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Personal profile

Quote

“I see a future where humanity will solve many challenges in data, energy and life sciences by a continuous miniaturization in device fabrication, down to the atomic scale.”  

Research profile

Hamed Sadeghian is an Associate Professor and Chair of Nano-Optomechatronics Instrumentation development at the Mechanical Engineering Department at Eindhoven University of Technology (TU/e). His areas of expertise include 3D nanomanufacturing, System architecture, optomechatronics, nanometrology and nano-optomechatronics instruments (NOMI).

His research interest is to develop instruments where the core is based on interaction of electromagnetic or mechanical waves with matters, where often nonlinearities and dynamics at the nano-scales plays important role. Examples are development of the parallel AFM as a sub-nm, high throughput metrology and inspection solution for Semiconductor industry, high resolution optical microscopy with meta-instruments, 3D nanotomography (subsurface nanoimaging) to resolve invisible nanostructures under the surface and bio-instruments for ultra-early cancer diagnosis and identification of viruses.

Hamed’s ambition and passion is to develop technologies that enable exploration and exploitation of the atom-scale world level leading to the real-world applications as well as valorize inventions through collaboration with industrial partners. This also includes acting as an incubator to start new/joint ventures. These create the instruments to image, measure and fabricate devices at the level of individual atoms at a humanly acceptable and economically attractive level.

Academic background

Hamed Sadeghian received his PhD (with honors) in 2010 from Delft University of Technology. He continued his career as a Postdoctoral fellow, developing several sensing and instrumentation methods. In 2014, he also received his MBA from Leuven Vlerick Business School, Belgium. He was also co-founder, CTO and Managing Director of Nearfield Instrument B.V., to industrialize nanometrology equipment for the Semiconductor Industry.

In addition to his work at TU/e, Hamed is currently Scientific Director and Principal Scientist of NOMI program at TNO, where together with his team, he invented and developed the parallel AFM as a sub-nm, high throughput metrology and inspection solution for Semicon market.

He holds more than 40 patents, and has authored more than 70 technical papers and co-authored a book. He is a member of editorial advisory board of Sensors & Transducers Journal. He is also a member of technical committee of SENSORDEVICES conference since 2010 till present. He is also a recipient of several best paper awards. In 2012 he was awarded the title ‘TNO excellent researcher’.

Affiliated with

  • TNO (https://www.tno.nl/en/collaboration/expertise/early-research-programme/3d-nano-manufacturing-instruments/)
  • Nearfield Instrument BV (http://nearfieldinstruments.com/ )

Partners in (semi-)industry

  • TNO
  • Nearfield Instruments BV
  • Samsung Electronics
  • ASML
  • Swiss Litho

Network Recent external collaboration on country level. Dive into details by clicking on the dots.

Research Output 2017 2019

  • 12 Citations
  • 5 Conference contribution
  • 5 Article
  • 1 Pd Eng Thesis

Optimization of acoustic coupling for bottom actuated scattering based subsurface scanning probe microscopy

van Neer, P. L. M. J., Quesson, B., van Riel, M., van Es, M. H., Hatakeyama, K., Mohtashami, A., Piras, D., Duivenoorde, T., Lans, M. & Sadeghian Marnani, H., 1 Jul 2019, In : Review of Scientific Instruments. 90, 7, 10 p., 073705

Research output: Contribution to journalArticleAcademicpeer-review

acoustic coupling
Scanning probe microscopy
Acoustics
Scattering
microscopy
1 Citation (Scopus)

Design and simulation of atomic force profiling of high aspect ratio samples using 2D subresonant force spectroscopy

Biemond, J. J. B., Herfst, R. W., Mashaghi, S., Dekker, B., Bijnagte, T. & Sadeghian, H., 30 Aug 2018, AIM 2018 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics. Institute of Electrical and Electronics Engineers, p. 136-143 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Aspect ratio
Spectroscopy
Force measurement
Elastic deformation
Atomic force microscopy

Image-based overlay and alignment metrology through optically opaque media with sub-surface probe microscopy

van Es, M. H., Mohtashami, A., Piras, D. & Sadeghian, H., 1 Jan 2018, Metrology, Inspection, and Process Control for Microlithography XXXII. Bellingham: SPIE, 8 p. 105850R. (Proceedings of SPIE; vol. 10585)

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Metrology
Overlay
Microscopy
metrology
Microscopic examination

Integrated optomechanical displacement sensor based on a photonic crystal cavity

Galeotti, F., Sersic-Vollenbroek, I., Petruzzella, M., Pagliano, F., Zobenica, Z., van Otten, F. W. M., Marnani, H. S., van der Heijden, R. & Fiore, A., 4 Sep 2018, International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings. IEEE Computer Society, MO-3.4

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Electromechanical devices
Photonic crystals
Atomic force microscopy
Waveguides
Membranes