• 1888 Citations
20032014
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Fingerprint Dive into the research topics where Erik Langereis is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

Physics & Astronomy

Chemistry and Materials

atomic layer epitaxy
ruthenium
lanthanum oxides

General

ellipsometry
thin films

Physics

cycles
thermal plasmas

Engineering

nucleation

Aerospace Sciences

optical emission spectroscopy

Engineering & Materials Science

Atomic layer deposition
Plasmas
Spectroscopic ellipsometry
Lanthanum oxides
Plasma deposition
Optical emission spectroscopy

Chemical Compounds

Atomic layer deposition
Plasmas
Spectroscopic ellipsometry
Plasma deposition
Optical emission spectroscopy