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Personal profile

Quote

The complexity of a lithographic tool, in our field requiring sub-nanometer positioning accuracy while exerting thousands of Newtons, continues to amaze. Its success requires teamwork of people in all disciplines.

Research profile

Hans Butler is a part-time professor in the Control Systems group of the Department of Electrical Engineering at Eindhoven University of Technology. He specializes in lithographic scanner control, an area of expertise he has built through a long career at ASML, where he is also a Fellow. Butler is a specialist in dynamics and control systems. 

As a control engineer, Butler has worked at ASML on multiple components of lithographic tools, such as handlers, illuminators, projection systems and stages. Within ASML's Mechatronic Systems Development Department, he has led groups working on actuators, opto-mechatronics, and vibration isolation and damping. Butler is an ASML fellow with dynamics and control as main focus area, in particular in relation to the imaging process. Improving the positioning accuracy from a perspective of dynamics and control has always been the guiding interest throughout his career.  

 

Academic background

Hans Butler holds an MSc (1986) and PhD (1990) degree from Delft University of Technology. In 1991, he joined ASML, where he has led groups working on actuators, opto-mechatronics, dynamics, vibration isolation and damping. In 2002, he became group leader of the Drives group, moving to the System Dynamics group in 2006. In 2010, Butler became an ASML fellow. In 2012 he was appointed part-time professor in Lithographic Scanner Control at Eindhoven University of Technology.

Fingerprint Dive into the research topics where Hans Butler is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

Controllers Engineering & Materials Science
Feedforward control Engineering & Materials Science
Feedback Engineering & Materials Science
Linear motors Engineering & Materials Science
Electric commutation Engineering & Materials Science
Actuators Engineering & Materials Science
Disturbance rejection Engineering & Materials Science
Position control Engineering & Materials Science

Network Recent external collaboration on country level. Dive into details by clicking on the dots.

Research Output 1999 2019

Active compensation of the deformation of a magnetically levitated mover of a planar motor

Custers, C., Proimadis, I., Jansen, J. W., Butler, H., Toth, R., Lomonova, E. & Van den Hof, P., 2019, 2019 IEEE International Electric Machines & Drives Conference (IEMDC). Piscataway: Institute of Electrical and Electronics Engineers, p. 854-861 8785302

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
commutation
coils
flexible bodies
translators
stators
1 Citation (Scopus)

Mixed feedback and feedforward control design for multi-axis vibration isolation systems

Beijen, M. A., Heertjes, M. F., Butler, H. & Steinbuch, M., 1 Aug 2019, In : Mechatronics. 61, p. 106-116 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Feedforward control
Feedback control
Feedback
Amplification
Sensors

Towards control relevant system design and constrained order controller synthesis: with a thermal control application in immersion lithography

Merks, R. W. H., 25 Sep 2019, (Accepted/In press) Eindhoven: Technische Universiteit Eindhoven. 257 p.

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)Academic

Open Access
File
1 Citation (Scopus)

A method to guarantee local convergence for sequential quadratic programming with poor Hessian approximation

Nguyen, T. T., Lazar, M. & Butler, H., 18 Jan 2018, 2017 IEEE 56th Annual Conference on Decision and Control, CDC 2017. Piscataway: Institute of Electrical and Electronics Engineers, p. 3781-3786 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Quadratic programming
Local Convergence
Quadratic Programming
Approximation
Nonlinear Optimization

An instrumental variable method for closed-loop identification of coreless linear motors

Nguyen, T. T., Lazar, M., Butler, H. & Van den Hof, P. M. J., 9 Aug 2018, 2018 Annual American Control Conference, ACC 2018. Institute of Electrical and Electronics Engineers, Vol. 2018-June, p. 5219-5224 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Linear motors
Dynamical systems
Demonstrations

Courses

Student theses

Active damping for charge driven piezoelectric nanopositioning stage using self sensing control

Author: Di Filippo, R., 19 Sep 2018

Supervisor: Weiland, S. (Supervisor 1), Butler, H. (Supervisor 2), Jansen, B. (External coach) & Vandervelden, R. (External person) (External coach)

Student thesis: Master

Active damping of lenstop vibrations

Author: Verbeek, T., 31 Dec 2000

Supervisor: Butler, H. (Supervisor 1), Damen, A. (Supervisor 2) & Heemels, W. (Supervisor 2)

Student thesis: Master

File

Adaptive friction compensation for an industrial coreless linear motor setup

Author: van den Boom, P., 13 Dec 2018

Supervisor: Nguyen, T. (Supervisor 1), Lazar, M. (Supervisor 2) & Butler, H. (Supervisor 2)

Student thesis: Master

Adaptive observer for state and parameter estimation applied to a wafe stage

Author: Aslan, O., 31 Aug 2015

Supervisor: Butler, H. (Supervisor 1)

Student thesis: Master