Bart Macco - Research output - Research portal Eindhoven University of Technology

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2024
Tunable Doping and Mobility Enhancement in 2D Channel Field-Effect Transistors via Damage-Free Atomic Layer Deposition of AlOX Dielectrics
Esteki, A., Riazimehr, S., Piacentini, A., Knoops, H., Macco, B., Otto, M., Rinke, G., Wang, Z., Ran, K., Mayer, J., Grundmann, A., Kalisch, H., Heuken, M., Vescan, A., Neumaier, D., Daus, A. & Lemme, M. C., 13 Aug 2024, arXiv.org, 28 p.
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