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Personal profile

Research profile

David van den Hurk was born on November 8th 1988 in Oss, The Netherlands. He received his B.Eng degree in Mechatronics, from Fontys University of Applied Sciences in June 2013. Here his thesis was on the application of self-sensing piezo actuators in lithography equipment. In June 2016 he received his MSc. Degree in Systems and Control (with great appreciation), from Eindhoven University of Technology, where his graduation thesis was titled: “Calibration and Validation of a Multiphysics Mirror Heating Model in EUV Lithography”.  Currently, he is a PhD candidate at the Control Systems group on the subject “Active Wafer Table Curvature Control for EUV Lithography” under the supervision of prof. dr. S. Weiland. The research is carried out in cooperation with ASML.  

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Research Output 2017 2019

  • 1 Citations
  • 2 Abstract
  • 1 Conference contribution
  • 1 Article

Control of thermo-mechanical wafer deformations in EUV lithography using an active wafer clamp

van den Hurk, D., Weiland, S. & van Berkel, K., 18 Oct 2019, In : IEEE Transactions on Semiconductor Manufacturing.

Research output: Contribution to journalArticleAcademicpeer-review

Extreme ultraviolet lithography
clamps
Clamping devices
lithography
wafers

Modeling and localized feedforward control of thermal deformations induced by a moving heat load

van den Hurk, D. P. M., Weiland, S. & van Berkel, K., 2018, p. 103

Research output: Contribution to conferenceAbstractAcademic

Open Access
File
1 Citation (Scopus)

Modeling and localized feedforward control of thermal deformations induced by a moving heat load

van den Hurk, D. P. M., Weiland, S. & van Berkel, K., 2018, 2018 SICE International Symposium on Control Systems (SICE-ISCS). p. 171-178 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Parameter estimation for a large-scale multiphysics mirror heating model

van den Hurk, D. P. M., Habets, M. B. I. & Weiland, S., 2017, p. 124-124 1 p.

Research output: Contribution to conferenceAbstractAcademic

Open Access
File

Student theses

Adaptive port-Hamiltonian discretization of distributed parameter systems

Author: Meijer, T., 25 Oct 2018

Supervisor: Weiland, S. (Supervisor 1) & van den Hurk, D. (Supervisor 2)

Student thesis: Master

l1 optimal control using controlled invariance

Author: Philips, M., 29 Oct 2018

Supervisor: Habets, L. (Supervisor 1), Weiland, S. (Supervisor 2) & van den Hurk, D. (Supervisor 2)

Student thesis: Master

File