Research Output per year
Research Output 2005 2019
- 1 - 50 out of 98 results
- Publication Year, Title (descending)
2019
Decay of the electron density and the electron collision frequency between successive discharges of a pulsed plasma jet in N2
van der Schans, M., Platier, B., Koelman, P., van de Wetering, F. M. J. H., van Dijk, J., Beckers, J., Nijdam, S. & IJzerman, W., 27 Mar 2019, In : Plasma Sources Science and Technology. 28, 3, 13 p., 035020Research output: Contribution to journal › Article › Academic › peer-review
plasma jets
electron scattering
decay
cavities
collisions
Energy distribution functions for ions from pulsed EUV-induced plasmas in low pressure N2-diluted H2 gas
Beckers, J., van de Ven, T., de Meijere, C. A., van der Horst, R., van Kampen, M. & Banine, V., 2 Apr 2019, In : Applied Physics Letters. 114, 5 p., 133502Research output: Contribution to journal › Article › Academic › peer-review
energy distribution
low pressure
distribution functions
gases
ions
EUV-induced plasma: a peculiar phenomenon of a modern lithographic technology
Beckers, J., van de Ven, T., van der Horst, R., Astakhov, D. . I. & Banine, V., 2 Jul 2019, In : Applied Sciences. 9, 14, 23 p., 2827Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
Plasmas
Lithography
lithography
boom
Extreme ultraviolet lithography
Mapping electron dynamics in highly transient EUV photon-induced plasmas: a novel diagnostic approach using multi-mode microwave cavity resonance spectroscopy
Beckers, J., van de Wetering, F. M. J. H., Platier, B., van Ninhuijs, M. A. W., Brussaard, G. J. H., Banine, V. Y. & Luiten, O. J., 16 Jan 2019, In : Journal of Physics D: Applied Physics. 52, 3, 17 p., 034004Research output: Contribution to journal › Article › Academic › peer-review
Photons
Microwaves
Spectroscopy
Plasmas
microwaves
The charge of micro-particles in a low pressure spatial plasma afterglow
van Minderhout, B., Peijnenburg, T., Blom, P., Vogels, J. M., Kroesen, G. & Beckers, J., 10 Jun 2019, In : Journal of Physics D: Applied Physics. 52, 32, 6 p., 32LT03Research output: Contribution to journal › Article › Academic › peer-review
afterglows
low pressure
Plasmas
Analytical models
contamination
2018
Analysis of retarding field energy analyzer transmission by simulation of ion trajectories
van de Ven, T. H. M., de Meijere, C. A., van der Horst, R. M., van Kampen, M., Banine, V. Y. & Beckers, J., 1 Apr 2018, In : Review of Scientific Instruments. 89, 4, 11 p., 043501Research output: Contribution to journal › Article › Academic › peer-review
analyzers
Trajectories
retarding
trajectories
Ions
Determination of microparticle characteristics in an etching plasma
Schepers, L. P. T., Beckers, J. & IJzerman, W. L., 1 Nov 2018, In : Contributions to Plasma Physics. 58, 10, p. 985-994Research output: Contribution to journal › Article › Academic › peer-review
microparticles
plasma etching
refractivity
melamine
Mie scattering
Illuminating the plasma - particle interaction
Schepers, L. P. T., 15 Feb 2018, Eindhoven: Technische Universiteit Eindhoven. 155 p.Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e) › Academic
Open Access
File
Ion energy distributions in highly transient EUV induced plasma in hydrogen
van de Ven, T. H. M., Reefman, P., de Meijere, C. A., van der Horst, R. M., van Kampen, M., Banine, V. Y. & Beckers, J., 14 Feb 2018, In : Journal of Applied Physics. 123, 6, p. 1-6 063301Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
Ion fluxes towards surfaces exposed to EUV-induced plasmas
van de Ven, T. H. M., 4 Jul 2018, Eindhoven: Technische Universiteit Eindhoven. 207 p.Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e) › Academic
Open Access
File
Oxygen content dependent etch rate of single polymer microparticles confined in the sheath region of a low pressure radiofrequency argon/oxygen plasma
Schepers, L. P. T., IJzerman, W. L. & Beckers, J., 13 Aug 2018, In : Journal of Physics D: Applied Physics. 51, 37, 8 p., 375203Research output: Contribution to journal › Article › Academic › peer-review
Argon
argon plasma
oxygen plasma
