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Research Output 2003 2014

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Phd Thesis 1 (Research TU/e / Graduation TU/e)
2008
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Plasma-assisted atomic layer deposition : an in situ diagnostic study

Langereis, E., 2008, Eindhoven: Technische Universiteit Eindhoven. 176 p.

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

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Atomic layer deposition
Plasmas
Infrared spectroscopy
Spectroscopic ellipsometry
Metals