• 1942 Citations
20032014

Research output per year

If you made any changes in Pure these will be visible here soon.

Research Output

Filter
Other
2009

In-situ spectroscopic ellipsometry for atomic layer deposition

Langereis, E., Heil, S. B. S., Knoops, H. C. M., Keuning, W., Sanden, van de, M. C. M. & Kessels, W. M. M., 2009. 8 p.

Research output: Contribution to conferenceOtherAcademic

Plasma-assisted ALD : from basic understanding to successful commercialization

Kessels, W. M. M., Hodson, C. J., Fang, Q., Singh, N., Anderson, F., Keuning, W., Heil, S., Hemmen, van, H., Langereis, E. & Sanden, van de, M. C. M., 2009. 11 p.

Research output: Contribution to conferenceOtherAcademic

2 Downloads (Pure)