Research Output per year
Network
Recent external collaboration on country level. Dive into details by clicking on the dots.
Research Output 2016 2019
Area-selective atomic layer deposition of ZnO by area activation using electron beam-induced deposition
Mameli, A., Karasulu, B., Verheijen, M., Barcones Campo, B., Macco, B., Mackus, A., Kessels, E. & Roozeboom, F., 31 Jan 2019, In : Chemistry of Materials. 31, 4, p. 1250-1257Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
Atomic layer deposition
Electron beams
Chemical activation
Density functional theory
Temperature
Pt-graphene contacts fabricated by plasma functionalization and atomic layer deposition
Vervuurt, R. H. J., Karasulu, B., Thissen, N. F. W., Jiao, Y., Weber, J. W., Kessels, W. M. M. & Bol, A. A., 2 May 2018, In : Advanced Materials Interfaces. 5, 13, 15 p., 1800268Research output: Contribution to journal › Article › Academic › peer-review
Atomic layer deposition
Graphene
Plasmas
Contact resistance
Plasma interactions
Area-selective atomic layer deposition: Role of surface chemistry
Mameli, A., Karasulu, B., Verheijen, M. A., Mackus, A. J. M., Kessels, W. M. M. & Roozeboom, F., 1 Jan 2017, ECS Transactions. 3 ed. Electrochemical Society, Inc., Vol. 80, p. 39-48 10 p. (ECS Transactions)Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Area-selective atomic layer deposition of ln2O3:H using a µ-plasma printer for local area activation
Mameli, A., Kuang, Y., Aghaee, M., Ande, C. K., Karasulu, B., Creatore, M., Mackus, A. J. M., Kessels, W. M. M. & Roozeboom, F., 2017, In : Chemistry of Materials. 29, 3, p. 921-925Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
Area-selective atomic layer deposition of SiO2 using acetylacetone as a chemoselective inhibitor in an ABC-type cycle
Mameli, A., Merkx, M. J. M., Karasulu, B., Roozeboom, F., Kessels, W. M. M. & MacKus, A. J. M., 26 Sep 2017, In : ACS Nano. 11, 9, p. 9303-9311 9 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
acetylacetone
Atomic layer deposition
atomic layer epitaxy
inhibitors
cycles
Activities 2018 2018
New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide
A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Speaker)30 Sep 2018 → 4 Oct 2018
Activity: Talk or presentation types › Contributed talk › Scientific
Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma
A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Invited speaker)24 Jul 2018 → 28 Jul 2018
Activity: Talk or presentation types › Invited talk › Scientific