• 1561 Citations
20072020

Research output per year

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Impacts

Advanced ALD technologies

M. (Adriana) Creatore (Researcher), W.M.M. (Erwin) Kessels (Researcher) & Adrie J.M. Mackus (Researcher)

Impact: Research Topic/Theme (at group level)

Future nanoelectronics and nanopatterning

Ageeth A. Bol (Researcher), W.M.M. (Erwin) Kessels (Researcher) & Adrie J.M. Mackus (Content manager)

Impact: Research Topic/Theme (at group level)