Activities per year
Activities
Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma
A. Mameli (Member), , M.A. Verheijen (Member), , B. Karasulu (Member), , A.J.M. Mackus (Member), , W.M.M. Kessels (Member), & F. Roozeboom (Invited speaker)
24 Jul 2018 → 28 Jul 2018
Activity: Talk or presentation types › Invited talk › Scientific
Overview of approaches for achieving area-selective ALD
A.J.M. Mackus (Invited speaker)
29 Apr 2018 → 1 May 2018
Activity: Talk or presentation types › Invited talk › Scientific