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Personal profile

Quote

The complexity of a lithographic tool, in our field requiring sub-nanometer positioning accuracy while exerting thousands of Newtons, continues to amaze. Its success requires teamwork of people in all disciplines.

Research profile

Hans Butler is a part-time professor in the Control Systems group of the Department of Electrical Engineering at Eindhoven University of Technology. He specializes in lithographic scanner control, an area of expertise he has built through a long career at ASML, where he is also a Fellow. Butler is a specialist in dynamics and control systems. 

As a control engineer, Butler has worked at ASML on multiple components of lithographic tools, such as handlers, illuminators, projection systems and stages. Within ASML's Mechatronic Systems Development Department, he has led groups working on actuators, opto-mechatronics, and vibration isolation and damping. Butler is an ASML fellow with dynamics and control as main focus area, in particular in relation to the imaging process. Improving the positioning accuracy from a perspective of dynamics and control has always been the guiding interest throughout his career.  

 

Academic background

Hans Butler holds an MSc (1986) and PhD (1990) degree from Delft University of Technology. In 1991, he joined ASML, where he has led groups working on actuators, opto-mechatronics, dynamics, vibration isolation and damping. In 2002, he became group leader of the Drives group, moving to the System Dynamics group in 2006. In 2010, Butler became an ASML fellow. In 2012 he was appointed part-time professor in Lithographic Scanner Control at Eindhoven University of Technology.

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Research Output

Active compensation of the deformation of a magnetically levitated mover of a planar motor

Custers, C., Proimadis, I., Jansen, J. W. H., Butler, H., Toth, R., Lomonova, E. & Van den Hof, P., May 2019, 2019 IEEE International Electric Machines and Drives Conference, IEMDC 2019. Piscataway: Institute of Electrical and Electronics Engineers, p. 854-861 8 p. 8785302

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
  • 92 Downloads (Pure)

    Data-driven neural feedforward controller design for industrial linear motors

    Yuen, Y. H., Lazar, M. & Butler, H., Oct 2019, 2019 23rd International Conference on System Theory, Control and Computing, ICSTCC 2019 - Proceedings. Precup, R-E. (ed.). Piscataway: Institute of Electrical and Electronics Engineers, p. 461-467 7 p. 8885434

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

  • 4 Downloads (Pure)

    Mixed feedback and feedforward control design for multi-axis vibration isolation systems

    Beijen, M. A., Heertjes, M. F., Butler, H. & Steinbuch, M., 1 Aug 2019, In : Mechatronics. 61, p. 106-116 11 p.

    Research output: Contribution to journalArticleAcademicpeer-review

  • 1 Citation (Scopus)
    9 Downloads (Pure)

    A method to guarantee local convergence for sequential quadratic programming with poor Hessian approximation

    Nguyen, T. T., Lazar, M. & Butler, H., 18 Jan 2018, 2017 IEEE 56th Annual Conference on Decision and Control, CDC 2017. Piscataway: Institute of Electrical and Electronics Engineers, p. 3781-3786 6 p.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

  • 1 Citation (Scopus)

    An instrumental variable method for closed-loop identification of coreless linear motors

    Nguyen, T. T., Lazar, M., Butler, H. & Van den Hof, P. M. J., 9 Aug 2018, 2018 Annual American Control Conference, ACC 2018. Institute of Electrical and Electronics Engineers, Vol. 2018-June. p. 5219-5224 6 p.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

  • 1 Citation (Scopus)
    5 Downloads (Pure)

    Courses

    Student theses

    Active damping for charge driven piezoelectric nanopositioning stage using self sensing control

    Author: Di Filippo, R., 19 Sep 2018

    Supervisor: Weiland, S. (Supervisor 1), Butler, H. (Supervisor 2), Jansen, B. (External coach) & Vandervelden, R. (External person) (External coach)

    Student thesis: Master

    Active damping of lenstop vibrations

    Author: Verbeek, T., 31 Dec 2000

    Supervisor: Butler, H. (Supervisor 1), Damen, A. (Supervisor 2) & Heemels, W. (Supervisor 2)

    Student thesis: Master

    File

    Adaptive friction compensation for an industrial coreless linear motor setup

    Author: van den Boom, P., 13 Dec 2018

    Supervisor: Nguyen, T. (Supervisor 1), Lazar, M. (Supervisor 2) & Butler, H. (Supervisor 2)

    Student thesis: Master

    Adaptive observer for state and parameter estimation applied to a wafe stage

    Author: Aslan, O., 31 Aug 2015

    Supervisor: Butler, H. (Supervisor 1)

    Student thesis: Master