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Personal profile

Research profile

David van den Hurk was born on November 8th 1988 in Oss, The Netherlands. He received his B.Eng degree in Mechatronics, from Fontys University of Applied Sciences in June 2013. Here his thesis was on the application of self-sensing piezo actuators in lithography equipment. In June 2016 he received his MSc. Degree in Systems and Control (with great appreciation), from Eindhoven University of Technology, where his graduation thesis was titled: “Calibration and Validation of a Multiphysics Mirror Heating Model in EUV Lithography”.  Currently, he is a PhD candidate at the Control Systems group on the subject “Active Wafer Table Curvature Control for EUV Lithography” under the supervision of prof. dr. S. Weiland. The research is carried out in cooperation with ASML.  

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Research Output

  • 2 Citations
  • 2 Abstract
  • 1 Conference contribution
  • 1 Article

Control of thermo-mechanical wafer deformations in EUV lithography using an active wafer clamp

van den Hurk, D., Weiland, S. & van Berkel, K., Feb 2020, In : IEEE Transactions on Semiconductor Manufacturing. 33, 1, p. 96-102 7 p., 8876608.

Research output: Contribution to journalArticleAcademicpeer-review

  • 1 Downloads (Pure)

    Modeling and localized feedforward control of thermal deformations induced by a moving heat load

    van den Hurk, D. P. M., Weiland, S. & van Berkel, K., 2018, p. 103.

    Research output: Contribution to conferenceAbstract

    Open Access
    File

    Modeling and localized feedforward control of thermal deformations induced by a moving heat load

    van den Hurk, D. P. M., Weiland, S. & van Berkel, K., 2 Apr 2018, 2018 SICE International Symposium on Control Systems (SICE-ISCS). p. 171-178 8 p.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

  • 2 Citations (Scopus)
    8 Downloads (Pure)

    Parameter estimation for a large-scale multiphysics mirror heating model

    van den Hurk, D. P. M., Habets, M. B. I. & Weiland, S., 2017, p. 124-124. 1 p.

    Research output: Contribution to conferenceAbstract

    Open Access
    File

    Student theses

    Adaptive port-Hamiltonian discretization of distributed parameter systems

    Author: Meijer, T., 25 Oct 2018

    Supervisor: Weiland, S. (Supervisor 1) & van den Hurk, D. (Supervisor 2)

    Student thesis: Master

    l1 optimal control using controlled invariance

    Author: Philips, M., 29 Oct 2018

    Supervisor: Habets, L. (Supervisor 1), Weiland, S. (Supervisor 2) & van den Hurk, D. (Supervisor 2)

    Student thesis: Master

    File