journalArticleAcademicpeer-review

Ion energies in EUV induced plasma: Measuring methods

Ven, van de, T. H. M., Beckers, J., Osorio, E. A., Banine, V. Y. & Kroesen, G. M. W., 2014

Research output: Contribution to conferencePosterAcademic

Open Access
File
Ions

Light scattering on dusty plasmas for enhanced color management in white LEDs

Schepers, L. P. T., Beckers, J., Tukker, T. W. & IJzerman, W. L., 2014

Research output: Contribution to conferencePosterAcademic

Plasma accumulation effects in Extreme Ultra-Violet generated plasmas

Horst, van der, R. M., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2014, p. 1-1

Research output: Contribution to conferencePosterAcademic

Open Access
File
cavities
lithography
microwaves
miniaturization
spectroscopy

Plasma and nanoparticles in cylindrical microwave cavities

Wetering, van de, F. M. J. H., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2014, Proceedings of the 26th Symposium Plasma Physics & Radiation Technology, 11-12 March 2014, Lunteren, the Netherlands. p. 79-79

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
microwaves
nanoparticles
cavities
dust
acetylene

Plasmafysica en stof tot nadenken

Beckers, J., 2014, Het beste idee van 2014. Baijens, J. A. (ed.). Tilburg: De Wereld, p. 124-125 309 p.

Research output: Chapter in Book/Report/Conference proceedingChapterPopular

Plasma particle lofting

Heijmans, L. C. J., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2014

Research output: Contribution to conferencePosterAcademic

lofting
adhesives
floating
electron flux