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Content available in repository
Personal profile
Research profile
Starting April 2023, Erik Langereis works as University Lecturer at the department of Applied Physics & Science Education. Having obtained his PhD on research of Plasma-Assisted Atomic Layer Deposition (2008) as a versatile technique to deposit ultrathin films with ultimate control and conformality, he now is back at the department to fully focus on education and teaching. And with a drive to find inspiring ways to link the departmental research to the several bachelor courses.
Quote
"With my enthusiam and fascination for physics and education, I like to train the next-generation TU/e professionals in recognizing the value of physics understanding for their careers. Hope to clearly integrate and connect to inspiring research and innovation at TU/e."
External positions
Managing Director, Stichting Metalot Circularity Centre
Sept 2021 → Oct 2022
Research Development Officer, DIFFER Dutch Institute for Fundamental Energy Research
May 2013 → Jul 2021
Fingerprint
Dive into the research topics where Erik Langereis is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
- 1 Similar Profiles
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Dielectric material options for integrated capacitors
Ruhl, G., Lehnert, W., Lukosius, M., Wenger, C., Baristiran Kaynak, C., Blomberg, T., Haukka, S., Baumann, P. K., Besling, W. F. A., Roest, A. L., Riou, B., Lhostis, S., Halimaou, A., Roozeboom, F., Langereis, E., Kessels, W. M. M., Zauner, A. & Rushworth, S. A., 2014, In: ECS Journal of Solid State Science and Technology. 3, 8, p. N120-N125 6 p.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile5 Citations (Scopus)922 Downloads (Pure) -
Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
Knoops, H. C. M., Langereis, E., Sanden, van de, M. C. M. & Kessels, W. M. M., 2012, In: Journal of Vacuum Science and Technology A. 30, 1, p. 01A101-1/10 10 p., 01A101.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile23 Citations (Scopus)270 Downloads (Pure) -
Atomic layer deposition of Ru from CpRu(CO2)Et using O2 gas and O2 plasma
Leick, N., Verkuijlen, R. O. F., Lamagna, L., Langereis, E., Rushworth, S. A., Roozeboom, F., Sanden, van de, M. C. M. & Kessels, W. M. M., 2011, In: Journal of Vacuum Science and Technology A. 29, 2, p. 021016-1/7 7 p., 021016.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile52 Citations (Scopus)204 Downloads (Pure) -
Remote plasma ALD of SrTiO3 using cyclopentadienlyl-based Ti and Sr precursors
Langereis, E., Roijmans, R. F. H., Roozeboom, F., Sanden, van de, M. C. M. & Kessels, W. M. M., 2011, In: Journal of the Electrochemical Society. 158, 2, p. G34-G38Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile32 Citations (Scopus)215 Downloads (Pure) -
3D-integrated all-solid-state capacitors
Roozeboom, F., Langereis, E., Leick, N., Sanden, van de, M. C. M., Kessels, W. M. M., Klootwijk, J. H., Dekkers, W., Tois, E., Tuominen, M., Lamy, Y., Jinesh, K. B., Besling, W. F. A., Roest, A. & Bunel, C., 2010, Invited presentation at Symposium FD on ‘Electrochemical Energy Storage Systems: the Next Evolution’ of the Forum on New Materials, Montcatini Terme, June 13-18, 2010. p. FD-2:IL05-Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
1 Downloads (Pure)
Activities
- 1 Contributed talk
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52nd Society of Vacuum Coaters Annual Technical Conference, Santa Clara, USA
Erik Langereis (Speaker)
1 May 2009Activity: Talk or presentation types › Contributed talk › Scientific
Courses
Thesis
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New experimental setup for surface studies during silicon-based film growth: radical sources and hydrogen-induced etching experiments
Author: Langereis, E., 31 Dec 2003Supervisor: Hoefnagels, J. P. M. (Supervisor 1), Kessels, W. M. M. (Supervisor 2) & van de Sanden, M. C. M. (Supervisor 2)
Student thesis: Master
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