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Research Output 1998 2019

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Chapter
2015
17 Citations (Scopus)

Atomic layer deposition

Knoops, H. C. M., Potts, S. E., Bol, A. A. & Kessels, W. M. M., 2015, Handbook of crystal growth : thin films and epitaxy (second edition). Kuech, T. (ed.). Elsevier, p. 1101-1134

Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

atomic layer epitaxy
thin films
chemistry
miniaturization
emerging