• 1888 Citations
20032014
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Research Output 2003 2014

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Poster
2006

Plasma-assisted atomic layer deposition of AI2O3 films

Heil, S. B. S., Langereis, E., Sanden, van de, M. C. M. & Kessels, W. M. M., 2006, p. A 18-.

Research output: Contribution to conferencePosterAcademic

atomic layer epitaxy
atomic layer epitaxy
moisture
polymers