Research Output per year
Personal profile
Research profile
David van den Hurk was born on November 8th 1988 in Oss, The Netherlands. He received his B.Eng degree in Mechatronics, from Fontys University of Applied Sciences in June 2013. Here his thesis was on the application of self-sensing piezo actuators in lithography equipment. In June 2016 he received his MSc. Degree in Systems and Control (with great appreciation), from Eindhoven University of Technology, where his graduation thesis was titled: “Calibration and Validation of a Multiphysics Mirror Heating Model in EUV Lithography”. Currently, he is a PhD candidate at the Control Systems group on the subject “Active Wafer Table Curvature Control for EUV Lithography” under the supervision of prof. dr. S. Weiland. The research is carried out in cooperation with ASML.
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Research Output 2017 2019
Control of thermo-mechanical wafer deformations in EUV lithography using an active wafer clamp
van den Hurk, D., Weiland, S. & van Berkel, K., 18 Oct 2019, In : IEEE Transactions on Semiconductor Manufacturing.Research output: Contribution to journal › Article › Academic › peer-review
Extreme ultraviolet lithography
clamps
Clamping devices
lithography
wafers
Modeling and localized feedforward control of thermal deformations induced by a moving heat load
van den Hurk, D. P. M., Weiland, S. & van Berkel, K., 2018, p. 103Research output: Contribution to conference › Abstract › Academic
Open Access
File
Modeling and localized feedforward control of thermal deformations induced by a moving heat load
van den Hurk, D. P. M., Weiland, S. & van Berkel, K., 2018, 2018 SICE International Symposium on Control Systems (SICE-ISCS). p. 171-178 8 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Parameter estimation for a large-scale multiphysics mirror heating model
van den Hurk, D. P. M., Habets, M. B. I. & Weiland, S., 2017, p. 124-124 1 p.Research output: Contribution to conference › Abstract › Academic
Open Access
File
Student theses
Adaptive port-Hamiltonian discretization of distributed parameter systems
Author: Meijer, T., 25 Oct 2018Supervisor: Weiland, S. (Supervisor 1) & van den Hurk, D. (Supervisor 2)
Student thesis: Master
l1 optimal control using controlled invariance
Author: Philips, M., 29 Oct 2018Supervisor: Habets, L. (Supervisor 1), Weiland, S. (Supervisor 2) & van den Hurk, D. (Supervisor 2)
Student thesis: Master
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