If you made any changes in Pure these will be visible here soon.

Research Output 2007 2019

2019
2 Citations (Scopus)
28 Downloads (Pure)

Area-selective atomic layer deposition of ZnO by area activation using electron beam-induced deposition

Mameli, A., Karasulu, B., Verheijen, M., Barcones Campo, B., Macco, B., Mackus, A., Kessels, E. & Roozeboom, F., 26 Feb 2019, In : Chemistry of Materials. 31, 4, p. 1250-1257 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Atomic layer deposition
Electron beams
Chemical activation
Density functional theory
Temperature
39 Downloads (Pure)

Area-selective deposition of Ruthenium by combining atomic layer deposition and selective etching

Vos, M. F. J., Chopra, S. N., Verheijen, M. A., Ekerdt, J. G., Agarwal, S., Kessels, W. M. M. & Mackus, A. J. M., 22 May 2019, In : Chemistry of Materials. 31, 11, p. 3878-3882 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
12 Citations (Scopus)
173 Downloads (Pure)

From the bottom-up: toward area-selective atomic layer deposition with high selectivity

Mackus, A. J. M., Merkx, M. J. M. & Kessels, W. M. M., 8 Jan 2019, In : Chemistry of Materials. 31, 1, p. 2-12 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Atomic layer deposition
Level control
Processing
Nanotechnology
Etching
10 Citations (Scopus)
1 Downloads (Pure)

Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review

Mackus, A., Schneider, J. R., MacIsaac, C., Baker, J. G. & Bent, S. F., 26 Feb 2019, In : Chemistry of Materials. 31, 4, p. 1142-1183 42 p.

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition
Nucleation
Thin films
Nanoelectronics
Oxides
2018
2 Citations (Scopus)

Approaches and opportunities for area-selective atomic layer deposition

Mackus, A. J. M., 3 Jul 2018, 2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018. Piscataway: Institute of Electrical and Electronics Engineers, 2 p. 8403864

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Atomic layer deposition
atomic layer epitaxy
Fabrication
fabrication
Processing
21 Citations (Scopus)
143 Downloads (Pure)

Area-selective atomic layer deposition of metal oxides on noble metals through catalytic oxygen activation

Singh, J. J., Thissen, N. F. W., Kim, W-H., Johnson, H., Kessels, W. M. M., Bol, A. A., Bent, S. F. & Mackus, A. J. M., 2018, In : Chemistry of Materials. 30, 3, p. 663–670 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Atomic layer deposition
Precious metals
Oxides
Metals
Chemical activation
8 Citations (Scopus)
106 Downloads (Pure)

Atomic layer deposition of cobalt using H2-, N2-, and NH3-based plasmas: on the role of the Co-reactant

Vos, M. F. J., van Straaten, G., Kessels, W. M. M. & Mackus, A. J. M., 5 Sep 2018, In : Journal of Physical Chemistry C. 122, 39, p. 22519-22529 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Atomic layer deposition
atomic layer epitaxy
Cobalt
cobalt
Plasmas

Investigating the difference in nucleation during Si-based ALD on different surfaces for future area-selective deposition

Filatova, E. A., Mameli, A., Mackus, A. J. M., Roozeboom, F., Kessels, W. M. M., Hausmannd, D. & Elliott, S. D., 2018, 2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO). Piscataway: Institute of Electrical and Electronics Engineers, 2 p. 8626336

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
68 Downloads (Pure)

Isotropic atomic layer etching of ZnO using Acetylacetone and O2 plasma

Mameli, A., Verheijen, M. A., Mackus, A. J. M., Kessels, W. M. M. & Roozeboom, F., 7 Nov 2018, In : ACS Applied Materials & Interfaces. 10, 44, p. 38588-38595 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Etching
Plasmas
Nanowires
acetylacetone
Spectroscopic ellipsometry

New approaches for area-selective atomic layer deposition of oxides

Mackus, A., 18 Mar 2018, In : Abstracts of Papers of the American Chemical Society. 255, 521.

