• 1566 Citations
20072020

Research output per year

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Research Output

2020

Area-selective atomic layer deposition for bottom-up fabrication of nanoelectronics

Mackus, A. J. M., Merkx, M. J. M. & Li, J., 2 Jun 2020, In : Nevac Blad. 58, special on ALD, p. 32-34 2.

Research output: Contribution to journalArticlePopular

2 Downloads (Pure)

Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers

Balasubramanyam, S., Merkx, M. J. M., Verheijen, M. A., Kessels, W. M. M., Mackus, A. J. M. & Bol, A. A., 4 May 2020, In : ACS Materials Letters. 2, 5, p. 511-518 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
1 Citation (Scopus)

Etching with atomic-level precision: The emerging field of atomic layer etching

Mackus, A. J. M., Faraz, T. & Chittock, N., 2 Jun 2020, In : Nevac Blad. 58, special on ALD, p. 40-42 2.

Research output: Contribution to journalArticlePopular

Mechanism of precursor blocking by acetylacetone inhibitor molecules during area-selective atomic layer deposition of SiO2

Merkx, M. J. M., Sandoval, T. E., Hausmann, D. M., Kessels, W. M. M. E. & Mackus, A. J. M., 28 Apr 2020, In : Chemistry of Materials. 32, 8, p. 3335-3345

Research output: Contribution to journalArticleAcademicpeer-review

Synthesis of a hybrid nanostructure of ZnO-decorated MoS2 by atomic layer deposition

Oh, I. K., Kim, W. H., Zeng, L., Singh, J., Bae, D., Mackus, A. J. M., Song, J. G., Seo, S., Shong, B., Kim, H. & Bent, S. F., 25 Feb 2020, In : ACS Nano. 14, 2, p. 1757-1769 13 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)
2019

Area-selective atomic layer deposition of ZnO by area activation using electron beam-induced deposition

Mameli, A., Karasulu, B., Verheijen, M., Barcones Campo, B., Macco, B., Mackus, A., Kessels, E. & Roozeboom, F., 26 Feb 2019, In : Chemistry of Materials. 31, 4, p. 1250-1257 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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12 Citations (Scopus)
51 Downloads (Pure)

Area-selective deposition of Ruthenium by combining atomic layer deposition and selective etching

Vos, M. F. J., Chopra, S. N., Verheijen, M. A., Ekerdt, J. G., Agarwal, S., Kessels, W. M. M. & Mackus, A. J. M., 22 May 2019, In : Chemistry of Materials. 31, 11, p. 3878-3882 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
9 Citations (Scopus)
118 Downloads (Pure)

From the bottom-up: toward area-selective atomic layer deposition with high selectivity

Mackus, A. J. M., Merkx, M. J. M. & Kessels, W. M. M., 8 Jan 2019, In : Chemistry of Materials. 31, 1, p. 2-12 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
34 Citations (Scopus)
319 Downloads (Pure)

Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review

Mackus, A., Schneider, J. R., MacIsaac, C., Baker, J. G. & Bent, S. F., 26 Feb 2019, In : Chemistry of Materials. 31, 4, p. 1142-1183 42 p.

Research output: Contribution to journalArticleAcademicpeer-review

34 Citations (Scopus)
2 Downloads (Pure)
2018

Approaches and opportunities for area-selective atomic layer deposition

Mackus, A. J. M., 3 Jul 2018, 2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018. Piscataway: Institute of Electrical and Electronics Engineers, 2 p. 8403864

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)
1 Downloads (Pure)

Area-selective atomic layer deposition of metal oxides on noble metals through catalytic oxygen activation

Singh, J. J., Thissen, N. F. W., Kim, W-H., Johnson, H., Kessels, W. M. M., Bol, A. A., Bent, S. F. & Mackus, A. J. M., 13 Feb 2018, In : Chemistry of Materials. 30, 3, p. 663–670 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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32 Citations (Scopus)
162 Downloads (Pure)

Atomic layer deposition of cobalt using H2-, N2-, and NH3-based plasmas: on the role of the Co-reactant

Vos, M. F. J., van Straaten, G., Kessels, W. M. M. & Mackus, A. J. M., 4 Oct 2018, In : Journal of Physical Chemistry C. 122, 39, p. 22519-22529 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
12 Citations (Scopus)
175 Downloads (Pure)

Investigating the difference in nucleation during Si-based ALD on different surfaces for future area-selective deposition

Filatova, E. A., Mameli, A., Mackus, A. J. M., Roozeboom, F., Kessels, W. M. M., Hausmann, D. & Elliott, S. D., 2018, 2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO). Piscataway: Institute of Electrical and Electronics Engineers, 2 p. 8626336

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Downloads (Pure)

Isotropic atomic layer etching of ZnO using Acetylacetone and O2 plasma

Mameli, A., Verheijen, M. A., Mackus, A. J. M., Kessels, W. M. M. & Roozeboom, F., 7 Nov 2018, In : ACS Applied Materials & Interfaces. 10, 44, p. 38588-38595 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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6 Citations (Scopus)
108 Downloads (Pure)

New approaches for area-selective atomic layer deposition of oxides

Mackus, A., 18 Mar 2018, In : Abstracts of Papers of the American Chemical Society. 255, 521.