microparticles
sheaths
2017
Experimental study of gliding arc plasma channel motion: buoyancy and gas flow phenomena under normal and hypergravity conditions
Potočňáková, L., Šperka, J., Zikán, P., van Loon, J. J. W. A., Beckers, J. & Kudrle, V., Apr 2017, In : Plasma Sources Science and Technology. 26, 4, 15 p., 045014Research output: Contribution to journal › Article › Academic › peer-review
2016
Conclusive evidence of abrupt coagulation inside the void during cyclic nanoparticle formation in reactive plasma
van de Wetering, F. M. J. H., Nijdam, S. & Beckers, J., 25 Jul 2016, In : Applied Physics Letters. 109, p. 1-4 4 p., 043105Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
coagulation
voids
nanoparticles
contraction
expansion
Exploring the electron density in plasma induced by EUV radiation: I. Experimental study in hydrogen
Van Der Horst, R. M., Beckers, J., Osorio, E. A., Astakhov, D. I., Goedheer, W. J., Lee, C. J., Ivanov, V. V., Krivtsum, V. M., Koshelev, K. N., Lopaev, D. V., Bijkerk, F. & Banine, V. Y., 10 Mar 2016, In : Journal of Physics D: Applied Physics. 49, 14, p. 1-9 145203Research output: Contribution to journal › Article › Academic › peer-review
Carrier concentration
Hydrogen
Plasmas
Radiation
hydrogen
Exploring the electron density in plasma induced by EUV radiation: II. Numerical studies in argon and hydrogen
Astakhov, D. I., Goedheer, W. J., Lee, C. J., Ivanov, V. V., Krivtsun, V. M., Koshelev, K. N., Lopaev, D. V., van der Horst, R. M., Beckers, J., Osorio, E. A. & Bijkerk, F., 1 Jul 2016, In : Journal of Physics D: Applied Physics. 49, 29, 9 p., 295204Research output: Contribution to journal › Article › Academic › peer-review
Argon
Carrier concentration
Hydrogen
argon
Plasmas
First-ever measurements of ion energy distribution functions in EUV induced plasma
van de Ven, T. H. M., Reefman, P., Osorio, E. A., Banine, V. Y. & Beckers, J., 16 Mar 2016Research output: Contribution to conference › Poster › Academic
Open Access
File
Formation and dynamics of nanoparticles in plasmas
van de Wetering, F., 17 Feb 2016, Eindhoven: Technische Universiteit Eindhoven. 207 p.Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e) › Academic
Open Access
File
Interaction of nanosecond ultraviolet laser pulses with reactive dusty plasma
van de Wetering, F. M. J. H., Oosterbeek, W., Beckers, J., Nijdam, S., Gibert, T., Mikikian, M., Rabat, H., Kovacevic, E. & Berndt, J., 23 May 2016, In : Applied Physics Letters. 108, 21, p. 1-5 213103Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
Interaction of UV laser pulses with reactive dusty plasmas
van de Wetering, F. M. J. H., Beckers, J., Nijdam, S., Oosterbeek, W., Kovacevic, E. & Berndt, J., 2016, p. HT6.107Research output: Contribution to conference › Paper › Academic
dusty plasmas
ultraviolet lasers
pulses
interactions
dust
Investigation of ion energy distribution functions in EUV-induced plasmas by ion mass spectrometry
van de Ven, T. H. M., Reefman, P., Osorio, E. A., Banine, V. Y. & Beckers, J., 22 Jun 2016 1 p.Research output: Contribution to conference › Abstract › Academic
Open Access
File
energy distribution
mass spectroscopy
distribution functions
ions
mass spectrometers
Ion fluxes and energies increase with pressure in EUV-induced H2 plasmas
van de Ven, T. H. M., Reefman, P., de Meijere, C. A., van der Horst, R., Banine, V. Y. & Beckers, J., 13 Oct 2016Research output: Contribution to conference › Poster › Academic
extreme ultraviolet radiation
ions
mass spectrometers
vessels
photoionization
Laser-induced incandescence applied to dusty plasmas
van de Wetering, F. M. J. H., Oosterbeek, W., Beckers, J., Nijdam, S., Kovacevic, E. & Berndt, J., 1 Jul 2016, In : Journal of Physics D: Applied Physics. 49, 29Research output: Contribution to journal › Article › Academic › peer-review
The influence of the EUV spectrum on plasma induced by EUV radiation in argon and hydrogen gas
Van Der Horst, R. M., Osorio, E. A., Banine, V. Y. & Beckers, J., 1 Feb 2016, In : Plasma Sources Science and Technology. 25, 1, 7 p., 015012Research output: Contribution to journal › Article › Academic › peer-review