Research output: Contribution to journalMeeting AbstractAcademic

2017
1 Citation (Scopus)
1 Downloads (Pure)

Area-selective atomic layer deposition: Role of surface chemistry

Mameli, A., Karasulu, B., Verheijen, M. A., Mackus, A. J. M., Kessels, W. M. M. & Roozeboom, F., 1 Jan 2017, ECS Transactions. 3 ed. Electrochemical Society, Inc., Vol. 80. p. 39-48 10 p. (ECS Transactions).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

18 Citations (Scopus)
89 Downloads (Pure)

Area-selective atomic layer deposition of ln2O3:H using a µ-plasma printer for local area activation

Mameli, A., Kuang, Y., Aghaee, M., Ande, C. K., Karasulu, B., Creatore, M., Mackus, A. J. M., Kessels, W. M. M. & Roozeboom, F., 2017, In : Chemistry of Materials. 29, 3, p. 921-925

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
26 Citations (Scopus)
210 Downloads (Pure)

Area-selective atomic layer deposition of SiO2 using acetylacetone as a chemoselective inhibitor in an ABC-type cycle

Mameli, A., Merkx, M. J. M., Karasulu, B., Roozeboom, F., Kessels, W. M. M. & MacKus, A. J. M., 26 Sep 2017, In : ACS Nano. 11, 9, p. 9303-9311 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
acetylacetone
Atomic layer deposition
atomic layer epitaxy
inhibitors
cycles
5 Citations (Scopus)
86 Downloads (Pure)

Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma

Vos, M. F. J., Knoops, H. C. M., Synowicki, R. A., Kessels, W. M. M. & Mackus, A. J. M., 11 Sep 2017, In : Applied Physics Letters. 111, 11, 5 p., 113105.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
aluminum fluorides
atomic layer epitaxy
metal fluorides
refractivity
cycles
9 Citations (Scopus)
119 Downloads (Pure)

Graphene devices with bottom-up contacts by area-selective atomic layer deposition

Thissen, N. F. W., Vervuurt, R. H. J., Mackus, A. J. M., Mulders, J. J. L., Weber, J-W., Kessels, W. M. M. & Bol, A. A., 1 Jun 2017, In : 2D Materials. 4, 2, 9 p., 025046.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Graphite
Atomic layer deposition
atomic layer epitaxy
Graphene
graphene
24 Citations (Scopus)
42 Downloads (Pure)

Incomplete elimination of precursor ligands during atomic layer deposition of zinc-oxide, tin-oxide, and zinc-tin-oxide

Mackus, A. J. M., MacIsaac, C., Kim, W-H. & Bent, S. F., 7 Feb 2017, In : Journal of Chemical Physics. 146, 5, 11 p., 052802.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Zinc Oxide
Atomic layer deposition
atomic layer epitaxy
Zinc oxide
zinc oxides
5 Citations (Scopus)
79 Downloads (Pure)

Resist-free fabricated carbon nanotube field-effect transistors with high-quality atomic-layer-deposited platinum contacts

Mackus, A. J. M., Thissen, N. F. W., Mulders, J. J. L., Trompenaars, P. H. F., Chen, Z., Kessels, W. M. M. & Bol, A. A., 4 Jan 2017, In : Applied Physics Letters. 110, 1, p. 1-5 5 p., 013101.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
platinum
field effect transistors
carbon nanotubes
atomic layer epitaxy
transistors
2016
30 Citations (Scopus)

A process for topographically selective deposition on 3D nanostructures by ion implantation

Kim, W-H., Hashemi, F. S. M., Mackus, A. J. M., Singh, J., Yeongin, K., Bobb-Semple, D., Fan, Y., Kaufman-Osborn, T., Godet, L. & Bent, S. F., 7 Mar 2016, In : ACS Nano. 10, 4, p. 4451-4458 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Ion implantation
ion implantation
Nanostructures
blankets
fluorocarbons
36 Citations (Scopus)
15 Downloads (Pure)

Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation

Mackus, A. J. M., Weber, M. J., Thissen, N. F. W., Garcia-Alonso Garcia, D., Vervuurt, R. H. J., Assali, S., Bol, A. A., Verheijen, M. A. & Kessels, W. M. M., 2016, In : Nanotechnology. 27, 3, p. 1-13 13 p., 034001.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)
166 Downloads (Pure)

Growth, intermixing, and surface phase formation for zinc tin oxide nanolaminates produced by atomic layer deposition

Hägglund, C., Grehl, T., Tanskanen, J. T., Yee, Y. S., Mullings, M. N., Mackus, A. J. M., MacIsaac, C., Clemens, B. M., Brongersma, H. H. & Bent, S. F., 8 Feb 2016, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 34, 2, 8 p., 021516.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Atomic layer deposition
atomic layer epitaxy
Zinc oxide
Tin oxides
zinc oxides
12 Citations (Scopus)
8 Downloads (Pure)

In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd

Leick, N., Weber, J. W., Mackus, A. J. M., Weber, M. J., van de Sanden, M. C. M. & Kessels, W. M. M., 17 Feb 2016, In : Journal of Physics D: Applied Physics. 49, 12, 12 p., 115504.