Research output: Contribution to journalMeeting AbstractAcademic

2017

Area-selective atomic layer deposition: Role of surface chemistry

Mameli, A., Karasulu, B., Verheijen, M. A., Mackus, A. J. M., Kessels, W. M. M. & Roozeboom, F., 1 Jan 2017, ECS Transactions. De Gendt, S., Dendooven, J., Roozeboom, F., Liu, C., Elam, J. W. & van der Straten, O. (eds.). 3 ed. Electrochemical Society, Inc., Vol. 80. p. 39-48 10 p. (ECS Transactions; vol. 80, no. 3).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

5 Citations (Scopus)
1 Downloads (Pure)

Area-selective atomic layer deposition of In 2O 3:H Using a μ-plasma printer for local area activation

Mameli, A., Kuang, Y., Aghaee, M., Ande, C. K., Karasulu, B., Creatore, M., Mackus, A. J. M., Kessels, W. M. M. & Roozeboom, F., 14 Feb 2017, In : Chemistry of Materials. 29, 3, p. 921-925 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
23 Citations (Scopus)
99 Downloads (Pure)

Area-selective atomic layer deposition of SiO2 using acetylacetone as a chemoselective inhibitor in an ABC-type cycle

Mameli, A., Merkx, M. J. M., Karasulu, B., Roozeboom, F., Kessels, W. M. M. & MacKus, A. J. M., 26 Sep 2017, In : ACS Nano. 11, 9, p. 9303-9311 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
42 Citations (Scopus)
234 Downloads (Pure)

Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma

Vos, M. F. J., Knoops, H. C. M., Synowicki, R. A., Kessels, W. M. M. & Mackus, A. J. M., 11 Sep 2017, In : Applied Physics Letters. 111, 11, 5 p., 113105.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
5 Citations (Scopus)
156 Downloads (Pure)

Graphene devices with bottom-up contacts by area-selective atomic layer deposition

Thissen, N. F. W., Vervuurt, R. H. J., Mackus, A. J. M., Mulders, J. J. L., Weber, J-W., Kessels, W. M. M. & Bol, A. A., 1 Jun 2017, In : 2D Materials. 4, 2, 9 p., 025046.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
11 Citations (Scopus)
153 Downloads (Pure)

Incomplete elimination of precursor ligands during atomic layer deposition of zinc-oxide, tin-oxide, and zinc-tin-oxide

Mackus, A. J. M., MacIsaac, C., Kim, W-H. & Bent, S. F., 7 Feb 2017, In : Journal of Chemical Physics. 146, 5, 11 p., 052802.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
31 Citations (Scopus)
54 Downloads (Pure)

Resist-free fabricated carbon nanotube field-effect transistors with high-quality atomic-layer-deposited platinum contacts

Mackus, A. J. M., Thissen, N. F. W., Mulders, J. J. L., Trompenaars, P. H. F., Chen, Z., Kessels, W. M. M. & Bol, A. A., 2 Jan 2017, In : Applied Physics Letters. 110, 1, p. 1-5 5 p., 013101.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
5 Citations (Scopus)
103 Downloads (Pure)
2016

A process for topographically selective deposition on 3D nanostructures by ion implantation

Kim, W-H., Hashemi, F. S. M., Mackus, A. J. M., Singh, J., Yeongin, K., Bobb-Semple, D., Fan, Y., Kaufman-Osborn, T., Godet, L. & Bent, S. F., 7 Mar 2016, In : ACS Nano. 10, 4, p. 4451-4458 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

37 Citations (Scopus)

Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation

Mackus, A. J. M., Weber, M. J., Thissen, N. F. W., Garcia-Alonso Garcia, D., Vervuurt, R. H. J., Assali, S., Bol, A. A., Verheijen, M. A. & Kessels, W. M. M., 2016, In : Nanotechnology. 27, 3, p. 1-13 13 p., 034001.

