Research Output per year
Research Output per year
Personal profile
Research profile
David van den Hurk was born on November 8th 1988 in Oss, The Netherlands. He received his B.Eng degree in Mechatronics, from Fontys University of Applied Sciences in June 2013. Here his thesis was on the application of self-sensing piezo actuators in lithography equipment. In June 2016 he received his MSc. Degree in Systems and Control (with great appreciation), from Eindhoven University of Technology, where his graduation thesis was titled: “Calibration and Validation of a Multiphysics Mirror Heating Model in EUV Lithography”. Currently, he is a PhD candidate at the Control Systems group on the subject “Active Wafer Table Curvature Control for EUV Lithography” under the supervision of prof. dr. S. Weiland. The research is carried out in cooperation with ASML.
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Research Output
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Active wafer clamp control of wafer heating effects in extreme ultraviolet lithography
van den Hurk, D. P. M., 21 Oct 2020, Eindhoven: Technische Universiteit Eindhoven. 137 p.Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)
Open AccessFile396 Downloads (Pure) -
Control of thermo-mechanical wafer deformations in EUV lithography using an active wafer clamp
van den Hurk, D., Weiland, S. & van Berkel, K., Feb 2020, In : IEEE Transactions on Semiconductor Manufacturing. 33, 1, p. 96-102 7 p., 8876608.Research output: Contribution to journal › Article › Academic › peer-review
1 Citation (Scopus)2 Downloads (Pure) -
Modeling and localized feedforward control of thermal deformations induced by a moving heat load
van den Hurk, D. P. M., Weiland, S. & van Berkel, K., 2 Apr 2018, 2018 SICE International Symposium on Control Systems (SICE-ISCS). p. 171-178 8 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
3 Citations (Scopus)8 Downloads (Pure) -
Modeling and localized feedforward control of thermal deformations induced by a moving heat load
van den Hurk, D. P. M., Weiland, S. & van Berkel, K., 2018, p. 103.Research output: Contribution to conference › Abstract
Open AccessFile137 Downloads (Pure) -
Parameter estimation for a large-scale multiphysics mirror heating model
van den Hurk, D. P. M., Habets, M. B. I. & Weiland, S., 2017, p. 124-124. 1 p.Research output: Contribution to conference › Abstract › Academic
Open AccessFile52 Downloads (Pure)