Anton J.J. Dijsseldonk

  • 4 Citations
20162016

Research output per year

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Personal profile

Quote

The link between the HTSC and the optical – and mechatronical industry is strengthened. The technology leadership of the region is augmented by HTSC projects in which students are trained in practical implementation of Systems Engineering methods.

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Research Output

  • 4 Citations
  • 1 Conference contribution

Large dynamic range Atomic Force Microscope for overlay improvements

Kuiper, S., Fritz, E., Crowcombe, W., Liebig, T., Kramer, G., Witvoet, G., Duivenvoorde, T., Overtoom, T., Rijnbeek, R., van Zwet, E., Van Dijsseldonk, A., den Boef, A., Beems, M. & Levasier, L., 1 Jan 2016, Metrology, Inspection, and Process Control for Microlithography XXX. Warrendale: SPIE, 10 p. 97781B. (Proceedings of SPIE; vol. 9778).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

  • 4 Citations (Scopus)

    Press / Media

    Leading Chipmakers Eye EUV Lithography to Save Moore’s Law

    Anton J.J. Dijsseldonk

    31/10/16

    1 item of Media coverage

    Press/Media: Expert Comment