Research output: Contribution to journalArticleAcademicpeer-review

47 Citations (Scopus)
15 Downloads (Pure)

Growth, intermixing, and surface phase formation for zinc tin oxide nanolaminates produced by atomic layer deposition

Hägglund, C., Grehl, T., Tanskanen, J. T., Yee, Y. S., Mullings, M. N., Mackus, A. J. M., MacIsaac, C., Clemens, B. M., Brongersma, H. H. & Bent, S. F., 8 Feb 2016, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 34, 2, 8 p., 021516.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
11 Citations (Scopus)
228 Downloads (Pure)

In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd

Leick, N., Weber, J. W., Mackus, A. J. M., Weber, M. J., van de Sanden, M. C. M. & Kessels, W. M. M., 17 Feb 2016, In : Journal of Physics D: Applied Physics. 49, 12, 12 p., 115504.

Research output: Contribution to journalArticleAcademicpeer-review

16 Citations (Scopus)
8 Downloads (Pure)

Tandem core-shell Si-Ta3-N5 photoanodes for photoelectrochemical water splitting

Narkeviciute, I., Chakthranont, P., Mackus, A. J. M., Hahn, C., Pinaud, B. A., Bent, S. F. & Jaramillo, T. F., 22 Nov 2016, In : Nano Letters. 16, 12, p. 7565-7572 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

62 Citations (Scopus)
2014

Atomic layer deposition of highly transparent platinum counter electrodes for metal/polymer flexible dye-sensitized solar cells

Garcia - Alonso, D., Zardetto, V., Mackus, A. J. M., Rossi, De, F., Verheijen, M. A., Brown, T. M., Kessels, W. M. M. & Creatore, M., 2014, In : Advanced Energy Materials. 4, 4, p. 1300831-1/8 8 p., 1300831.

Research output: Contribution to journalArticleAcademicpeer-review

23 Citations (Scopus)
9 Downloads (Pure)

Atomic layer deposition of high-purity palladium films from Pd(hfac)2 and H2 and O2 plasmas

Weber, M. J., Mackus, A. J. M., Verheijen, M. A., Longo, V., Bol, A. A. & Kessels, W. M. M., 2014, In : Journal of Physical Chemistry C. 118, 6, p. 8702-8711 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

38 Citations (Scopus)
3 Downloads (Pure)

The use of atomic layer deposition in advanced nanopattering

Mackus, A. J. M., Bol, A. A. & Kessels, W. M. M., 2014, In : Nanoscale. 6, 19, p. 10941-10960 20 p.

Research output: Contribution to journalArticleAcademicpeer-review

159 Citations (Scopus)
9 Downloads (Pure)
2013

Atomic layer deposition of nanomaterials for Li-ion batteries, fuel cells, and solar cells

Kessels, W. M. M., Knoops, H. C. M., Weber, M. J., Mackus, A. J. M. & Creatore, M., 2013, In : Material Matters. 8, 4, p. 117-117 1 p.

Research output: Contribution to journalArticlePopular

2 Downloads (Pure)

Atomic layer deposition of platinum : from surface reactions to nanopatterning

Mackus, A. J. M., 2013, Eindhoven: Technische Universiteit Eindhoven. 205 p.

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

Open Access
File
1289 Downloads (Pure)

Catalytic combustion reactions during atomic layer deposition of Ru studied using 18O2 isotope labeling

Leick, N., Agarwal, S., Mackus, A. J. M., Potts, S. E. & Kessels, W. M. M., 2013, In : Journal of Physical Chemistry C. 117, 41, p. 21320-21330 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)
1 Downloads (Pure)

Catalytic surface reactions during nucleation and growth of atomic layer deposition of noble metals : a case study for platinum

Mackus, A. J. M., Bol, A. A. & Kessels, W. M. M., 2013, Atomic Layer Deposition Applications 9. Roozeboom, F. & Delabie, A. (eds.). Pennington, NJ, USA: The Electrochemical Society, p. 183-193 (ECS Transactions; vol. 58).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)
1 Downloads (Pure)

Direct-wire atomic layer deposition of high-quality Pt nanostructures : selective growth conditions and seed layer requirements

Mackus, A. J. M., Thissen, N. F. W., Mulders, J. J. L., Trompenaars, P. H. F., Verheijen, M. A., Bol, A. A. & Kessels, W. M. M., 2013, In : Journal of Physical Chemistry C. 117, 20, p. 10788-10798 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

38 Citations (Scopus)
5 Downloads (Pure)
79 Citations (Scopus)
2 Downloads (Pure)

Nanofabricage van koolstofnanobuistransistors met atoomlaagdepositie

Thissen, N. F. W., Mackus, A. J. M., Kessels, W. M. M. & Bol, A. A., 2013, In : Nevac Blad. 51, 3, p. 10-

Research output: Contribution to journalArticleProfessional

2 Downloads (Pure)

Room-temperature atomic layer deposition of platinum

Mackus, A. J. M., Garcia-Alonso Garcia, D., Knoops, H. C. M., Bol, A. A. & Kessels, W. M. M., 2013, In : Chemistry of Materials. 25, 9, p. 1769-1774 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