Research output: Contribution to journalArticleAcademicpeer-review

Spectroscopic ellipsometry
Atomic layer deposition
atomic layer epitaxy
ellipsometry
Metals
52 Citations (Scopus)

Tandem core-shell Si-Ta3-N5 photoanodes for photoelectrochemical water splitting

Narkeviciute, I., Chakthranont, P., Mackus, A. J. M., Hahn, C., Pinaud, B. A., Bent, S. F. & Jaramillo, T. F., 22 Nov 2016, In : Nano Letters. 16, 12, p. 7565-7572 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

water splitting
Photocurrents
photocurrents
Water
Chronoamperometry
2014
20 Citations (Scopus)
9 Downloads (Pure)

Atomic layer deposition of highly transparent platinum counter electrodes for metal/polymer flexible dye-sensitized solar cells

Garcia - Alonso, D., Zardetto, V., Mackus, A. J. M., Rossi, De, F., Verheijen, M. A., Brown, T. M., Kessels, W. M. M. & Creatore, M., 2014, In : Advanced Energy Materials. 4, 4, p. 1300831-1/8 8 p., 1300831.

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition
Platinum
Polymers
Metals
Electrodes
32 Citations (Scopus)
3 Downloads (Pure)

Atomic layer deposition of high-purity palladium films from Pd(hfac)2 and H2 and O2 plasmas

Weber, M. J., Mackus, A. J. M., Verheijen, M. A., Longo, V., Bol, A. A. & Kessels, W. M. M., 2014, In : Journal of Physical Chemistry C. 118, 6, p. 8702-8711 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition
Palladium
atomic layer epitaxy
palladium
purity
126 Citations (Scopus)
9 Downloads (Pure)

The use of atomic layer deposition in advanced nanopattering

Mackus, A. J. M., Bol, A. A. & Kessels, W. M. M., 2014, In : Nanoscale. 6, 19, p. 10941-10960 20 p.

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition
Level control
Microelectronics
Lithography
Block copolymers
2013
2 Downloads (Pure)

Atomic layer deposition of nanomaterials for Li-ion batteries, fuel cells, and solar cells

Kessels, W. M. M., Knoops, H. C. M., Weber, M. J., Mackus, A. J. M. & Creatore, M., 2013, In : Material Matters. 8, 4, p. 117-117 1 p.

Research output: Contribution to journalArticlePopular

1135 Downloads (Pure)

Atomic layer deposition of platinum : from surface reactions to nanopatterning

Mackus, A. J. M., 2013, Eindhoven: Technische Universiteit Eindhoven. 205 p.

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

Open Access
File
Atomic layer deposition
Surface reactions
Platinum
Nucleation
Deposits
7 Citations (Scopus)
1 Downloads (Pure)

Catalytic combustion reactions during atomic layer deposition of Ru studied using 18O2 isotope labeling

Leick, N., Agarwal, S., Mackus, A. J. M., Potts, S. E. & Kessels, W. M. M., 2013, In : Journal of Physical Chemistry C. 117, 41, p. 21320-21330 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition
atomic layer epitaxy
Isotopes
Labeling
marking
3 Citations (Scopus)
1 Downloads (Pure)

Catalytic surface reactions during nucleation and growth of atomic layer deposition of noble metals : a case study for platinum

Mackus, A. J. M., Bol, A. A. & Kessels, W. M. M., 2013, Atomic Layer Deposition Applications 9. Roozeboom, F. & Delabie, A. (eds.). Pennington, NJ, USA: The Electrochemical Society, p. 183-193 (ECS Transactions; vol. 58).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Atomic layer deposition
Surface reactions
Precious metals
Platinum
Nucleation
33 Citations (Scopus)
5 Downloads (Pure)

