Research Output per year
Research Output per year
dr.ir.
Research output per year
After my graduation on "New experimental setup for surface studies during silicon-based film growth: radical sources and hydrogen-induced etching experiments" in the Equilibrium and Transport in Plasmas (ETP, 2006 ® renamed to Plasma & materials Processing (PMP)) research group at Eindhoven University of Technology, I currently (t ³ Feb. 2004) work as PhD student in the same group on the topic of "Plasma-assisted atomic layer deposition". I mainly focus on the fundamentals of the film growth by studying the process by in situ spectroscopic ellipsometry and other ex situ analysis. More information on this research area can be found on the PMP internet site http://www.phys.tue.nl/pmp
Research output: Contribution to journal › Article › Academic › peer-review
Research output: Contribution to journal › Article › Academic › peer-review
Research output: Contribution to journal › Article › Academic › peer-review
Research output: Contribution to journal › Article › Academic › peer-review
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
Erik Langereis (Speaker)
Activity: Talk or presentation types › Contributed talk › Scientific
Supervisor: Hoefnagels, J. (Supervisor 1), Kessels, W. (Supervisor 2) & van de Sanden, M. (Supervisor 2)
Student thesis: Master