argon
hydrogen
radiation
gases
lithography
Thermalization of electrons in decaying extreme ultraviolet photons induced low pressure argon plasma
Beckers, J., van der Horst, R., Osorio, E. A., Kroesen, G. M. W. & Banine, V. Y., 6 Apr 2016, In : Plasma Sources Science and Technology. 25, 3, p. 1-8 035010Research output: Contribution to journal › Article › Academic › peer-review
2015
Absolute calibration of an energy resolved ion mass spectrometer and Retarding Field Energy Analyzer
van de Ven, T. H. M., Banine, V. Y., Osorio, E. A. & Beckers, J., 4 Dec 2015Research output: Contribution to conference › Poster › Academic
Open Access
File
Dynamics of the spatial electron density distribution of EUV-induced plasmas
van der Horst, R. M., Beckers, J., Osorio, E. A. & Banine, V. Y., 4 Nov 2015, In : Journal of Physics D: Applied Physics. 48, 43, 5 p., 432001Research output: Contribution to journal › Article › Academic › peer-review
Electronic density of states
density distribution
Plasmas
gas pressure
Gases
Electron dynamics in EUV-induced plasmas
Horst, van der, R. M., 19 Nov 2015, Eindhoven: Technische Universiteit Eindhoven. 171 p.Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e) › Academic
Open Access
File
Energy resolved mass spectrometry in EUV-induced plasmas
Ven, van de, T. H. M., Beckers, J., Osorio, E. A. & Banine, V. Y., 2015Research output: Contribution to conference › Poster › Academic
Open Access
File
EUV photons induced plasma
Beckers, J., 2015, XXXII International Conference on Phenomena in Ionized Gases, 26-31 July 2015, Iasi, Romania.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
Expansion of the electrons in an EUV-induced plasma in argon
van der Horst, R. M., Beckers, J., Osorio, E. A. & Banine, V. Y., 2015Research output: Contribution to conference › Poster › Academic
argon
cavities
expansion
electrons
lithography
Exploring light scattering on dusty plasmas to improve color management in white LEDs
Schepers, L. P. T., Beckers, J., Tukker, T. W. & IJzerman, W. L., 11 Mar 2015, 27th Symposium on Plasma Physics & Radiation Technology: Book of Abstracts. Dutch Physical Society, 1 p. B7Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open Access
File
dusty plasmas
light scattering
light emitting diodes
color
dust
Exploring the electron density in plasmas induced by extreme ultraviolet radiation in argon
Horst, van der, R. M., Beckers, J., Osorio, E. A. & Banine, V. Y., 2015, In : Journal of Physics D: Applied Physics. 48, 28, p. 285203-1/9Research output: Contribution to journal › Article › Academic › peer-review
extreme ultraviolet radiation
Argon
Ultraviolet radiation
Carrier concentration
Gases
Fast and interrupted expansion in cyclic void growth in a dusty plasma
Wetering, van de, F. M. J. H., Brooimans, R. J. C., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2015, Proceedings of the 27th Symposium Plasma Physics & Radiation Technology, 10-11 March 2015, Lunteren, the Netherlands.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
Open Access
File
Fast and interrupted expansion in cyclic void growth in dusty plasma
Wetering, van de, F. M. J. H., Brooimans, R. J. C., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2015, In : Journal of Physics D: Applied Physics. 48, p. 035204 13 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
dusty plasmas
Dust
voids
Plasmas
dust
Gravity effects on a gliding arc in four noble gases : from normal to hypergravity
Potocnáková, L., Šperka, J., Zikán, P., Loon, van, J. J. W. A., Beckers, J. & Kudrle, V., 2015, In : Plasma Sources Science and Technology. 24, 2, p. 022002-1/6 6 p.Research output: Contribution to journal › Article › Academic › peer-review
high gravity environments
gliding
artificial gravity
rare gases
arcs
Light scattering on a dusty plasma: in-situ monitoring of a single particle
Schepers, L. P. T., Beckers, J. & IJzerman, W. L., 4 Dec 2015Research output: Contribution to conference › Poster › Academic
Light scattering on dusty plasmas : how to improve the quality of white LEDs?