Direct-wire atomic layer deposition of high-quality Pt nanostructures : selective growth conditions and seed layer requirements

Mackus, A. J. M., Thissen, N. F. W., Mulders, J. J. L., Trompenaars, P. H. F., Verheijen, M. A., Bol, A. A. & Kessels, W. M. M., 2013, In : Journal of Physical Chemistry C. 117, 20, p. 10788-10798 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition
atomic layer epitaxy
Seed
seeds
Nanostructures
68 Citations (Scopus)
2 Downloads (Pure)
Atomic layer deposition
Film growth
Platinum
Nucleation
Oxygen
2 Downloads (Pure)

Nanofabricage van koolstofnanobuistransistors met atoomlaagdepositie

Thissen, N. F. W., Mackus, A. J. M., Kessels, W. M. M. & Bol, A. A., 2013, In : Nevac Blad. 51, 3, p. 10-

Research output: Contribution to journalArticleProfessional

41 Citations (Scopus)
4 Downloads (Pure)

Room-temperature atomic layer deposition of platinum

Mackus, A. J. M., Garcia-Alonso Garcia, D., Knoops, H. C. M., Bol, A. A. & Kessels, W. M. M., 2013, In : Chemistry of Materials. 25, 9, p. 1769-1774 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition
Platinum
Plasmas
Substrates
Temperature
2012
76 Citations (Scopus)
7 Downloads (Pure)

Catalytic combustion and dehydrogenation reactions during atomic layer deposition of platinum

Mackus, A. J. M., Leick, N., Baker, L. & Kessels, W. M. M., 2012, In : Chemistry of Materials. 24, 10, p. 1752-1761

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition
Dehydrogenation
Platinum
Surface reactions
Precious metals
18 Citations (Scopus)
1 Downloads (Pure)

Dehydrogenation reactions during atomic layer deposition of Ru using O2

Leick, N., Agarwal, S., Mackus, A. J. M. & Kessels, W. M. M., 2012, In : Chemistry of Materials. 24, p. 3696-3700

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition
Surface reactions
Dehydrogenation
Carbon Monoxide
Reaction products

Jaarringen

Mackus, A. J. M., Garcia-Alonso Garcia, D. & Kessels, W. M. M., 2012, In : Nederlands Tijdschrift voor Natuurkunde. 78, 8, p. 379-379

Research output: Contribution to journalArticleProfessional

24 Citations (Scopus)
112 Downloads (Pure)

Mass spectrometry study of the temperature dependence of Pt film growth by atomic layer deposition

Erkens, I. J. M., Mackus, A. J. M., Knoops, H. C. M., Smits, P., Ven, van de, T. H. M., Roozeboom, F. & Kessels, W. M. M., 2012, In : ECS Journal of Solid State Science and Technology. 1, 6, p. 255-262 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Atomic layer deposition
Film growth
Mass spectrometry
Hydrogenation
Ligands
1 Downloads (Pure)

Nanocontacten schrijven met atoomlaagdepositie

Mackus, A. J. M., Dielissen, S. A. F., Mulders, J. J. L. & Kessels, W. M. M., 2012, In : Nederlands Tijdschrift voor Natuurkunde. 78, 7, p. 290-293 4 p.

Research output: Contribution to journalArticleProfessional

41 Citations (Scopus)
5 Downloads (Pure)

Nanopattering by direct-write atomic layer deposition

Mackus, A. J. M., Dielissen, S. A. F., Mulders, J. J. L. & Kessels, W. M. M., 2012, In : Special Publication - Royal Society of Chemistry. 4, 15, p. 4477-4480 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

atomic layer epitaxy
compatibility
seeds
lithography
electron beams

Plaatsopgeloste depositie van Pt nanostructuren door het combineren van elektronenbundel geïnduceerde depositie en atoomlaagdepositie

Dielissen, S. A. F., Mackus, A. J. M., Mulders, J. J. L. & Kessels, W. M. M., 2012, In : Nevac Blad. 50, 2, p. 7-9

Research output: Contribution to journalArticlePopular

103 Citations (Scopus)
2 Downloads (Pure)

Supported core/shell bimetallic nanoparticles synthesis by atomic layer deposition

