Erik Langereis

Personal profile

Research profile

After my graduation on "New experimental setup for surface studies during silicon-based film growth: radical sources and hydrogen-induced etching experiments" in the Equilibrium and Transport in Plasmas (ETP, 2006 ® renamed to Plasma & materials Processing (PMP)) research group at Eindhoven University of Technology, I currently (t ³ Feb. 2004) work as PhD student in the same group on the topic of "Plasma-assisted atomic layer deposition". I mainly focus on the fundamentals of the film growth by studying the process by in situ spectroscopic ellipsometry and other ex situ analysis. More information on this research area can be found on the PMP internet site http://www.phys.tue.nl/pmp

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Research Output

1906 Citations
23 Article
22 Conference contribution
2 Other
2 Poster
1 More
- 1 Phd Thesis 1 (Research TU/e / Graduation TU/e)

Dielectric material options for integrated capacitors

Ruhl, G., Lehnert, W., Lukosius, M., Wenger, C., Baristiran Kaynak, C., Blomberg, T., Haukka, S., Baumann, P. K., Besling, W. F. A., Roest, A. L., Riou, B., Lhostis, S., Halimaou, A., Roozeboom, F., Langereis, E., Kessels, W. M. M., Zauner, A. & Rushworth, S. A., 2014, In : ECS Journal of Solid State Science and Technology. 3, 8, p. N120-N125 6 p.

Research output: Contribution to journal › Article › Academic › peer-review

Open Access

File

3 Citations (Scopus)

431 Downloads (Pure)

Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas

Knoops, H. C. M., Langereis, E., Sanden, van de, M. C. M. & Kessels, W. M. M., 2012, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 30, 1, p. 01A101-1/10 10 p., 01A101.

Research output: Contribution to journal › Article › Academic › peer-review

Open Access

File

12 Citations (Scopus)

100 Downloads (Pure)

Atomic layer deposition of Ru from CpRu(CO2)Et using O2 gas and O2 plasma

Leick, N., Verkuijlen, R. O. F., Lamagna, L., Langereis, E., Rushworth, S. A., Roozeboom, F., Sanden, van de, M. C. M. & Kessels, W. M. M., 2011, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 29, 2, p. 021016-1/7 7 p., 021016.

Research output: Contribution to journal › Article › Academic › peer-review

Open Access

File

40 Citations (Scopus)

91 Downloads (Pure)

Remote plasma ALD of SrTiO3 using cyclopentadienlyl-based Ti and Sr precursors

Langereis, E., Roijmans, R. F. H., Roozeboom, F., Sanden, van de, M. C. M. & Kessels, W. M. M., 2011, In : Journal of the Electrochemical Society. 158, 2, p. G34-G38

Research output: Contribution to journal › Article › Academic › peer-review

Open Access

File

30 Citations (Scopus)

76 Downloads (Pure)

3D-integrated all-solid-state capacitors

Roozeboom, F., Langereis, E., Leick, N., Sanden, van de, M. C. M., Kessels, W. M. M., Klootwijk, J. H., Dekkers, W., Tois, E., Tuominen, M., Lamy, Y., Jinesh, K. B., Besling, W. F. A., Roest, A. & Bunel, C., 2010, Invited presentation at Symposium FD on ‘Electrochemical Energy Storage Systems: the Next Evolution’ of the Forum on New Materials, Montcatini Terme, June 13-18, 2010. p. FD-2:IL05-

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Activities

1 Contributed talk