• 1906 Citations
20032014

Research output per year

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Student theses

Atomic layer deposition of metal oxides studied by in situ transmission infrared spectroscopy

Author: Bouman, M., 31 Dec 2008

Supervisor: Langereis, E. (Supervisor 1) & Kessels, W. (Supervisor 2)

Student thesis: Master

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Atomic layer deposition of Ruthenium thin films using oxygen

Author: Verkuijlen, R., 31 Dec 2009

Supervisor: Leick-Marius, N. (Supervisor 1), Langereis, E. (Supervisor 2) & Kessels, W. (Supervisor 2)

Student thesis: Master

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Plasma-assisted atomic layer deposition of Al2O3 studied by infrared transmission spectroscopy

Author: Keijmel, J., 29 Feb 2008

Supervisor: Langereis, E. (Supervisor 1), Kessels, W. (Supervisor 2) & van de Sanden, M. (Supervisor 2)

Student thesis: Master

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Remote plasma atomic layer deposition of TaNx films

Author: Knoops, H., 2007

Supervisor: van de Sanden, M. (Supervisor 1), Langereis, E. (Supervisor 2) & Kessels, W. (Supervisor 2)

Student thesis: Master

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