Weber, M. J., Mackus, A. J. M., Verheijen, M. A., Marel, van der, C. & Kessels, W. M. M., 2012, In : Chemistry of Materials. 24, 15, p. 2973-2977 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition
Precious metals
Nanoparticles
Catalyst supports
Nanostructured materials
2011
73 Citations (Scopus)
324 Downloads (Pure)

Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma

Baker, L., Cavanagh, A. S., Seghete, D., George, S. M., Mackus, A. J. M., Kessels, W. M. M., Liu, Z. Y. & Wagner, F. T., 2011, In : Journal of Applied Physics. 109, 8, p. 084333-1/10 10 p., 084333.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
atomic layer epitaxy
platinum
nucleation
cycles
scanning electron microscopy
4 Downloads (Pure)

Selective in-situ atomic layer deposition on structures created with EBID

Mackus, A. J. M., Kessels, W. M. M. & Mulders, J. J. L., 2011, In : Microscopy and Analysis. 25, 4, p. 5-8

Research output: Contribution to journalArticleProfessional

atomic layer epitaxy
electron beams
seeds
platinum
injectors
2010
3 Downloads (Pure)

Local deposition of high-purity Pt nanostructures by combining Electron Beam Induced Deposition (EBID) and Atomic Layer Deposition (ALD)

Mackus, A. J. M., Mulders, J. J. L., Sanden, van de, M. C. M. & Kessels, W. M. M., 2010, Physics@FOM Veldhoven, 19-20 January 2010, Veldhoven, The Netherlands. Graef, de, M., Zegers, G., Min, E. & Pavert, van de, F. (eds.). Utrecht: Stichting FOM, p. P03.57-162

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

atomic layer epitaxy
purity
electron beams
56 Citations (Scopus)
121 Downloads (Pure)

Local deposition of high-purity Pt nanostructures by combining electron beam induced deposition and atomic layer deposition

Mackus, A. J. M., Mulders, J. J. L., Sanden, van de, M. C. M. & Kessels, W. M. M., 2010, In : Journal of Applied Physics. 107, 11, p. 116102-1/3 3 p., 116102.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
atomic layer epitaxy
purity
electron beams
platinum
fabrication
28 Downloads (Pure)

Method for forming microscopic structures on a substrate

Jong, de, A. F., Mulders, J. J. L., Kessels, W. M. M. & Mackus, A. J. M., 24 Jun 2010, Patent No. US2010159370

Research output: PatentPatent publication

Open Access
File
seeds
inventions
particle beams
atomic layer epitaxy
vapor deposition
39 Citations (Scopus)
764 Downloads (Pure)
Open Access
File
Optical emission spectroscopy
Atomic layer deposition
optical emission spectroscopy
atomic layer epitaxy
Plasmas
2009
32 Downloads (Pure)

Direct Local Deposition of High-Purity Pt Nanostructures by Combining EBID and ALD

Mackus, A. J. M., Mulders, H. J. J. L., Sanden, van de, M. C. M., Jong, de, A. F. & Kessels, W. M. M., 2009, Proceedings of the 56th international American Vacuum Society Symposium & Exhibition (AVS 56) 8-13 November 2009, San Jose, California. New York, NY: AVS, p. SS1+PS+TF+AS+NS-TuA8-79

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
atomic layer epitaxy
purity
electron beams
electrical resistivity
seeds
88 Citations (Scopus)
255 Downloads (Pure)

Remote plasma ALD of platinum and platinum oxide films

Knoops, H. C. M., Mackus, A. J. M., Donders, M. E., Sanden, van de, M. C. M., Notten, P. H. L. & Kessels, W. M. M., 2009, In : Electrochemical and Solid-State Letters. 12, 7, p. G34-G36

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
platinum oxides
Plasma deposition
Atomic layer deposition
atomic layer epitaxy
Platinum
93 Citations (Scopus)
165 Downloads (Pure)

Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy

Kessels, W. M. M., Knoops, H. C. M., Dielissen, S. A. F., Mackus, A. J. M. & Sanden, van de, M. C. M., 2009, In : Applied Physics Letters. 95, 1, p. 013114-1/3 013114.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
atomic layer epitaxy
surface reactions
infrared spectroscopy
vapor phases
ligands