Anton J.J. Dijsseldonk

  • Source: Scopus
20162016

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The link between the HTSC and the optical – and mechatronical industry is strengthened. The technology leadership of the region is augmented by HTSC projects in which students are trained in practical implementation of Systems Engineering methods.

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  • Large dynamic range Atomic Force Microscope for overlay improvements

    Kuiper, S., Fritz, E., Crowcombe, W., Liebig, T., Kramer, G., Witvoet, G., Duivenvoorde, T., Overtoom, T., Rijnbeek, R., van Zwet, E., Van Dijsseldonk, A., den Boef, A., Beems, M. & Levasier, L., 1 Jan 2016, Metrology, Inspection, and Process Control for Microlithography XXX. Warrendale: SPIE, 10 p. 97781B. (Proceedings of SPIE; vol. 9778).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    4 Citations (Scopus)
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