Schepers, L. P. T., Beckers, J., Tukker, T. W. & IJzerman, W. L., 2015, 2015 IEEE International Conference on Plasma Sciences (ICOPS, Antalya, Turkey, May 24-28, 2015). Piscataway: Institute of Electrical and Electronics Engineers, p. 1-1Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
dusty plasmas
light scattering
light emitting diodes
dust
phosphors
Radiating plasma species density distribution in EUV-induced plasma in argon: a spatiotemporal experimental study
Van Der Horst, R. M., Beckers, J., Osorio, E. A., van de Ven, T. H. M. & Banine, V. Y., 1 Dec 2015, In : Plasma Sources Science and Technology. 24, 6, p. 1-10 065016Research output: Contribution to journal › Article › Academic › peer-review
density distribution
argon
decay
gas pressure
photoionization
Revealing an intermediate region between the collisional radiofrequency plasma bulk and its sheath
Beckers, J., Trienekens, D. J. M. & Kroesen, G. M. W., 18 Mar 2015, In : Physical Review E. 91, 3, p. 1-5 033109Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
collisional plasmas
sheaths
space charge
Plasma
parabolic flight
The temporal evolution of electrons in EUV-induced plasmas
Horst, van der, R. M., Beckers, J., Osorio, E. A. & Banine, V. Y., 28 Jul 2015, Proceedings of the 32st International Conference of Plasmas and Ionized Gases.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open Access
File
gas pressure
cavities
microwaves
ambipolar diffusion
electrons
2014
Electron density in an Extreme Ultra-Violet generated plasma
Horst, van der, R. M., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2014, Presentation at the congress of Physics@FOM, January 21-22, 2014, Veldhoven, The Netherlands.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
Open Access
File
cavities
lithography
argon
microwaves
miniaturization
Experimental method to determine the electron density in EUV-induced plasmas
Horst, van der, R. M., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2014Research output: Contribution to conference › Poster › Academic
Exploring the temporally resolved electron density evolution in extreme ultra-violet induced plasmas
Horst, van der, R. M., Beckers, J., Nijdam, S. & Kroesen, G. M. W., 30 Jul 2014, In : Journal of Physics D: Applied Physics. 47, 30, p. 302001-1/4 5 p.Research output: Contribution to journal › Article › Academic › peer-review
Carrier concentration
Plasmas
Photoionization
Impact ionization
Argon
Gliding arc in noble gases under normal and hypergravity conditions
Potočňáková, L., Šperka, J., Zikán, P., Van Loon, J. J. W. A., Beckers, J. & Kudrle, V., 21 Oct 2014, In : IEEE Transactions on Plasma Science. 42, 10, p. 2724-2725Research output: Contribution to journal › Article › Academic › peer-review
Ion energies in EUV induced plasma: Measuring methods
Ven, van de, T. H. M., Beckers, J., Osorio, E. A., Banine, V. Y. & Kroesen, G. M. W., 2014Research output: Contribution to conference › Poster › Academic
Open Access
File
Ions
Light scattering on dusty plasmas for enhanced color management in white LEDs
Schepers, L. P. T., Beckers, J., Tukker, T. W. & IJzerman, W. L., 2014Research output: Contribution to conference › Poster › Academic
Plasma accumulation effects in Extreme Ultra-Violet generated plasmas
Horst, van der, R. M., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2014, p. 1-1Research output: Contribution to conference › Poster › Academic
Open Access
File
cavities
lithography
microwaves
miniaturization
spectroscopy
Plasma and nanoparticles in cylindrical microwave cavities
Wetering, van de, F. M. J. H., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2014, Proceedings of the 26th Symposium Plasma Physics & Radiation Technology, 11-12 March 2014, Lunteren, the Netherlands. p. 79-79Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
Open Access
File
microwaves
nanoparticles
cavities
dust
acetylene
Plasmafysica en stof tot nadenken
Beckers, J., 2014, Het beste idee van 2014. Baijens, J. A. (ed.). Tilburg: De Wereld, p. 124-125 309 p.Research output: Chapter in Book/Report/Conference proceeding › Chapter › Popular
Plasma particle lofting
Heijmans, L. C. J., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2014Research output: Contribution to conference › Poster › Academic
lofting
adhesives
floating
electron flux