Activities per year
Activities
Search results
-
Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma
A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member) & F. Roozeboom (Invited speaker)
24 Jul 2018 → 28 Jul 2018Activity: Talk or presentation types › Invited talk › Scientific
-
Overview of approaches for achieving area-selective ALD
A.J.M. Mackus (Invited speaker)
29 Apr 2018 → 1 May 2018Activity: Talk or presentation types › Invited talk › Scientific