• 4829 Citations
1980 …2020

Research output per year

If you made any changes in Pure these will be visible here soon.

Personal profile

Research profile

Fred Roozeboom is Full Professor in the Plasma and Materials Processing group in the Applied Physics department at Eindhoven University of Technology (TU/e). Roozeboom’s research interests include ultrathin-film technology, plasma processing, spatial ALD (including roll-to-roll), RTP, reactive ion etching, 3D passive and heterogeneous integration, microsystem technology, Li-ion microbatteries, sensors, and displays.

As Associate Professor at TU/e, Roozeboom previously led a team working on silicon-based 3D passives and Li-ion microbatteries, and heterogeneous integration into System-in-Package products in wireless communication, power management and digital signal processing. For part of this work he received the Bronze Award of the ‘NXP Invention of the Year 2007’ and became an NXP Research Fellow.

In 2009, Roozeboom left NXP and joined TNO as a senior technical advisor working in a team specializing in spatial atmospheric Atomic Layer Deposition and other high-speed processing. In 2011, the spatial processing team received the 2nd EARTO Innovation Prize Award.

As a member of The Electrochemical Society, Roozeboom serves or has served as a member-at-large of the Electronics and Photonics Division.

Academic background

Fred Roozeboom received his MSc in Chemistry (cum laude) from Utrecht University in 1976 and his PhD in Chemical Engineering in 1980 from Twente University. From 1980 to 1983, he worked on zeolite catalysis with Exxon R&D Labs, first in Baton Rouge, USA (1980 to 1982), and then with Exxon Chemicals in Rotterdam (1983). In 1983, he joined Philips Research (since 2006: NXP Research) in Eindhoven. Roozeboom became part-time professor within the Plasma & Materials Processing group in the Applied Physics department at Eindhoven University of Technology (TU/e) in 2007. He left Philips in 2009, after working on various projects there since 1983, to become Senior Technical Advisor at TNO Science & Technology.

Fingerprint Dive into the research topics where Fred Roozeboom is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 15 Similar Profiles

Network Recent external collaboration on country level. Dive into details by clicking on the dots.

Research Output

Next-gen batteries: Enabled by spatial atomic layer interfacing

Unnikrishnan, S., Ameen, M., Anothumakkool, B., Haverkate, L., Grob, F. & Roozeboom, F., Jan 2020.

Research output: Contribution to conferencePaperAcademic

Area-selective atomic layer deposition of ZnO by area activation using electron beam-induced deposition

Mameli, A., Karasulu, B., Verheijen, M., Barcones Campo, B., Macco, B., Mackus, A., Kessels, E. & Roozeboom, F., 26 Feb 2019, In : Chemistry of Materials. 31, 4, p. 1250-1257 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
  • 10 Citations (Scopus)
    49 Downloads (Pure)

    Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al2O3

    Mione, M., Engeln, R., Vandalon, V., Kessels, E. & Roozeboom, F., 19 Aug 2019, In : Applied Physics Letters. 115, 8, 5 p., 083101.

    Research output: Contribution to journalArticleAcademicpeer-review

  • Preface

    Dow, W. P., Kondo, K., Hayase, M., Cvelbar, U. & Roozeboom, F., 1 Jan 2019, In : ECS Transactions. 92, 5, 1 p.

    Research output: Contribution to journalEditorialAcademicpeer-review

    Activities

    • 8 Editorial activity
    • 2 Invited talk
    • 1 Contributed talk

    New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide

    A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Speaker)
    30 Sep 20184 Oct 2018

    Activity: Talk or presentation typesContributed talkScientific

    Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma

    A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Invited speaker)
    24 Jul 201828 Jul 2018

    Activity: Talk or presentation typesInvited talkScientific

    lnZnO grown by atmospheric plasma-enhanced spatial atomic layer deposition for application in high-mobility TFT circuits

    F. Roozeboom (Speaker)
    2 Jul 20176 Jul 2017

    Activity: Talk or presentation typesInvited talkScientific

    ECS Transactions (Journal)

    Fred Roozeboom (Editor)
    17 May 2017

    Activity: Publication peer-review and editorial work typesEditorial activityScientific

    ECS Transactions (Journal)

    Fred Roozeboom (Editor)
    6 Oct 2016

    Activity: Publication peer-review and editorial work typesEditorial activityScientific

    Press / Media

    The creation of the modern laptop

    P.H.L. Notten & F. Roozeboom

    16/06/15

    1 item of Media coverage

    Press/Media: Expert Comment

    Student theses

    Atomic layer deposition of In2O3: growth, morphology and hydrogen doping

    Author: Vanhemel, D., 31 Mar 2015

    Supervisor: Wu, Y. (Supervisor 1), Roozeboom, F. (Supervisor 2) & Kessels, W. (Supervisor 2)

    Student thesis: Master

    File

    Plasma-assisted ALD of TiN/Al2O3 stacks for MOS trench capacitor applications

    Author: Hoogeland, D., 31 Dec 2008

    Supervisor: Kessels, W. (Supervisor 1), Roozeboom, F. (External coach), Jinesh, K. (External person) (External coach) & Besling, W. (External person) (External coach)

    Student thesis: Master

    File

    Through-wafer vias for system in package devices

    Author: Yildirim, O., 31 Dec 2006

    Supervisor: Karouta, F. (Supervisor 1), Roozeboom, F. (Supervisor 2), Klootwijk, J. (External person) (Supervisor 2) & Dekkers, W. (External person) (Supervisor 2)

    Student thesis: Master

    File