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Personal profile

Research profile

Fred Roozeboom is Full Professor in the Plasma and Materials Processing group in the Applied Physics department at Eindhoven University of Technology (TU/e). Roozeboom’s research interests include ultrathin-film technology, plasma processing, spatial ALD (including roll-to-roll), RTP, reactive ion etching, 3D passive and heterogeneous integration, microsystem technology, Li-ion microbatteries, sensors, and displays.

As Associate Professor at TU/e, Roozeboom previously led a team working on silicon-based 3D passives and Li-ion microbatteries, and heterogeneous integration into System-in-Package products in wireless communication, power management and digital signal processing. For part of this work he received the Bronze Award of the ‘NXP Invention of the Year 2007’ and became an NXP Research Fellow.

In 2009, Roozeboom left NXP and joined TNO as a senior technical advisor working in a team specializing in spatial atmospheric Atomic Layer Deposition and other high-speed processing. In 2011, the spatial processing team received the 2nd EARTO Innovation Prize Award.

As a member of The Electrochemical Society, Roozeboom serves or has served as a member-at-large of the Electronics and Photonics Division.

Academic background

Fred Roozeboom received his MSc in Chemistry (cum laude) from Utrecht University in 1976 and his PhD in Chemical Engineering in 1980 from Twente University. From 1980 to 1983, he worked on zeolite catalysis with Exxon R&D Labs, first in Baton Rouge, USA (1980 to 1982), and then with Exxon Chemicals in Rotterdam (1983). In 1983, he joined Philips Research (since 2006: NXP Research) in Eindhoven. Roozeboom became part-time professor within the Plasma & Materials Processing group in the Applied Physics department at Eindhoven University of Technology (TU/e) in 2007. He left Philips in 2009, after working on various projects there since 1983, to become Senior Technical Advisor at TNO Science & Technology.

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Research Output 1980 2018

1 Citations

Anti-stiction coating for mechanically tunable photonic crystal devices

Petruzzella, M., Zobenica, Cotrufo, M., Zardetto, V., Mameli, A., Pagliano, F., Koelling, S., Van Otten, F. W. M., Roozeboom, F., Kessels, W. M. M., van der Heijden, R. W. & Fiore, A., 19 Feb 2018, In : Optics Express. 26, 4, p. 3882-3891 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
stiction
photonics
coatings
atomic layer epitaxy
frequency modulation
2 Citations

Atmospheric plasma-enhanced spatial-ALD of lnZnO for high mobility thin film transistors

Illiberi, A., Katsouras, I., Gazibegovic, S., Cobb, B., Nekovic, E., van Boekel, W., Frijters, C. H., Maas, J., Roozeboom, F., Creyghton, Y. L. M., Poodt, P. & Gelinck, G. H., 14 Feb 2018, In : Journal of Vacuum Science and Technology. A: Vacuum, Surfaces, and Films. 36, 4, 7 p., 04F401

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
Zinc Oxide
Atomic layer deposition
Thin film transistors
atomic layer epitaxy
Zinc oxide

Atmospheric spatial atomic layer deposition of ZnOS buffer layers for flexible Cu(In,Ga)Se-2 solar cells

Illiberi, A., Frijters, C., Ruth, M., Bremaud, D., Poodt, P., Roozeboom, F. & Bolt, P. J., Sep 2018, In : Journal of Vacuum Science and Technology. A: Vacuum, Surfaces, and Films. 36, 5, 7 p., 051511

Research output: Contribution to journalArticleAcademicpeer-review

Dopant distribution in atomic layer deposited ZnO:Al films visualized by transmission electron microscopy and atom probe tomography

Wu, Y., Giddings, A. D., Verheijen, M. A., Macco, B., Prosa, T. J., Larson, D. J., Roozeboom, F. & Kessels, W. M. M., 27 Feb 2018, In : Chemistry of Materials. 30, 4, p. 1209-1217 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Tomography
Doping (additives)
Transmission electron microscopy
Atoms
Atomic layer deposition

Isotropic atomic layer etching of ZnO using Acetylacetone and O2 plasma

Mameli, A., Verheijen, M. A., Mackus, A. J. M., Kessels, W. M. M. & Roozeboom, F., 7 Nov 2018, In : ACS Applied Materials & Interfaces. 10, 44, p. 38588-38595 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Etching
Plasmas
Nanowires
acetylacetone
Spectroscopic ellipsometry

Activities 2011 2018

  • 8 Editorial activity
  • 2 Invited talk
  • 1 Contributed talk

Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma

Mameli, A. (Member), Verheijen, M. (Member), Karasulu, B. (Member), Mackus, A. (Member), Kessels, E. (Member), Roozeboom, F. (Invited speaker)
24 Jul 201828 Jul 2018

Activity: Talk or presentationInvited talkScientific

New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide

Mameli, A. (Member), Verheijen, M. (Member), Karasulu, B. (Member), Mackus, A. (Member), Kessels, E. (Member), Roozeboom, F. (Speaker)
30 Sep 20184 Oct 2018

Activity: Talk or presentationContributed talkScientific

lnZnO grown by atmospheric plasma-enhanced spatial atomic layer deposition for application in high-mobility TFT circuits

Roozeboom, F. (Speaker)
2 Jul 20176 Jul 2017

Activity: Talk or presentationInvited talkScientific

ECS Transactions (Journal)

Roozeboom, F. (Editor)
17 May 2017

Activity: Publication peer-review and editorial workEditorial activityScientific

ECS Transactions (Journal)

Roozeboom, F. (Editor)
6 Oct 2016

Activity: Publication peer-review and editorial workEditorial activityScientific

Press / Media

The creation of the modern laptop

Peter Notten & Fred Roozeboom

16/06/15

1 item of media coverage

Press/Media: Expert Comment

Student theses

Atomic layer deposition of In2O3: growth, morphology and hydrogen doping

Author: Vanhemel, D., 31 Mar 2015

Supervisor: Wu, Y. (Supervisor 1), Roozeboom, F. (Supervisor 2) & Kessels, W. (Supervisor 2)

Student thesis: Master

File

Plasma-assisted ALD of TiN/Al2O3 stacks for MOS trench capacitor applications

Author: Hoogeland, D., 31 Dec 2008

Supervisor: Kessels, W. (Supervisor 1), Roozeboom, F. (External coach), Jinesh, K. (External person) (External coach) & Besling, W. (External person) (External coach)

Student thesis: Master

File

Through-wafer vias for system in package devices

Author: Yildirim, O., 31 Dec 2006

Supervisor: Karouta, F. (Supervisor 1), Roozeboom, F. (Supervisor 2), Klootwijk, J. (External person) (Supervisor 2) & Dekkers, W. (External person) (Supervisor 2)

Student thesis: Master

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