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Dive into the research topics where Guillaume Krieger is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
- 1 Similar Profiles
Collaborations and top research areas from the last five years
Recent external collaboration on country/territory level. Dive into details by clicking on the dots or
Projects
- 1 Active
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TKI-HTSM/24.0176 - ASPEA: Atomic-Scale Processing Equipment for the Ångstrom Era
Mackus, A. J. M. (Project Manager), Macco, B. (Project member), Kessels, W. M. M. (Project member), Lam, C. H. X. (Project member), van Gurp, M. C. (Project member), Krieger, G. (Project member), Vacancy PHD (Project member), Janssen, T. (Project member), Trevisan, A. (Project member) & Vacancy Postdoc (Project member)
1/01/24 → 31/12/29
Project: Third tier
Research output
- 2 Article
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Atomic Layer Etching of Nickel Using N2/H2 Plasma Exposure and Hexafluoroacetylacetone
Mohamed Ali, A. (Corresponding author), Krieger, G. F., Soulié, J.-P., Knoops, H., Kessels, W. M. M., De Gendt, S., Kundu, S. & de Marneffe, J.-F., 12 May 2026, In: ACS Applied Electronic Materials. 8, 9, p. 3834-3842 9 p.Research output: Contribution to journal › Article › Academic › peer-review
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Atomic layer etching of TiN by oxidation and SF6-H2 plasma exposure: ALE window defined by HF, H, and F
Krieger, G. (Corresponding author), Peeters, S. A., Vonken, B., Chittock, N., Mackus, A. J. M., Kessels, W. M. M. & Knoops, H. (Corresponding author), 10 Nov 2025, In: Applied Physics Letters. 127, 19, 6 p., 191606 .Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile1 Link opens in a new tab Citation (Scopus)24 Downloads (Pure)
Prizes
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Outstanding oral presentation Award
KG Krieger, G. (Recipient), 21 Nov 2024
Prize: Other › Career, activity or publication related prizes (lifetime, best paper, poster etc.) › Scientific