Adrie J.M. Mackus

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Content available in repository

68 Article
8 Conference contribution
1 Meeting Abstract
1 Patent publication
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- 1 Phd Thesis 1 (Research TU/e / Graduation TU/e)

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2018
Approaches and opportunities for area-selective atomic layer deposition
Mackus, A. J. M., 3 Jul 2018, 2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018. Piscataway: Institute of Electrical and Electronics Engineers, 2 p. 8403864
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
6 Citations (Scopus)

1 Downloads (Pure)
Investigating the difference in nucleation during Si-based ALD on different surfaces for future area-selective deposition
Filatova, E. A., Mameli, A., Mackus, A. J. M., Roozeboom, F., Kessels, W. M. M., Hausmann, D. & Elliott, S. D., 2018, 2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO). Piscataway: Institute of Electrical and Electronics Engineers, 2 p. 8626336
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
1 Downloads (Pure)
2017
Area-selective atomic layer deposition: Role of surface chemistry
Mameli, A., Karasulu, B., Verheijen, M. A., Mackus, A. J. M., Kessels, W. M. M. & Roozeboom, F., 1 Jan 2017, Atomic Layer Deposition Applications 13. De Gendt, S., Dendooven, J., Roozeboom, F., Liu, C., Elam, J. W. & van der Straten, O. (eds.). Electrochemical Society, Inc., p. 39-48 10 p. (ECS Transactions; vol. 80, no. 3).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
13 Citations (Scopus)

1 Downloads (Pure)
2013
Catalytic surface reactions during nucleation and growth of atomic layer deposition of noble metals : a case study for platinum
Mackus, A. J. M., Bol, A. A. & Kessels, W. M. M., 2013, Atomic Layer Deposition Applications 9. Roozeboom, F. & Delabie, A. (eds.). Pennington, NJ, USA: Electrochemical Society, Inc., p. 183-193 (ECS Transactions; vol. 58).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
6 Citations (Scopus)

1 Downloads (Pure)
2010
Local deposition of high-purity Pt nanostructures by combining Electron Beam Induced Deposition (EBID) and Atomic Layer Deposition (ALD)
Mackus, A. J. M., Mulders, J. J. L., Sanden, van de, M. C. M. & Kessels, W. M. M., 2010, Physics@FOM Veldhoven, 19-20 January 2010, Veldhoven, The Netherlands. Graef, de, M., Zegers, G., Min, E. & Pavert, van de, F. (eds.). Utrecht: Stichting FOM, p. P03.57-162
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
3 Downloads (Pure)
2009
Direct Local Deposition of High-Purity Pt Nanostructures by Combining EBID and ALD
Mackus, A. J. M., Mulders, H. J. J. L., Sanden, van de, M. C. M., Jong, de, A. F. & Kessels, W. M. M., 2009, Proceedings of the 56th international American Vacuum Society Symposium & Exhibition (AVS 56) 8-13 November 2009, San Jose, California. New York, NY: AVS, p. SS1+PS+TF+AS+NS-TuA8-79
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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88 Downloads (Pure)
2008

Optical emission spectroscopy as a tool for studying, optimizing, and monitoring layer deposition processes
Mackus, A. J. M., Heil, S. B. S., Langereis, E., Knoops, H. C. M., Sanden, van de, M. C. M. & Kessels, W. M. M., 2008, Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). Kessels, W. M. M. & Delabie, A. (eds.). S.n.: s.n., p. P-76-
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

2 Downloads (Pure)
Remote plasma and thermal ALD of platinum and platinum oxide films
Knoops, H. C. M., Mackus, A. J. M., Donders, M. E., Sanden, van de, M. C. M., Notten, P. H. L. & Kessels, W. M. M., 2008, Atomic layer deposition applications ; 4 : 214th ECS meeting, Honolulu,HI, October 12-17 2008. Londergan, A. & De Gendt, S. (eds.). Pennington, NJ, USA: Electrochemical Society, Inc., p. 209-218 (ECS Transactions; vol. 16).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
13 Citations (Scopus)

6 Downloads (Pure)

Adrie J.M. Mackus

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