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Projects
- 1 Finished
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Particle Charging and Release under EUV conditions
Beckers, J., Shefer, D., Platier, B. & Marvi, Z.
30/11/18 → 31/01/23
Project: Research direct
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The impact of hydrogen plasma on the structure and morphology of tin and lead micrometer sized particles
Shefer, D., Nikipelov, A., van de Kerkhof, M., Marvi, Z., Banine, V. & Beckers, J., 23 Feb 2023, In: Journal of Physics D: Applied Physics. 56, 8, 9 p., 085204.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile8 Downloads (Pure) -
Morphology change and release of tin and lead micro-particles from substrates in hydrogen plasma
Shefer, D., Nikipelov, A., van de Kerkhof, M., Banine, V. & Beckers, J., 2021, Extreme Ultraviolet (EUV) Lithography XII. Felix, N. M. & Lio, A. (eds.). SPIE, 8 p. 116091F. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 11609).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
1 Citation (Scopus)