48 Citations (Scopus)
4 Downloads (Pure)
2012

Catalytic combustion and dehydrogenation reactions during atomic layer deposition of platinum

Mackus, A. J. M., Leick, N., Baker, L. & Kessels, W. M. M., 2012, In : Chemistry of Materials. 24, 10, p. 1752-1761

Research output: Contribution to journalArticleAcademicpeer-review

83 Citations (Scopus)
7 Downloads (Pure)

Dehydrogenation reactions during atomic layer deposition of Ru using O2

Leick, N., Agarwal, S., Mackus, A. J. M. & Kessels, W. M. M., 2012, In : Chemistry of Materials. 24, p. 3696-3700

Research output: Contribution to journalArticleAcademicpeer-review

19 Citations (Scopus)
1 Downloads (Pure)

Jaarringen

Mackus, A. J. M., Garcia-Alonso Garcia, D. & Kessels, W. M. M., 2012, In : Nederlands Tijdschrift voor Natuurkunde. 78, 8, p. 379-379

Research output: Contribution to journalArticleProfessional

Mass spectrometry study of the temperature dependence of Pt film growth by atomic layer deposition

Erkens, I. J. M., Mackus, A. J. M., Knoops, H. C. M., Smits, P., Ven, van de, T. H. M., Roozeboom, F. & Kessels, W. M. M., 2012, In : ECS Journal of Solid State Science and Technology. 1, 6, p. 255-262 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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26 Citations (Scopus)
133 Downloads (Pure)

Nanocontacten schrijven met atoomlaagdepositie

Mackus, A. J. M., Dielissen, S. A. F., Mulders, J. J. L. & Kessels, W. M. M., 2012, In : Nederlands Tijdschrift voor Natuurkunde. 78, 7, p. 290-293 4 p.

Research output: Contribution to journalArticleProfessional

1 Downloads (Pure)

Nanopattering by direct-write atomic layer deposition

Mackus, A. J. M., Dielissen, S. A. F., Mulders, J. J. L. & Kessels, W. M. M., 2012, In : Special Publication - Royal Society of Chemistry. 4, 15, p. 4477-4480 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

46 Citations (Scopus)
5 Downloads (Pure)

Plaatsopgeloste depositie van Pt nanostructuren door het combineren van elektronenbundel geïnduceerde depositie en atoomlaagdepositie

Dielissen, S. A. F., Mackus, A. J. M., Mulders, J. J. L. & Kessels, W. M. M., 2012, In : Nevac Blad. 50, 2, p. 7-9

Research output: Contribution to journalArticlePopular

Supported core/shell bimetallic nanoparticles synthesis by atomic layer deposition

Weber, M. J., Mackus, A. J. M., Verheijen, M. A., Marel, van der, C. & Kessels, W. M. M., 2012, In : Chemistry of Materials. 24, 15, p. 2973-2977 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

112 Citations (Scopus)
2 Downloads (Pure)
2011

Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma

Baker, L., Cavanagh, A. S., Seghete, D., George, S. M., Mackus, A. J. M., Kessels, W. M. M., Liu, Z. Y. & Wagner, F. T., 2011, In : Journal of Applied Physics. 109, 8, p. 084333-1/10 10 p., 084333.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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78 Citations (Scopus)
371 Downloads (Pure)

Selective in-situ atomic layer deposition on structures created with EBID

Mackus, A. J. M., Kessels, W. M. M. & Mulders, J. J. L., 2011, In : Microscopy and Analysis. 25, 4, p. 5-8

Research output: Contribution to journalArticleProfessional

4 Downloads (Pure)
2010

Local deposition of high-purity Pt nanostructures by combining Electron Beam Induced Deposition (EBID) and Atomic Layer Deposition (ALD)

Mackus, A. J. M., Mulders, J. J. L., Sanden, van de, M. C. M. & Kessels, W. M. M., 2010, Physics@FOM Veldhoven, 19-20 January 2010, Veldhoven, The Netherlands. Graef, de, M., Zegers, G., Min, E. & Pavert, van de, F. (eds.). Utrecht: Stichting FOM, p. P03.57-162

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

3 Downloads (Pure)

Local deposition of high-purity Pt nanostructures by combining electron beam induced deposition and atomic layer deposition

Mackus, A. J. M., Mulders, J. J. L., Sanden, van de, M. C. M. & Kessels, W. M. M., 2010, In : Journal of Applied Physics. 107, 11, p. 116102-1/3 3 p., 116102.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
60 Citations (Scopus)
152 Downloads (Pure)