Adrie J.M. Mackus

Activities

Activities per year 2018 2018

• 2 Invited talk
• 1 Contributed talk

Activities per year

Search results

• Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma

  A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member) & F. Roozeboom (Invited speaker)

  24 Jul 2018 → 28 Jul 2018

  Activity: Talk or presentation types › Invited talk › Scientific

• Overview of approaches for achieving area-selective ALD

  A.J.M. Mackus (Invited speaker)

  29 Apr 2018 → 1 May 2018

  Activity: Talk or presentation types › Invited talk › Scientific