• 1906 Citations
20032014

Research output per year

If you made any changes in Pure these will be visible here soon.

Personal profile

Research profile

After my graduation on "New experimental setup for surface studies during silicon-based film growth: radical sources and hydrogen-induced etching experiments" in the Equilibrium and Transport in Plasmas (ETP, 2006 ® renamed to Plasma & materials Processing (PMP)) research group at Eindhoven University of Technology, I currently (t ³ Feb. 2004) work as PhD student in the same group on the topic of "Plasma-assisted atomic layer deposition". I mainly focus on the fundamentals of the film growth by studying the process by in situ spectroscopic ellipsometry and other ex situ analysis. More information on this research area can be found on the PMP internet site http://www.phys.tue.nl/pmp

Fingerprint Dive into the research topics where Erik Langereis is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 11 Similar Profiles

Research Output

Dielectric material options for integrated capacitors

Ruhl, G., Lehnert, W., Lukosius, M., Wenger, C., Baristiran Kaynak, C., Blomberg, T., Haukka, S., Baumann, P. K., Besling, W. F. A., Roest, A. L., Riou, B., Lhostis, S., Halimaou, A., Roozeboom, F., Langereis, E., Kessels, W. M. M., Zauner, A. & Rushworth, S. A., 2014, In : ECS Journal of Solid State Science and Technology. 3, 8, p. N120-N125 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
  • 3 Citations (Scopus)
    431 Downloads (Pure)
    Open Access
    File
  • 12 Citations (Scopus)
    100 Downloads (Pure)

    Atomic layer deposition of Ru from CpRu(CO2)Et using O2 gas and O2 plasma

    Leick, N., Verkuijlen, R. O. F., Lamagna, L., Langereis, E., Rushworth, S. A., Roozeboom, F., Sanden, van de, M. C. M. & Kessels, W. M. M., 2011, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 29, 2, p. 021016-1/7 7 p., 021016.

    Research output: Contribution to journalArticleAcademicpeer-review

    Open Access
    File
  • 40 Citations (Scopus)
    91 Downloads (Pure)

    Remote plasma ALD of SrTiO3 using cyclopentadienlyl-based Ti and Sr precursors

    Langereis, E., Roijmans, R. F. H., Roozeboom, F., Sanden, van de, M. C. M. & Kessels, W. M. M., 2011, In : Journal of the Electrochemical Society. 158, 2, p. G34-G38

    Research output: Contribution to journalArticleAcademicpeer-review

    Open Access
    File
  • 30 Citations (Scopus)
    76 Downloads (Pure)

    3D-integrated all-solid-state capacitors

    Roozeboom, F., Langereis, E., Leick, N., Sanden, van de, M. C. M., Kessels, W. M. M., Klootwijk, J. H., Dekkers, W., Tois, E., Tuominen, M., Lamy, Y., Jinesh, K. B., Besling, W. F. A., Roest, A. & Bunel, C., 2010, Invited presentation at Symposium FD on ‘Electrochemical Energy Storage Systems: the Next Evolution’ of the Forum on New Materials, Montcatini Terme, June 13-18, 2010. p. FD-2:IL05-

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Activities

    • 1 Contributed talk

    52nd Society of Vacuum Coaters Annual Technical Conference, Santa Clara, USA

    Erik Langereis (Speaker)
    1 May 2009

    Activity: Talk or presentation typesContributed talkScientific

    Student theses

    Atomic layer deposition of metal oxides studied by in situ transmission infrared spectroscopy

    Author: Bouman, M., 31 Dec 2008

    Supervisor: Langereis, E. (Supervisor 1) & Kessels, W. (Supervisor 2)

    Student thesis: Master

    File

    Atomic layer deposition of Ruthenium thin films using oxygen

    Author: Verkuijlen, R., 31 Dec 2009

    Supervisor: Leick-Marius, N. (Supervisor 1), Langereis, E. (Supervisor 2) & Kessels, W. (Supervisor 2)

    Student thesis: Master

    File

    Plasma-assisted atomic layer deposition of Al2O3 studied by infrared transmission spectroscopy

    Author: Keijmel, J., 29 Feb 2008

    Supervisor: Langereis, E. (Supervisor 1), Kessels, W. (Supervisor 2) & van de Sanden, M. (Supervisor 2)

    Student thesis: Master

    File

    Remote plasma atomic layer deposition of TaNx films

    Author: Knoops, H., 2007

    Supervisor: van de Sanden, M. (Supervisor 1), Langereis, E. (Supervisor 2) & Kessels, W. (Supervisor 2)

    Student thesis: Master

    File