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Active
Smart*Light 2.0
Luiten, O. J. (Project Manager), Mutsaers, P. H. A. (Project member), Oosterink, S. (Project member) & Sweers, C. W. (Project member)
1/09/23 → 31/08/26
Project: Third tier
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TKI 2019 Hard-X-Ray source for Wafer Metrology
Mutsaers, P. H. A. (Project Manager), Luiten, O. J. (Project member), van den Berg, R. G. W. (Project member), van Elk, I. J. M. (Project member), Stragier, X. F. D. (Project member), Sweers, C. W. (Project member), Oosterink, S. (Project member) & de Vos, T. D. C. (Project member)
1/01/20 → 10/12/24
Project: Third tier