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Research Output 2016 2019

  • 93 Citations
  • 7 Article
  • 1 Conference contribution
2 Citations (Scopus)

Area-selective atomic layer deposition of ZnO by area activation using electron beam-induced deposition

Mameli, A., Karasulu, B., Verheijen, M., Barcones Campo, B., Macco, B., Mackus, A., Kessels, E. & Roozeboom, F., 31 Jan 2019, In : Chemistry of Materials. 31, 4, p. 1250-1257

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Atomic layer deposition
Electron beams
Chemical activation
Density functional theory
Temperature
1 Citation (Scopus)

Pt-graphene contacts fabricated by plasma functionalization and atomic layer deposition

Vervuurt, R. H. J., Karasulu, B., Thissen, N. F. W., Jiao, Y., Weber, J. W., Kessels, W. M. M. & Bol, A. A., 2 May 2018, In : Advanced Materials Interfaces. 5, 13, 15 p., 1800268

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition
Graphene
Plasmas
Contact resistance
Plasma interactions
1 Citation (Scopus)

Area-selective atomic layer deposition: Role of surface chemistry

Mameli, A., Karasulu, B., Verheijen, M. A., Mackus, A. J. M., Kessels, W. M. M. & Roozeboom, F., 1 Jan 2017, ECS Transactions. 3 ed. Electrochemical Society, Inc., Vol. 80, p. 39-48 10 p. (ECS Transactions)

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

18 Citations (Scopus)

Area-selective atomic layer deposition of ln2O3:H using a µ-plasma printer for local area activation

Mameli, A., Kuang, Y., Aghaee, M., Ande, C. K., Karasulu, B., Creatore, M., Mackus, A. J. M., Kessels, W. M. M. & Roozeboom, F., 2017, In : Chemistry of Materials. 29, 3, p. 921-925

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
25 Citations (Scopus)

Area-selective atomic layer deposition of SiO2 using acetylacetone as a chemoselective inhibitor in an ABC-type cycle

Mameli, A., Merkx, M. J. M., Karasulu, B., Roozeboom, F., Kessels, W. M. M. & MacKus, A. J. M., 26 Sep 2017, In : ACS Nano. 11, 9, p. 9303-9311 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
acetylacetone
Atomic layer deposition
atomic layer epitaxy
inhibitors
cycles

Activities 2018 2018

  • 1 Contributed talk
  • 1 Invited talk

New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide

A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Speaker)
30 Sep 20184 Oct 2018

Activity: Talk or presentation typesContributed talkScientific

Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma

A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Invited speaker)
24 Jul 201828 Jul 2018

Activity: Talk or presentation typesInvited talkScientific